Bruno Murari STMicroelectronics Universita’ di Pavia 24 Marzo, 2004 Microelettronica e MEMS Oggi

Outline The Electronic System Building Blocks System Oriented and Smart Power Technologies MEMS: Inertial Sensors and Microactuators Microfluidics: Lab on Chip and Photonics Switches Packaging and Interconnections Conclusions

The Electronic System Building Blocks

Concentrated System in a Single Box

Typical Aggregation of Different Technologies for System Optimization

System Oriented and Smart Power Technologies

BCD History and Evolution

Engine Control Unit Architecture

Typical SoC for Intelligent Mirror in Modern Cars

Example of Intelligent Mirror in Modern Cars

Typical Power Management Chip for Mobile Phones

Example of Portable Sets that require Sophisticated Power Management Chips

N/P-LDMOS in H-bridge Optical Data Storage Disk Drive Integrated motor driver device with capability to control the spindle, tracking, focus and tray motors. This device operates on a single 3.3V supply and provides integrated power FETs for all engine motors. N/P-LDMOS in H-bridge N/P-LDMOS in H-bridge

N/P-LDMOS in H-bridge Logic CMOS Power Combo for Data Storage Hard Disk Drive

Head Driver for Printer Logic CMOS N/P-LDMOS

Efficiencies for Different Classes of Operation for Audio Output Amplifiers

System Structure of High Efficiency PA Front High Impedance Rear Buffer Control Logic Vin FVin R FP FM RM RP I_F I_R I_RP Final Amplifier FrontFinal Amplifier Rear

Example of 2x75 Watt High Efficiency PA Thick (6  m) Copper Metallization

DDX ® - Direct Digital Amplification

MEMS: Inertial Sensors and Microactuators

Silicon as Structural Material

MEMS MEMS: M icro E lectro M echanical S ystem – three dimensional device embedded in silicon – multifunction system consisting of sensors, actuators, electronics.

Different Type of Accelerometer

Rotational Accelerometer

Silicon Microstructures in Future HDD

Typical Assembly of an HDD Suspension with Microactuator

Microactuator Chip

Microactuator Concept

Microactuator without Cap Movie

Microactuator with Cap Movie

Atomic Resolution Storage from HP A tomic R esolution S torage (ARS) technology Uses focused electron beams and a phase change media to read and write data Micromachined movers provide high resolution access of media by fixed emitter tips Technology developed at HP Labs ARS products Perfect for mobile applications Small, high density storage Memory cards and embedded storage applications Cost effective … enabling appliances and applications Scientific American – January 2003

Millepede from IBM Scientific American – January 2003 High Doped Silicon Cantilever Heater

Millipede Movie (from IBM web Site)

Microfluidics: Lab on Chip and Photonics Switches

Ink Jet Cartridge

Lab on Chip

“Sample to Answer” Flow

Lab on Chip Movie

Bubble Switch for Optical Network ST/AGILENT Partnership

Photonic Switching Concept

ST/AGILENT Bubble Switch Movie

Packaging and Interconnections

High Voltage Interconnection

High Voltage Through Silicon Vias

Multichip and Stacked Dice

Conclusions The VLSI evolution has been and will a be major driving force, but does not cover the whole picture Interfacing the real world requires for different approaches, skills and education Analog electronics is the bridge between the laws of nature (physics) and computing (software): multidisciplinary by nature, impossible to be constrained in one scheme Lateral thinking is a key process for quantum leaps in innovation

Thank You