CONFIDENTIAL © 2009 Cymer, Inc. IBP – GTS Product Catalog – Understanding Information Provided Marcus Osibov

Training Agenda CONFIDENTIAL © 2009 Cymer, Inc. 2 Understanding the Product Catalogs Oracle – How to identify laser configuration Laser Configuration – FRU Support

DUV Product Catalog CONFIDENTIAL © 2009 Cymer, Inc. 3 Documents approved laser configuration to be built in CYMER Factory Documents approved laser configurations in the field. Approved configuration will be supported by Engineering, Software, Logistic, and Technical Support Department. DUV Product Catalogs: XLR-500i & XLR-600ix: XLA-300 & XLA-400: XLA-100 & XLA-200: ELS-6000 & ELS/NL-7000: ELS-5000:

DUV Product Catalog CONFIDENTIAL © 2009 Cymer, Inc. 4 Cover Page Tab: Product Line Management Director, Document Owner New Product Technical Support Manager New Product Technical Support Engineer Parts, Planning & Analysis Manager Quality Assurance Director Business Manager, Account Management - ASML Sr Business Manager, Account Management - Nikon Revision History Tab: Revision Date of CO release CO number CO Owner Description of changes Purpose Tab: Definitions: End User Identification Hardware Software Features CYMER Spare Contracts

Product Catalog – Laser Model Tab CONFIDENTIAL © 2009 Cymer, Inc. 5 Two Laser Configuration Categories CSD Build Field Laser Model Tab is broken into 7 sections: Model Number New Laser / End User Configuration WSO Spares (Supporting FRU list) Upgrade Direct Customer Hardware Software Activation

Laser Model Name CONFIDENTIAL © 2009 Cymer, Inc. 6 Model Name - Reference only. Displays full laser configuration naming. Within CYMER data bases, the model name may be broken into sub components. New models name is created due to the following reasons: Delta Hardware from Base model Delta software activation Service Contract Laser Performance Specification (Hardware or software feature) End User + Process New Model designator – “F” + number, Example: F01 XLA-340 (Initial release of laser model) XLA-340-F03 (New feature)

Laser Model Name CONFIDENTIAL © 2009 Cymer, Inc. 7 XLA-340: Field base models are identified from CSD Build configurations. XLA-340-B: “B” identifies billable contract to the customer XLA-340-I-1268: “I” identifies Intel, and Intel process XLA-340-I-1270-B Laser configuration names may consist of 4 components. 1. Base model: laser configurations shipped from CSD 2. End User: Identify End User with copy exact policy. Example: Intel 3. End User Process: Identifies End User manufacturing process if End User has copy exact policy 4. Spare Contract: identifies lasers with Billable or Non-Billable Service / Material contracts. Joining the above information (1-4) creates the Model Name

World Service Organization (WSO) CONFIDENTIAL © 2009 Cymer, Inc. 8 FRU Hardware Feature: Identifies FRU list (hardware modules) to be used to support laser configuration. Factory Orderable (Laser Model): Yes or No. There are more field configurations due to field upgrade, then configurations which direct customers can purchase. Not all laser configurations can be ordered from the factory. Spare (FRU) Support by: Manufacturing: Support CSD laser builds. WSO Logistics: Uses agile released FRU lists – “Evaluation” or “Production” status. Engineering: Support beta configuration, only beta test modules. Released modules will be support by WSO Logistic (standard support plan).

(Field) Upgrade CONFIDENTIAL © 2009 Cymer, Inc. 9 Upgrade List / Kits: Kits required to create laser configuration from Base Configuration model. Upgrade List: List of parts or kits required to be ordered for upgrade. Upgrade Kit: Kit containing module / hardware for upgrade and list of Software keys Upgrade Orderable: Yes or No Base Configuration: - as shipped from CYMER San Diego.

Direct Customer CONFIDENTIAL © 2009 Cymer, Inc. 10 Direct Customer P/N: Direct Customer order number for specific laser configuration. Direct Customer Model Name: Model name used by Direct Customer, which may or may not match CYMER model name.

Hardware CONFIDENTIAL © 2009 Cymer, Inc. 11 Delta Core Module from Baseline Model: List hardware delta from base configuration. Module part numbers are reference only. Product catalog does not get revised when module part number are changed.

Software Activation CONFIDENTIAL © 2009 Cymer, Inc. 12 Software featured which require activation key. Activation keys are sold to the customer. E95: Measure of integrated spectral energy content (contains 95% of energy) ASC: Active Spectral Control - A feature to maintain a low variation of E95 ABS: Advanced Bandwidth Stabilization TABS: Tunable Advanced Bandwidth Stabilization GLX: Gas Life Extension - A feature to minimized downtime associated with gas refills by extending the time between required gas refills. GLX 1 = 1 billion shot or GLX 2 = 2 billion shots between refills FD: Focus Drilling iGLX: Extended gas life extension. ETC: Energy Timing Control (ASML) only. HPA: High Power Arf (Power Switching) XLR W D69 Value: Each software activation has a bit value, D69 indicates total bit value of software activation which are “on”.

Frequently Asked Questions (FAQ) Why is my configuration not listed in the product catalog? 1. Laser is not an approved configuration. Mostly likely an unauthorized software key is “activated”. D69 value does not match in the product catalog. Action: Change laser to an approved configuration. 2. CSD missed a configuration and needs to up date the product catalog. Action: Product catalog will be updated 3. Laser is in a “Beta” test configuration. Laser configuration is being controlled by CSD engineering department. Action: No action required while laser is in “Beta” test configuration. After test is complete either Product Catalog will be updated or laser will return to an approved configuration. Contact Technical Support for clarification of laser configuration (item #1 or item #2). ? CONFIDENTIAL © 2009 Cymer, Inc. 13

Frequently Asked Questions (FAQ) Who decides what is an Approved configuration? CSD program manager and marketing department decides what is an approved configuration. CONFIDENTIAL © 2009 Cymer, Inc. 14

Frequently Asked Questions (FAQ) Why do we limit laser configurations? 1. Marketing strategy 2. Cost to support laser configuration. 3. Laser hardware being obsoleted. CONFIDENTIAL © 2009 Cymer, Inc. 15

How often does the Product Catalog get updated? Product catalog is schedule for quarterly review, but could be updated as required. CONFIDENTIAL © 2009 Cymer, Inc. 16 Frequently Asked Questions (FAQ)

What happens if laser configuration is not correctly identified in Oracle? Logistic FRU determination program (SPO) will create demand for incorrect parts to be manufactured and deliver incorrect spares to local warehouse. Long down event may occur when the required part is not available. CONFIDENTIAL © 2009 Cymer, Inc. 17 Frequently Asked Questions (FAQ)

Why do we use “Fxx” identification on laser names? “-Fxx” identification is required because CYMER data bases requires unique laser name for each laser configuration. New laser configuration is required if laser specifications, Software Features or Hardware is different then base configuration. “Fxx” numbers are added after base configuration “Fxx” number configuration may not be identical between laser models. Refer to Product Catalog for correct laser configuration CONFIDENTIAL © 2009 Cymer, Inc. 18 Frequently Asked Questions (FAQ)

CONFIDENTIAL © 2009 Cymer, Inc. 19 CYMER Product Catalog (Base) Impact from Product Catalog and the three initial documents that need be created. IBP Logistics Software Engineering Mfg Finance Oracle Laser ID FRU List G/P List * 1. Top Assy 2. Product Matrix * Field ID Service Planning and Optimization (SPO) Demand Distribution Local Warehouse G/P list Reports Customer Billing Base = One Laser Configuration (Hardware & Software) * = Additional customer requirements upon each hardware / feature configuration Quality Reports

CONFIDENTIAL © 2009 Cymer, Inc. 20 Documentation Requirements IBP LogisticsEngineering Mfg Finance Upgrade Procedure Module R&R Field Installation FRU Oracle Training Development Import / Export Cost Build Instructions Module Assy Module Testing Optical Test FRU – mapping Spare Demand Top Assy Module - testing G/P list

CONFIDENTIAL © 2009 Cymer, Inc. Supporting Documentation For Field Service Engineers Product Matrix Marcus Osibov

D69 worksheet CONFIDENTIAL © 2009 Cymer, Inc. 22 eLibrary link:

Product Matrix CONFIDENTIAL © 2009 Cymer, Inc. 23

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