Cleanroom Safety Training May 2009 Cleanroom Safety Training 2nd Edition, NR

All users must first complete the annual safety training offered through the WUSTL Environmental Health and Safety department. http://ehs.wustl.edu/training/Pages/default.aspx

Areas of the Cleanroom Entry Wipe Down Class 1,000 Bay Entry Vestibule Gowning Class 100 Bay Shower & Eye Wash Station Main Entrance/Exit Emergency Exit First Aid Kit

Personal Safety • Eating, drinking, smoking, handling contact lenses and applying cosmetics is strictly prohibited in areas where hazardous laboratory chemical or biological materials are used or are intended for use. • Storage of food and beverage in containers or in areas that are intended or are used for storage of hazardous laboratory materials is prohibited.

Off-hours Use Operation of equipment or completion of any process off-hours requires a MINIMUM of 2 authorized users in the cleanroom at all times. 20 hours of daytime use and an additional training are required for off-hours instrument and cleanroom use. No Hydrofluoric Acid use off-hours.

User’s Chemicals and Samples “NEW” chemicals must first be approved by Staff. Confirm there is a MSDS for the chemical you wish to bring in. You are responsible for providing an MSDS if there is not a copy in the MSDS notebook. All chemicals and samples brought into the lab must be clearly labeled with user name, group name, contact info, chemical name and the date. Unlabeled chemicals and samples are subject to disposal. Liquid-filled containers in fume hood must be labeled with contents, user name, PI, expected time of disposal and phone number. The maximum time for unattended chemicals is 12 hours.

Allowed & Prohibited Items Cleanroom notebooks are required for taking notes in the cleanroom. Cleanroom paper will be available for notes. All approved items that are brought into the cleanroom must be wiped down to remove dust particles and oil. Prohibited Allowed Cardboard and paper Plastic items Pencils Cleanroom paper and notebooks Cloth items Pens Hats and coats Synthetic fabrics(polyester, nylon) Paper items sealed in plastic

Standard laboratory dress code applies under all cleanroom attire. Cleanroom Gowning Standard laboratory dress code applies under all cleanroom attire.

Cleanroom Gowning Users may store personal items in one of the lockers outside of the gowning area. Frequent users will receive there own locker to share with their group.

Cleanroom Gowning • Each user receives a hood, a garment, and a pair of cleanroom boots to be worn in the class 1,000 and class 100 bays. Class 10,000 bay users only need shoe covers, a hairnet and lab coat.

Class 1000/100 NRF Gowning Process Put your name, instrument used, gases and chemicals used on the dry erase board. Sign into the FOM system and log into the instrument.

Class 1000/100 NRF Gowning Process Clean shoes with motorized shoe cleaner. Put on shoe covers and hair net. Swipe card key and enter cleanroom.

Class 1000/100 NRF Gowning Process Place all items on the wipe down table and put on a pair of gloves. Using the spray bottle, moisten a cleanroom wipe with the water/isopropanol solution and wipe down all the items being brought into the cleanroom.

Class 1000/100 NRF Gowning Process Put on the cleanroom hood and snap the hood under the chin. Put on the cleanroom suit being careful not to drag the suit on the floor in the process. Tuck the bottom of the hood into the suit, zip it up and snap the top snap. Put on two boots and be sure to snap them on the back of the legs.

Class 1000/100 NRF Gowning Process When exiting the cleanroom, simply reverse the steps, placing the coverall and hood on a hanger and the boots in the storage rack. Gloves can be placed in the trash and shoes covers and hairnets can be placed in locker for later use. Once in the cleanroom, your suit should not be opened or unzipped. Return to gowning room to retrieve items from within suit. Anything that a user needs access to while in the cleanroom(cell phones, electronics, ect) should be taken out while in the gowning room and wiped down.

All cleanroom waste must be properly disposed. Hazardous Waste All cleanroom waste must be properly disposed.

Hazardous Waste Containers Solvent Waste Acid Waste (HF, HCL, ect) Photolithography Solid Waste Class 10,000 Bay Class 100 Bay 1,000 Bay Entry Vestibule Wipe Down Gowning

General Waste Container Class 10,000 Bay Class 100 Bay 1,000 Bay Entry Vestibule Wipe Down Gowning All non chemical waste.

Cleanliness As an open facility we rely on users to clean up after themselves. Maintaining cleanroom cleanliness is a matter of courtesy and safety.

While Working in the Fume Hoods Do not leave funnels in waste containers No containers are to be left in the sinks Hazardous materials should be at least 6 inches behind the sash of the fume hood

While Working in the Fume Hoods • All manipulation (transferring containers, pipetting, etc…) of chemicals should take place in a fume hood.

While Working in the Fume Hoods Clean photo resist spinners after each use Wipe up any spills immediately. If a hazardous chemical spill occurs outside of a fume hood, you should evacuate the lab immediately and notify NRF staff and University Police(5-5555).

Cleanliness Be considerate of others and clean up after yourself. Please leave amenities in the cleanroom as clean or cleaner than you found it.

Hydrofluoric Acid Hydrofluoric acid can pose significant health risk and should be handled cautiously. Special training is required to use HF and it should never be used while alone.

Hydrofluoric Acid Safety Hydrofluoric acid (HF) presents a significant health hazard! HF is used in the cleanroom in both its pure and dilute form. HF is the active component in Buffered Oxide Etch (BOE) Used to etch silicon dioxide and for stripping native oxide prior to processing. Both liquid and vapor can cause severe burns, which may not be immediately painful or visible. HF will penetrate skin and attack underlying tissues, including bone.

Hydrofluoric Acid Exposure Exposure to HF requires medical attention. If exposure to HF occurs, remove yourself and victim from contaminated area. Immediately wash burned area with water for at least 5 minutes and apply 2.5% calcium gluconate gel. Calcium gluconate is a topical antidote that should be applied liberally after any HF exposure. Calcium gluconate can be found in the cleanroom first aid kit. Always follow proper notification protocol and report accidents and emergency situations to NRF staff.

Hydrofluoric Acid Use HF etches glass thus it must not be kept in a glass bottle or used in a glass beaker. Regardless of concentration of HF, it may NOT be disposed of down the drain. HF must be used only in the HF designated area in the acid fume hood. It may not be removed in a beaker from the hood. Full face shield, acid apron, neoprene outer gloves and nitrile inner gloves are required when using HF or BOE.

Consumable cost will be passed on to users. Consumables Consumable cost will be passed on to users.

Consumables Available Chemicals Solvents Developers Acetone AZ 327 MIF Isopropanol (IPA) SU-8 Developer Methanol PG Remover Ethanol MF Developer Photoresists Acids SU-8 2010 Transene(H3PO4 & HNO3) SU-8 2050 Hydrofluoric Acid (HF) SU-8 2 Sulfuric Acid (H2SO4) PMMA Buffered Oxide Etch (BOE) AZ 5214 E

Available Materials Open Use Upon Request Cleanroom Wipes Gold Pellets Plastic Pipettes Silver Shot Petri Dishes Aluminum Pellets Aluminum Foil Copper Pellets Chromium Pieces Titanium Pellets 2”, 3”, 4” Si Wafers 3” x 1” Glass Slides Material prices are passed on to users and are subject to change.

Cleanroom Gases BCl3 O2 HBr Ar NF3 He Cl2 N2 SF6 CH4 H2

Alarms A variety of reactive gases are used in the cleanroom and an alarm system monitors these chemicals using sensors throughout the cleanroom.

Alarm Protocols Yellow Alert In the event of a YELLOW alarm all personnel in the cleanroom should exit via the gowning area and IMMEDIATELY notify NRF Staff.

Alarm Protocols Red Alarm In the event of a RED alarm all personnel in the cleanroom should IMMEDIATELY exit via the doors to the hallway and notify NRF Staff. DO NOT exit through the gowning area or the service chase. In the event of a RED alarm ALL PERSONNEL should exit the basement until NRF Staff has confirmed that the area is safe. If you believe someone has collapsed in the cleanroom area DO NOT attempt to retrieve them! Call 935-5555 and request a Hazmat team. DO NOT attempt to diagnose an alarm condition or turn off an alarm on your own. Always wait for NRF Staff to respond to the situation.

Citation Requirement The NRF is supported by the National Science Foundation through the Nanotechnology Infrastructure Network. It is important for users to properly cite the support of facilities of the NRF in all publications and presentations made possible by work performed at the NRF. For papers, a suggested acknowledgement reads: “This work was performed in part at the Washington University in St. Louis Nano Research Facility, a member of the National Nanotechnology Infrastructure Network, which is supported by the National Science Foundation (Grant ECS-0335765).”

Before your safety training is completed you need to: Take Our Safety Training Quiz: http://www.surveymonkey.com/s/VJCGFC3 Take a Cleanroom Tour Have a Follow-up Cleanroom Safety Training with a NRF Staff Member