Litho Area Centre for Nano Science and Engineering Indian Institute of Science, Bangaluru  Laser Writer  EVG double side mask aligner  EVG Bonder  Reith e-line unit

Laser Writer usage statistics (July-Aug 2011) Dept Hours of usage ISU4 PHYSICS8 MRC12 PHYSICS4 Ramaiah16 MRC8 4 INUP240 IPC12 ISU4 MECHANICAL4 8 CEN8 PHYSICS8 CEN4 ECE4 PHYSICS16 PHYSICS20 PHYSICS20 CEN4 MECHANICAL8 CEN168 PHYSICS4 ISU8 CEN8 604 Total machine hours = Per day 12 hrs * 5 days per week * 4 weeks per month Total machine hours= 12*5*4 = 240 Hrs per month Two months = 240 * 2 = 480 hours Laser writer usage = 604 hours Weeks No. of hours

Week Hours of usage Total: 604 hours

Mask Aligner usage statistics (Aug. 2011) Dept Hours of Usage Week Total ECE8 INUP14 ECE6 MRC331 ECE MRC2 ECE2 MRC435 ECE3 INUP6 MRC8 ECE ECE8 IPC8 MEC6 ECE6 MRC3 INUP3 ECE335 Total(hours)142 Total machine hours = Per day 8 hrs * 5 days per week * 4 weeks per month Total machine hours= 8*5*4 = 160 Hrs per month EVG-620 usage = 142 hours

Mask Aligner weekly usage statistics (Aug. 2011)

Electron beam lithography system usage statistics (Aug. 2011) DEPT. No. of slotsNo. of hours ECE624 MRC416 ECE14 MRC210 PHY28 28 CEN28 PHY14 MRC14 ECE28 14 CEN28 MECH ENG14 PHY418 CEN28 MECH ENG14 ECE212 MRC28 ECE28 TOTAL40178 Total machine hours = Per day 8 hrs * 5 days per week * 4 weeks per month Total machine hours= 8*5*4 = 160 Hrs per month E-line usage = 178 hours No. of hours

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