1. National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India TUMS Murthy Aug 27, 2013 Clean room administrative committee Meeting

2. TUMS MURTHY Aug 27, 2013 Cleanroom Admin Commitee Meeting Action points ActionWhoStatus User agreement implementation Dr. MurthyImplemented Report actual usage of Electricity at CeNSE ArunSee next slide Asset register and barcoding CommitteeTo be started

3. TUMS MURTHY Aug 27, 2013 Cleanroom Admin Commitee Meeting Electrical consumption CeNSE transformer (1600KVA) – Peak Load 16% – Power consumption 7525 KWH /mth NNfC transformer (1600 KVA) – Total Peak Load 32 % ( Utilities 20% + Fab 12%) – Total Power consumption 3,33,800 KWH/mth (Utilities 205.8 + Fab 128)

4. TUMS MURTHY User agreement implemented – Useful feedback regarding slot-booking Tech forum and process review meetings every week among the NNfC staff User statistics Electrical usage at CeNSE Aug 27, 2013 Cleanroom Admin Commitee Meeting Highlights

5. TUMS MURTHY Litho room layout being modified Wet exhaust dampers to be located inside the wet etch room to increase effectiveness Aug 27, 2013 Cleanroom Admin Commitee Meeting Plans

6. TUMS MURTHY Aug 27, 2013 Cleanroom Admin Commitee Meeting Other Issues PCW quality is still not satisfactory Liq N2 to other CeNSE labs to be charged or not charged