UNIVERSAL CONCEPT FOR FABRICATING ARBITRARY SHAPED μIPMC TRANSDUCERS AND ITS APPLICATION ON DEVELOPING ACCURATELY CONTROLLED SURGICAL DEVICES Reporter: sang-chung yang( 楊善淳 ) Advisor: Prof. C.H. Liu MEMS2007 Page:32 Gou-Hua Feng and Ri-Hong Chen Department of Mechanical Engineering, National Chung Cheng University

Sang-chung MSCL Introduction Working principle Fabrication Testing Results Conclusions Outline

Sang-chung MSCL Introduction 傳統手術傷口 內視鏡手術傷口 Ref: JiannJiann-Liang Chen MD, PhD Ref: Gou-Hua Feng 10cm 0.5~1cm 內視鏡手術用的工具

Sang-chung MSCL ＰtＰtＰtＰt Nafion 離子交換膜在燃料電池的應用 離子交換膜在 IPMC 的應用 Ref: Yung Yuen CO Ref: Gou-Hua Feng Introduction IPMC:Ionic polymer metal composites

Sang-chung MSCL Working principle Working principle of an IPMC transducer: (Left) No voltage is applied. (Right) Voltage isapplied to cause IPMC bending. Ref: Byungkyu Kim et al,2003 R:reaction force E:young ’ s modulus I:inertia δmax:maximum deplacement at tip L:length of IPMC V=0 V=5

Sang-chung MSCL Fabrication IPMC fabrication method 1 μ IPMC fabrication method 1 Process flow diagrams for fabricatingμIPMC transducers with MEMS parallel processing spirit.

Sang-chung MSCL IPMC fabrication method 2 μ IPMC fabrication method 2 Fabrication process flow diagram for the production of IPMC transducers It’s different compare to method1. Ref: Gou-Hua Feng et al, 2007 Fabrication 2.Apply Wax 1.Substrate 3.Deposit parylene-c 4.Remove wax 5.Pattern PR 6.Spray Nafion 7.Remove parylene 8.Deposit Pt 9.Immersion into NaOH 10.After 3 hours

Sang-chung MSCL Fabrication Photograph of negative photoresist JSR-made micromold array on bulk-micromachined SiN diaphragms. Photograph of diluted Nafion solution sprayed to fill up the micromolds

Sang-chung MSCL (Top) Individual devices of IPMC transducers with platinum electrodes simultaneously formed on top and bottom surfaces. (Bottom right) Cross- sectional view of the device with a clear edge that no short-circuits occur. (Bottom left) A newly developed device with varied thickness Fabrication

Sang-chung MSCL Testing Experimental setup for measuring displacement of actuated IPMC transducers. Experimental setup for measuring force output of the device with a high-resolution (0.01 mN) electronic balance.

Sang-chung MSCL Relationship between the displacement and frequency. Results

Sang-chung MSCL Results Results of instantaneous maximum output force vs. applied voltage for 0.5, 1, and 1.5 Hz.

Sang-chung MSCL Demonstration of the IPMC transducer gripping a flexible tube (Left: Front view; Bottom right: side view). Results

Sang-chung MSCL IPMC 這種材料其實是在離子交換膜兩面鍍金屬後成類似三明治的結構， 依輸入的電壓大小、頻率、波形產生不同形變的致動器，因為離子交 換膜通常是含水的狀態，是不是有水解的情況發生 ? 位移的響應時間是否足夠快？ IPMC 表面阻抗、含水量及電場分佈情形都會對其性能產生影響，表面 阻抗愈低以保持含水量愈多皆可提昇其性能，而電場分佈與形變時之 幾何形狀有關，因此較難掌握 結構強度的問題。 IPMC 是含水的致動器，可用來做為水下彷生的機器人 Conclusions

Sang-chung MSCL Introduction Ref: 朱銘祥 Ref: Byungkyu Kim et al,2003