1. DRIE equipment purchase Final steps Mikko Kataja, Ville Liimatainen, Mohammadrez Soleymaniha, Sasha Hoshian

2. Ground workSpecifications Call for tenders Review offers Write contract Receive the device Everyday use Timeline for DRIE equipment purchase 2-3 months6-8 weeks1 week1 weeks 3 months or more Years1-2 weeks February March April May June 2013

3. Key people in the final steps Person in charge of the purchase (PiC) – could be head of dept, or one of the professors Main users – PhD students or Postdoc researchers Micronova director and secretary – Veli-Matti Airaksinen Head of department

4. Evaluation of the offers Evaluation criteria has been decided before the call for tenders – Decision has to be made according to the published criteria or the rejected suppliers can (and probably will) file a complaint – Price is most likely the most important criterion as long as the technical requirements are met If no supplier is able to meet the requirements, we can contact the suppliers directly to make a direct purchase. Evaluation of the offers should be done by the person(s) in charge and approved by legal department.

5. Contract Contact the Head of Procurement at Aalto Finance services (Antti Laakso) – Should already have been in contact during the tendering – Ask for a contract draft for the DRIE purchase Contact the lawyer at respective school (e.g. Anna Huuskonen for ELEC) – Will check the contract for any legal issues Contact the person who is authorized to sign the contract – If the contract is the result of a tendering process, the Dean can sign (e.g. Tuija Pulkkinen for ELEC) – If it’s a direct purchase, the Dean can still sign, but further approvals by the President of Aalto University (Tuula Teeri) and the Chief Financial Officer (Marianna Bom) are needed Contact the company representative for their signature

6. Receiving the machine Delivery Where the machine should be delivered? ̶Micronova building in Aalto preferably at the installation site Who is in charge from Aalto side to sign the delivery factor? ̶Secretary of Micronova or head of the department Sami Franssila Installation Installation should be done by engineers from the company but before that the site should be prepared ̶Piping and gasing system ( Micronova engineers will be responsible) ̶Cleaning up the location ̶Exhaust ̶Electrical connections (Veli-Matti or Micronova staff will contact an electrician) Who should be present at the installation date? ̶Director, Aalto Nanofab, Veli-Matti Airaksinen ̶Head of department, Sami Franssila ̶Main users of the machine (PhD students or engineers from Aalto)

7. Acceptance tests Safety – Leak test (Company engineers, Micronova staff) Technical requirements – Etch rate – Aspect ratio Test samples are needed to verify (fabricated by the main users that are also trained to use the machine) For both etch rate and aspect ratio a TEM can be used. The PiC finds someone who can prepare the samples and do the TEM measurements. – Calibration Other equipment – Pumps, cooling system, software – Will be tested during test sample fabrication

8. Everyday use Instructions and safety signs – Identify right places to put warning banners and instructions location: main user – Who is responsible for making instruction(English, Finnish): main user Training of new users – New users: Master degree students or Micronova’s staff – Should be performed by Main users( PhD students) Upkeep – Every user has to clean up after their use – Cleaning, changing gas and waste: To be performed by main users – Main users check the equipment according to the manufacturers specifications – Additional maintenance by the manufacturer (PiC) Booking and logging systems – Booking: LIMS – Micronova staff will add new equipment to LIMS, main users will take care of adding new users – Logging: PESO Troubleshooting – First step: Main users – Second step: company troubleshooting service( e.g. remote troubleshooting)