Semiconductor Equipment Fire Suppression Compliance for SESHA North Texas Chapter by Matt Wyman Semiconductor Division Manager KOETTER FIRE PROTECTION March 22, 2007

Koetter Fire Protection Specialize in Semiconductor Equipment Fire Protection Global Design & Install CO2 & FWS Bulk Control Systems for CO2 & FWS Corrosive Applications (Combustible Plastics) SEMI Standards Fire Protection Task Force Leader Specialize in Equipment Design & Integration Code Review & Compliance Consulting NFPA/FM Standards SEMI Standards Semiconductor Fire Protection Training Seminars KFP Test & Training Bench Industry Forms Industry White Papers Industry Presentations (SESHA) 7 Texas Locations & International

Overview Are my new and/or existing fire suppression systems compliant? “Quick” CO2 Design Review Local Application Nozzles Fire Detectors NFPA 12 2005 Changes Bulk Systems Hatsuta Cabinex Equipment Fine Water Spray Fire Suppression Submittals

Fire Codes IFC2006 FM DS 7-7 “Semiconductor Fabrication Facilities” Combustible Tool >4ft. Wide Sprinkler Head Inside or Gaseous Fire Suppression FM DS 7-7 “Semiconductor Fabrication Facilities” CO2 or FWS (Fine Water Spray) CO2 is most widely utilized Extinguish 13kW Fire NFPA 12 “Carbon Dioxide” SEMI S14 “Safety Guidelines for Fire Risk Assessment & Mitigation for Semiconductor Manufacturing Equipment” SEMI S2 “Environmental, Health, & Safety Guideline for Semiconductor Manufacturing Equipment” Chapter 14 “Fire Protection”

CO2 Design Total Flood (TF) Enclosed Compartments Mini-Environments Plenums, Head Cases, Chemical Cabinets 50% CO2 Concentration 60 Second Discharge Compensate CO2 Demand for: Process Exhaust Ventilation Damper Violates SEMI S2 Unclosable Openings

CO2 Design Local Application (LA) Open Compartments Rate by Volume Working Surfaces Rate by Volume “Assumed” 3D Volume 30 Second Discharge No Compensation for Exhaust Ventilation & Openings Combination System (TF & LA) Typically 30 Second Discharge

Existing CO2 Systems “Quick CO2 Review” Typical “Wet Bench” No Calculations Check that Supply = Demand Typical “Wet Bench” Exhaust Rates = ~125cfm/linear foot (typical) “Quick” Demand Calcs TF Demand = 11.5% of Volume (60sec) Volume = Dimension + Exhaust (60sec) LA Demand = Average (8ft = 50lbs, 6ft = 35lbs, 4ft = 20lbs)

Quick CO2 Review Example – 8’L x 4’D x 6’H Enclosed Plastic Bench-100lbs. CO2 Total Volume (TF) = 192cuft x 11.5% = 22.1 lbs. Exhaust Volume (TF) = 125cfm/ft x 8ft x 11.5% = 115 lbs. Total Demand (TF) = 137 lbs. CO2 CO2 Supply = NOT ADEQUATE Example – 6’L x 4’D x 5’H Open Solvent Bench-100lbs CO2 Working Surface (LA) = 35 lbs. (Typical) Plenum Volume (TF) = 6ft x 4ft x 3ft = 72cuft x 11.5% = 8.3 lbs. Plenum Exhaust (TF) = 125cfm/ft x 6ft x 11.5%/2 = 43.1 lbs Total Demand = 86.4 lbs. CO2 System = ADEQUATE

Nozzle Comparisons LA Nozzles TF Nozzles All have “cone” to absorb discharge pressure Reflected discharge from orifice Less exit velocity (same flow rate) Nozzle absorbs most 600psi discharge pressure TF Nozzles “V” Nozzle is “Vent” nozzle (TF) Straight discharge from orifice Full effects of 600+psi discharge pressure on tool (especially baths) Much higher velocity

Local Application Nozzles Working Surface Areas (Wet) Cone shaped for “Soft” discharge Cone shape provides larger 2D coverage area Nozzles pointed downward towards back wall Provides “rolling” effect across Working Surface Side View Front View

LA Nozzle Listings/Approvals All Local Application Nozzles Must Have Coverage Chart 2D Coverage of LA Nozzle Ansul CR D Nozzle Ansul D Nozzle Identical Nozzles FM Listing = FM testing

LA Nozzle Coverage Does this apply to other manufacturers and models? Ansul Has Other LA Nozzles Not for Wet Bench (different coverage chart) Hatsuta Cabinex-EWT Has FM Approved LA Nozzle for Wet Bench Has Own Coverage Chart Chemetron Has FM Approved LA Nozzle(s) Kidde Not for Wet Bench - (different coverage chart) What about Kidde “V” Nozzle for LA?

Kidde “V” Nozzle Kidde “V” Nozzle from Compliance review 1st - Listed & Approved by UL/FM as TF Nozzle ONLY No LA Coverage Chart in Design Manual NOT LISTED/APPROVED FOR USE AS LA NOZZLE “V”=“Vent” type is designed for “high velocity” discharge to overcome exhaust ventilation. 2nd - CAN CREATE A SEVERE SPLASH HAZARD Many documented cases where discharge splashed acid baths Dangerous Exposure to Personnel 3rd - Kidde began manufacturing and listing of Stainless Steel “V” nozzle in June 2005. Previously only available in brass. Previous SS installations were not listed/approved components 4th - Not supported by Kidde for LA Coverage

Kidde “V” Nozzle Copy of Letter from Kidde regarding use of “V” Nozzle for LA Coverage Dated May 26, 2006

SS Corrosion Protection Halar Coating for Stainless Steel Nozzles, Fittings, & Tubing in Corrosive Areas CO2 Tubing CO2 Fittings CO2 Nozzles

Detection Optical Flame Detection (13kW Fire) Heat Detection Solvent Areas Corrosive Areas High Exhaust Rate Areas Heat Detection Low Exhaust Rates – 400cfm limit Slower Response = Tolerate Larger Fire Linear Heat Detection (Corrosive Areas) Cross-Zoning Flame & Heat Detectors (Asia) Prevents “False Discharges” But Negative Affect to Performance

Flame Detectors Infrared (IR) & Ultraviolet (UV) Sensors UV IR Quartz Window Can be “Masked” by Gases, Smoke, Fumes IR Near Band (4.3µ) Hydrocarbon Fire Wide Band (0.7-3.5µ) Visible (0.4-0.7µ) Sierra DCR1(S) UV/IR Cheapest Leakage Problems HF

Flame Detectors Cabinex SX-7000 Det-Tronics PM-5MP Fire Sentry FS7 Triple Band IR (Near) Reliability? Chemical Compatibility? Det-Tronics PM-5MP Dual Band IR (Near) Really Fast False Alarm Issues Fire Sentry FS7 Near Band, Wide Band™, & Visible IR Hydrocarbon & Non-hydrocarbon Alarm & Pre-Alarm Outputs 5-sec Alarm Verification (Flash Fires) FirePic History Most Reliable Flame Detector!

Flame Detector Reliability False Alarm Immunity KFP TEST Compare Reliability of FS7 vs. PM-5MP to “Steam” Blackbody IR Radiation Alarm Signal (False Alarm) 300ºF - 600ºF 6” – 36” Distance Det-Tronics Technical Note Alarm from Mini Maglite @ 2” w/o window Alarm from Maglite @ 1-3” with & w/o window Alarm from Quartz Halogen Light @ 3ft.

Spot Smoke Detectors 2 Types 120VAC “First Alert” Spot Smoke Detector UL Listed as RESIDENTIAL detector 24VDC Fire Alarm System Spot Smoke Detector UL Listed for use with compatible “cross-listed” FACP SEMI S2 Section 14.4.4 Fire Detection, Alarm, & Controls 14.4.4.1&2 All detectors, alarms, and controls be accepted and listed by an accredited laboratory (example UL or FM) and installed in accordance with the terms of that acceptance and appropriate national or international standards (ex. NFPA 72) Spot Detectors are NOT Compliant (NFPA/SEMI/UL) Without connection to Fire Control Panel Spot Detectors require ~2.5% obs./ft. concentration Not effective in Exhausted or “Open” Compartments

NFPA 12 2005 NEW Changes to NFPA 12 2005 Edition Retroactive upon AHJ Labels must meet ANSI Z535 Orange “Warning” Color “Warning” Triangle Symbol Aspiration Symbol Outside Protected Space At Manual Activation SEMI S1 Compliant

NFPA 12 2005 Lockout Valves (Not Required) Required except where personnel can’t enter space (4.3.3.6) Where CO2 can migrate to expose personnel (4.3.3.6.1) System should “Lockout” during maintenance or testing (4.3.3.6.3) “Lockout” Valve should be supervised Pressure Switch installed between Supply and Lockout Valves (4.5.4.11) Disable/By-Pass Switch (Required) Electrically operated systems should have service disconnect switch (4.3.3.7) Switch should be supervised (keyed)

Bulk Systems High Pressure or Low Pressure CO2 or FWS Benefits Large Supply of Agent to Protect Multiple Systems Main & Reserve Controlled Release of CO2 Benefits Floor Space Controls Tool Uptime Life Cycle Cost Negative Higher Install Cost Major Retrofit or New Fab Project

Bulk CO2 Compliance What is wrong with this design? 40 Tools on 1 HP Manifold System 1st - Largest FACP has maximum approval of 10 independent releasing hazards Solution – Minimum of 4 releasing panels

Bulk CO2 Design FACP Approval/Listings Limited to maximum of 10 independent releasing hazards 10 Tools

Bulk CO2 Compliance Anything else? 2nd - Location of Selector Valves AT EACH TOOL? Where does CO2 go? What about phase change in pipe? How do you Calc this? CAN’T!!

Bulk CO2 Design Selector Valves Must Be @ CO2 Supply Location Minimize CO2 Loss Per Listed Hydraulic Calculation Programs

HP Manifold Configuration LCD80 Wet Deck Annunciator Horn / Strobe Light Deck Manual Pull Keyed By-Pass Switch STI CO2 Line Nozzle(s) Sensor(s) Owner: Tech Serv Fab Level Selector Valve(s) & Flow Switch(s) Slab Owner: Fac Ops SLC Loop (Device Signals) Other Decks (10 max) CO2 Cylinder Bank RS485 Comms (Signal Data) Copper (Comms) Fiber Network (Comms) Valve Control Signal Manifold Control Panel Manifold Network Panel(s) Building Panel Interface Sub Fab Level

HATSUTA CABINEX-EWT FM Approved for Semiconductor Tools September 2004 Manufactured in Osaka, Japan Specifically designed for Semiconductor Total Flood & Local Application Excellent OEM product! Packaged cabinet for cylinder(s) & panel Worldwide Compliance! CABINEX-EN = NOT COMPLIANT IN USA

Cabinex-EWT Control Cabinet Up to 2, 100lb. Cylinders Integrated Panel 50 & 100-lbs. 1.8’ x 1.7’ x 7.0’ Cabinet Integrated Panel Up to 32 “Addressable” Inputs Cross-Zoning Capable Single Release Zone Solenoid & Gas Cartridge Actuators Popular with OEMs TEL, DNS, AMAT

Fine Water Spray (FWS) Securiplex Extinguishing Agent Low Pressure Wet Bench Application FM Approved Extinguishing Agent Fab DI Water (DIW) Fab Nitrogen (N2) Mixed at nozzle Dual piping Unlimited Supply Low Pressure PVDF or PFA Nozzles & Tubing

Submittal Documentation Stamped Drawings of CO2 Mechanical & Electrical Systems including Isometric FPE or NICET Level 3 CO2 Hazard Design Demand Calculations CO2 Hydraulic Flow Calculations Power Supply & Battery Backup Calculations Bill of Material List Equipment Data Sheet Submittals Sequence of Events Acceptance Test & Certification Form

CO2 Solid Modeling

Questions Any Questions? Matt Wyman Semiconductor Division Manager KOETTER FIRE PROTECTION Dallas, Texas 972.333.4965 – cell mwyman@koetterfire.com

Discharge Tests Demonstration Various Discharges VIDEO Mock of Open Wet Bench 8’W x 1.6’W x 2.5’H Recessed baths Exhaust Ventilation Various Discharges Various Configurations VIDEO

Test Results CO2 Concentrations Analysis See Table All Extinguish Fire Source IPA/PP Pan Fire Measure CO2 concentrations at various points Vent type nozzles had significant splashing results Not recommended over open baths Front Left Front Middle Rear Lower Middle Test #1 36% 48% 51% Test #2 28% 52% 39% Test #3 29% 44% 24%