Institute of Physics & Technology

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Institute of Physics & Technology Russian Academy of Sciences Director academicion Kamil Valiev

IPT RAS Lab of Microstructuring & Submicron Devices Lab of MEMS Lab of Micro- and Nanostructures Characterization Lab of Technological Processes Simulation Lab of Quantum Computers Physics

IPT RAS: Main fields of Activities Fundamental Quantum computers physics Low temperature plasma physics Semiconductors devices physics Nanomagnetics physics X-ray diffraction theory Applied HDP based processing HDP and ion sources Equipments for deposition, etching, and ion implantation Plasma diagnostics and end-point detection Metals and silicides Modelling of technological processes and devices