Reading: Pierret 18.2-18.3; Hu 5.7-5.9 Lecture 18 OUTLINE The MOS Capacitor (cont’d) Effect of oxide charges VT adjustment Poly-Si gate depletion effect Reading: Pierret 18.2-18.3; Hu 5.7-5.9

Oxide Charges In real MOS devices, there is always some charge within the oxide and at the Si/oxide interface. Within the oxide: Trapped charge Qot High-energy electrons and/or holes injected into oxide Mobile charge QM Alkali-metal ions, which have sufficient mobility to drift in oxide under an applied electric field At the interface: Fixed charge QF Excess Si (?) Trapped charge QIT Dangling bonds R. F. Pierret, Semiconductor Device Fundamentals, Fig. 18.4 EE130/230A Fall 2013 Lecture 18, Slide 2

Effect of Oxide Charges In general, charges in the oxide cause a shift in the gate voltage required to reach threshold condition: (x is defined to be 0 at metal-oxide interface) For example, positive charge in the oxide near to the p-type Si substrate (for an NMOS device) helps to deplete the surface of holes, so that the gate voltage that must be applied to invert the surface (to become n- type) is reduced, i.e. VT is reduced  DVT is negative. In addition, oxide charge can affect the field-effect mobility of mobile carriers (in a MOSFET) due to Coulombic scattering. EE130/230A Fall 2013 Lecture 18, Slide 3

Fixed Oxide Charge, QF M O S qQF / Cox 3.1 eV Ec= EFM |qVFB | Ev Ec EFS Ev 4.8 eV EE130/230A Fall 2013 Lecture 18, Slide 4

Parameter Extraction from C-V From a single C-V measurement, we can extract much information about the MOS device: Suppose we know the gate material is heavily doped n-type poly-Si (FM= 4.1 eV), and the gate dielectric is SiO2 (er = 3.9): From Cmax = Cox we can determine oxide thickness xo From Cmin and Cox we can determine substrate doping (by iteration) From substrate doping and Cox we can find flat-band capacitance CFB From the C-V curve, we can find From FM, FS, Cox, and VFB we can determine Qf EE130/230A Fall 2013 Lecture 18, Slide 5

Determination of FM and QF Measure C-V characteristics of capacitors with different oxide thicknesses. Plot VFB as a function of xo: C. C. Hu, Modern Semiconductor Devices for Integrated Circuits, Figure 5-21 EE130/230A Fall 2013 Lecture 18, Slide 6

Mobile Oxide Charge, QM Bias-Temperature Stress (BTS) Measurement Na+ located at lower SiO2 interface  reduces VFB DVFB Na+ located at upper SiO2 interface  no effect on VFB Positive oxide charge shifts the flatband voltage in the negative direction: EE130/230A Fall 2013 Lecture 19, Slide 7 R. F. Pierret, Semiconductor Device Fundamentals, p. 657

Interface Trap Charge, QIT “Donor-like” traps are charge-neutral when filled, positively charged when empty Positive oxide charge causes C-V curve to shift toward left (more shift as VG decreases) (a) (c) (b) (a) (b) R. F. Pierret, Semiconductor Device Fundamentals, Fig. 18.10 Traps cause “sloppy” C-V and also greatly degrade mobility in channel (c) EE130/230A Fall 2013 Lecture 18, Slide 8 R. F. Pierret, Semiconductor Device Fundamentals, Fig. 18.12

VT Adjustment In modern IC fabrication processes, the threshold voltages of MOS transistors are adjusted by adding dopants to the Si by a process called “ion implantation”: A relatively small dose NI (units: ions/cm2) of dopant atoms is implanted into the near-surface region of the semiconductor When the MOS device is biased in depletion or inversion, the implanted dopants add to (or substract from) the depletion charge near the oxide-semiconductor interface. EE130/230A Fall 2013 Lecture 18, Slide 9

Poly-Si Gate Technology A heavily doped film of polycrystalline silicon (poly-Si) is often employed as the gate-electrode material in MOS devices. There are practical limits to the electrically active dopant concentration (usually less than 1x1020 cm-3) The gate must be considered as a semiconductor, rather than a metal NMOS PMOS p-type Si n+ poly-Si n-type Si p+ poly-Si EE130/230A Fall 2013 Lecture 18, Slide 10

MOS Band Diagram w/ Gate Depletion Si biased to inversion: WT VG is effectively reduced: Ec EFS qfS Ev qVpoly qVG Ec Ev Wpoly How can gate depletion be minimized? n+ poly-Si gate p-type Si EE130/230A Fall 2013 Lecture 18, Slide 11

Gate Depletion Effect Gauss’s Law dictates that Wpoly = eoxEox / qNpoly xo is effectively increased: n+ poly-Si Cpoly + + + + + + + + Cox - - - - - N+ - - - - p-type Si EE130/230A Fall 2013 Lecture 18, Slide 12

Example: Gate Depletion Effect The voltage across a 2 nm oxide is Vox = 1 V. The active dopant concentration within the n+ poly-Si gate is Npoly = 8 1019 cm-3 and the Si substrate doping concentration NA is 1017 cm-3. Find (a) Wpoly , (b) Vpoly , and (c) VT . Solution: (a) Wpoly = eoxEox / qNpoly = eoxVox / xoqNpoly EE130/230A Fall 2013 Lecture 18, Slide 13

(b) (c) EE130/230A Fall 2013 Lecture 18, Slide 14

Inversion-Layer Thickness, Tinv The average inversion-layer location below the Si/SiO2 interface is called the inversion-layer thickness, Tinv . C. C. Hu, Modern Semiconductor Devices for Integrated Circuits, Figure 5-24 EE130/230A Fall 2013 Lecture 18, Slide 15

Effective Oxide Thickness, Toxe (VG + VT)/Toxe can be shown to be the average electric field in the inversion layer. Tinv of holes is larger than that of electrons due to difference in effective masses. EE130/230A Fall 2013 Lecture 18, Slide 16 C. C. Hu, Modern Semiconductor Devices for Integrated Circuits, Figure 5-25

Effective Oxide Capacitance, Coxe EE130/230A Fall 2013 Lecture 18, Slide 17 C. C. Hu, Modern Semiconductor Devices for Integrated Circuits, Figure 5-26