Micro to Nano Technologies By: Brent Hare Lenox laser March 30, 2004

Micro to Nano Technologies Micro - Prefix meaning one millionth, 1/1,000,000 Nano – Prefix meaning one billionth, 1/1,000,000,000

The Powers of Meter Centimeters Centimeters Millimeter Microns Microns Micron ,000 Angstroms Angstroms Nanometer Angstrom Pico meters Pico meter Fermis Fermis Fermi Fermis Fermis Fermis

Current Micro Technologies Photonics - Optical Apertures and Flow Orifices Electronics – Semiconductor chips, anodic bonding MEMS – Micro Electro Mechanical Systems Communication – Fiber optics, switching interconnects Biotechnology - cell filtration, drug discovery

Current Nano Technologies Molecular manufacturing – Precision down to the atomic level Nanotubes – Building advanced lightweight materials as well as advancements in LCD technologies Medicine – Devices that will flow through the circulatory system Nanocomposites – Assisting in vast improvements in material compositions Electronics – Advanced CMOS and silicon transistor integration with lithography

mms://stream.techtv.com/windows/bigthinkers/2 002/bt020225b_165_0.asf Micro scaling to Nano Click Picture to watch Nanotechnology movie

microlensar.htm Micro - Optics Ability to drill to ½ micron for half the wavelength Micromirrors for next generation telescope optics Micromirrors Microlens Arrays

13.htm Micro - Electro Pentium 4- Top speed – 3.4ghz Built on a 0.13 micron die 168 million transistors on 200mm 2

Micro - Chemical Miniature fuel cells Micro channels Chemical reactors 50 Micron Chemical Reactor Micro Chemical Channel Micro Fuel Cell

Photos from Pittcon Micro Flow Devices = Swagelock has begun to minaturize its flow components 3ft. X 4ft. 6in. x 18in.

Micro - Engineering Micro gears Micro embossing and stamping Microactuators (Tiny Motors) Micro-valves Micro embossing Complex Ratchet

s/technolo/micro/photo.htm Micro - Mechanical Microactuators – tiny motors

Micro Mechincal Worlds smallest steam engine, the pistons are 5 microns and it actually works Micro Clutch mechanism, gears are 50 microns

ain.shtml Microfluidics Capillary uptake Piezoelectric inkjets Flow sensing Drug dispensing Flow based separation Print Cartridges Lab-On-Chip for DNA Detection and Analysis Micro Canals

Micro Communications Full optical switching technologies Most fiber optic backbone in the United States ranges from 1.3 to 1.5 micrometers and can transmit over 5 GBps and can span 93 miles Fiber optic switching

e-blox (Scaleable, Interfaceable, Stackable) Micro to nano interfaces for simple solutions e-blox allows you to build backbones connecting Gas, Liquid, Electro, Optical – Fiber/Micro, and nanotechnologies in order to build unique devices for MEMS and other technologies Imagine devices built with the integration of all of these competing technologies on a Scaleable, Interfaceable, Stackable solution at the micro and nano level

m?document_id=5340 MEMS (Powder Metal Die Casting for building small parts) The ability to arrange particles and then compress them into a die to build ultra small parts that can be used in MEMS technologies i.e. e-blox They have the ability to create miniature tools and dies to help build MEMS technologies Micro Sensor 0.051mm

Rapid Prototyping Use of 3D CAD modeling with SolidEdge 3D Scanning Technologies – Use of lasers and optics to scan surface objects 3D Holography Technologies – Holograms for real visualizations 3D CAD Model

Electroforming Technologies Electroforming is the process of fabricating a part from the plating itself. A shaped mandrel is plated long enough to build up a "stand alone" thickness. The mandrel is then removed by melting, chemically etching or exploiting differences in thermal coefficients of expansion between the electroformed part and the mandrel.

ml Etching Technologies Wet Etching – Dissolves materials with chemicals and the use of masks Dry Etching - ion etching (RIE), sputter etching, and vapor phase etching are used by blasting the material surface with ion gases

Lithography Technologies Lithography is a printing process where image areas and non-image areas are separated chemically Silicon semiconductor companies use extremely small masks to mark silicon wafers with 248 nm, 193nm, and now 13.4nm wavelengths of light

Piezeo electronics (for micro to nano movement) Pizeoelectronics are materials that produce an electrical response to a mechanical force. Can be used in Vibration Monitoring, Imaging Arrays, Doppler Probes, Biotech, Pharmaceutical, and Industrial & Process Control

2&articleID=000CE8C4-DC B7F0000&pageNumber=4&catID=2 First NanoChips Integrated circuits can be made down to 50nm 50nm chips are made using 193nm lithography (smaller than a wavelength so they use diffraction corrections)

2&articleID=000CE8C4-DC B7F0000&pageNumber=4&catID=2 Next Generation Nano Lithography To build chips smaller than 50nm, new lithography technologies must be created – The above technology can use 13nm ultraviolet wavelengths

2&articleID=000CE8C4-DC B7F0000&pageNumber=4&catID=2 Nano Biotechnologies Scientists have developed a way to use DNA for minuscule wires that can be used in nanoelectronics Ability to have insulated wires sized at 25nm and 20 microns in length

Articles/Archive/images4/nanotubes-model.jpg Nanotubes Conductive and high- strength composites Energy storage and energy conversion devices Sensors Medical drug delivery and DNA research Nanometer-sized semiconductor devices, probes, and interconnects Nanotubes are built by arranging several atoms in a closed pattern to form an unbelievably small tube