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Process Flow : Overhead and Cross Section Views ( Diagrams courtesy of Mr. Bryant Colwill ) Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus.

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Presentation on theme: "Process Flow : Overhead and Cross Section Views ( Diagrams courtesy of Mr. Bryant Colwill ) Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus."— Presentation transcript:

1 Process Flow : Overhead and Cross Section Views ( Diagrams courtesy of Mr. Bryant Colwill ) Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum TT TT T TT TT T T T T T T T T TT T TT TT T TT TT T T T T T T T T TT T Step 1Step 2Step 3Step 4Step 5Step 6 Step 7Step 8Step 9Step 10 Step 11 Step 12

2 Step 1: Cleaning Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist Starting Si Wafer & Sulfuric Acid / Peroxide Clean Cross-section View of Wafer Insert text here Overhead View of Wafer

3 Step 2: Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist Plasma Enhanced Chemical Vapor Deposition Of Silicon Dioxide Overhead View of Wafer Cross-section View of Wafer Insert text here. Probably include picture and name of machine here

4 Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist Lithography Patterning Overhead View of Wafer Cross-section View of Wafer Step 3: Lithography Patterning

5 Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist Lithography Patterning Overhead View of Wafer Cross-section View of Wafer Step 3: Lithography Patterning (cont.) name

6 Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist Lithography Patterning Overhead View of Wafer Cross-section View of Wafer Step 3: Lithography Patterning (cont.) name

7 Step 4: Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist INSERT Overhead View of Wafer Cross-section View of Wafer

8 Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum insert Overhead View of Wafer Cross-section View of Wafer Step 5:

9 Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum Overhead View of Wafer Cross-section View of Wafer insert Step 6: name

10 Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum insert Overhead View of Wafer Cross-section View of Wafer Step 7:

11 Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum insert Cross-section View of Wafer Step 8: Overhead View of Wafer name

12 TT TT T TT TT T Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum name Step 9: Cross-section View of Wafer Overhead View of Wafer

13 TT TT T TT TT T Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum Aluminum Removal by Acid Etch Overhead View of Wafer Cross-section View of Wafer Step 10:

14 Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum Overhead View of Wafer Cross-section View of Wafer T T T T T T T TT T name Step 11:

15 T T T T T T T TT T Grey=Si, Blue=Silicon Dioxide, Red=Photoresist, Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum name Cross-section View of Wafer Step 12: Overhead View of Wafer

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