1. Introduction of Cryogenic Division
１．Company　profile
２．History of Cryogenic Division
３．Contents of Business
４．Major Customer
５．Sales Office & Sales Area
６．Features　of　Cryopump
７．Sales　results　
SUZUKI　SHOKAN　CO.,LTD

2. １．Company　profile
SUZUKI　SHOKAN　CO.,LTD

3. １．History of Cryogenic Division
＊1971 Entered Cryogenic Business
Technology Institute of former JR(Japan Rail Road) started basic experiment of liner motor train.
Started sales and maintenance business of Helium Liquefier.
Installation of Helium Liquefier and Helium Storage Tank for experimental liner motor train in Miyazaki.
→ Currently supply the same system to experimental liner
motor train in Yamanashi.
SUZUKI　SHOKAN　CO.,LTD

4. １． History of Cryogenic Division
＊1979 Entered Cryopump market
＊1983 Established joint venture company JECC with
CVI in U.S.
＊1986 Maintenance facility is completed
＊1988 Started production of Torr-kun
＊1993 Entering to the business related to the superconductivity
＊1997 Established joint venture company JECC TORISHA with Nippon Sanso
＊1999 Change the Cryopump name from Torr-kun to SPACETORR
SUZUKI　SHOKAN　CO.,LTD

5. ２．Contents of Business １．Sales and Maintenance of Cryopump
２．Production and Sales of Helium Refrigerator
appliances
OZONE JET SUPPLIER
CRYOSTAT with GM REFRIGERATOR
３．Sales of L-He container
Distributor of L-He Container（CRYOFAB INC. in U.S.)
４．Sales & Production of Superconductivity magnet
５．Sales of the products of JECC TORISHA
VACUUM INSULATION PIPING
LN2 CONTAINER
６．Sales of Products for R & D field
BAREBR-NICHOLS INC.
AMERICAN SUPER CONDUCTER
SUZUKI　SHOKAN　CO.,LTD

6. ３．Major Customers ＊Semiconductor Manufacturer １）Transistor ２）Memory
　　　３）System LSI
　　　４）Logic
＊Liquid Crystal
＊Electronic Component（Magnetic head, DVD, CD, MD　etc.）
＊Optics
＊Device Manufcturer for the above referenced process
Ion Implanter,Sputtering Machine,Evaporation Machine,etc.
SUZUKI　SHOKAN　CO.,LTD

7. ４．Sales Office & Sales Area
●Office Location
Sendai, Kawagoe, Osaka
●Domestic Distributor
Asahi Seiki Co., Ltd.
●Overseas Distributor
　　 MASS-VAC.,Inc.(USA)
Feedback Technology Corp. (Taiwan)
Seongwoo Instruments, Inc. (Korea)
AES　Technology　International (Shanghai)
High-Tec　Vacuum　Service (Malaysia､Singapole)
SUZUKI　SHOKAN　CO.,LTD

8. Features of Cryopump
SUZUKI　SHOKAN　CO.,LTD

9. What’s the advantages of Cryopump compared with diffusion pump?
●Water pumping speed improves drastically.
●A vacuum chamber inside is hardly contaminated.
●The counter flow of the oil never occurs.
● L-N2 is not required for the operation.
● The vacuum cold trap chiller, such as a Polycold is not required.
SUZUKI　SHOKAN　CO.,LTD

10. Features of Cryopump １．Standarization of Low Vibration Performance
● Vibration effect to the carriage part and L/L
were decreased.
→ Dropping or deviation of the wafer can be
prevented.
●16,000Hr recommendation maintenance period
→ Runing cost is much lower in comarison with the
the other maker’s cryopump.
SUZUKI　SHOKAN　CO.,LTD

11. Features of Cryopump １． Low Vibration Performance C T I Suzuki Shokan
SUZUKI　SHOKAN　CO.,LTD

12. Low Vibration Performance
２. Panel for fast rate exhaust and enhanced capacity for hydrogen gas
● 3 times of exhaust gas capacity (In-house comparison)
→ Long interval period and stabilized exhaust　performance
SUZUKI　SHOKAN　CO.,LTD

13. CRYO　ＣＯＮＴＲＯＬＬＥＲ
　SELCON-S
SUZUKI　SHOKAN　CO.,LTD

14. Controller for the purpose to shorten the regeneration time.
What’s ＳＥＬＣＯＮ－Ｓ？
Controller for the purpose to shorten the regeneration time.
●Cooldown time can be shortened by applying of the inverter.
●Time for temperature rising can be shortened by built-in heater.
SUZUKI　SHOKAN　CO.,LTD

15. SELCON-S Installation record(Multiple drive C305）
　Regeneration　time　1/3
SELCON-S　Installation　record(Multiple　drive　C305）
SUZUKI　SHOKAN　CO.,LTD

16. Comparison for regeneration time for A200(8inch)
SUZUKI　SHOKAN　CO.,LTD

17. What’s the basic concept of SELCON-S？
●Curtailment of regeneration time　
●Easy operation
●Down sizing & Light weight
●Evolution of regeneration box
SUZUKI　SHOKAN　CO.,LTD

18. Shorten of the regeneration time
SUZUKI　SHOKAN　CO.,LTD

19. Easy Operation ●Operation Method ●Maintenance
Compressor can be easily operated by the turning of the power switch.
●Maintenance
It is easier to maintain our cryopump as compare with the cryopump equipped by controller.　Our cryopump does not require the detaching of the controller, when maintenance.
Easy maintenance, Less failure damage.
SUZUKI　SHOKAN　CO.,LTD

20. Saving　down　time　benefits　you　90　hours　of　process　operation　time　in　one　year
SUZUKI　SHOKAN　CO.,LTD

21. Specification ●Weight: ７ｋｇ ●Power Supply: AC200V Single Phase 50/60Hz
　 below 5A
●Applicable model
　〇Cryopump
　　　　　　Low vibration cryopump with built in heater
　〇Compressor Unit
　　　　　　All the models
SUZUKI　SHOKAN　CO.,LTD

22. Features of Compressor Unit
SUZUKI　SHOKAN　CO.,LTD

23. Features of Compressor Unit
１．Designed only for the Helium
refrigerant, and consistent production
●Ideal heat exchange in compression
→ Failure or damage of the discharge valve is improved
drastically.
A unique cooling system is adopted. This system
removing the heat effectively caused by Helium
compression.
●SANYO ELECTRIC’s superior refrigeration　technology is applied.
→ Cooling water is not required for heat exchange.
(Other maker’s compressor requires cooling water.)
SUZUKI　SHOKAN　CO.,LTD

24. Features of Compressor Unit
2. The world maximum class of Helium
discharging capacity
●The world maximum class of displacement as
a rotary compressor.
→ Flow rate capacity of Helium is 20%～30% larger in
compare to other maker’s compressor.
SUZUKI　SHOKAN　CO.,LTD

25. Features of Compressor Unit
2. The world maximum class of Helium
discharging capacity.
SUZUKI　SHOKAN　CO.,LTD

26. Features of Compressor Unit
3. Stable products quality by mass production
of factory.
● An annual production of the factory: 3.5million sets
→ Other maker has to be supplied compressor unit
from air-conditioning maker.
SUZUKI　SHOKAN　CO.,LTD

27. 　C100G　Compressor　unit
SUZUKI　SHOKAN　CO.,LTD

28. Specification for C100G Not to change Adsorber！
　　Running　cost　is　very　low！
Maintenance　free！
C300G　have　started　to　sell　from　this　Sep.
C200G　will　start　to　sell　in　near　future.
SUZUKI　SHOKAN　CO.,LTD

29. Countermeasures of Energy Saving
SUZUKI　SHOKAN　CO.,LTD

30. Countermeasures of Energy Saving
Aiming at accomplishment of 50% energy saving by March 2004 in compare with former model.
　　●Exhaust performance of Ar and H2 does not fall.
　　●Regeneration time is shortened by built in heater.
　　●Further evolving of multiple drive
SUZUKI　SHOKAN　CO.,LTD

31. Countermeasures of Energy Saving
Illustration of the multiple operation which the cryopump system of the new development was used for .
SUZUKI　SHOKAN　CO.,LTD

32. Sales Results Standard cryopump of equipment maker
　　Ion　Implantor：Sumitomo　Eaton　Nova（Semiconductor）
　　　　　　　　　　　Mitsui　Engineering　Ship(Poly-Si　TFT)
　　Sputtering：Tokki（OELD）
Optional　cryopump　of　equipment　maker
　　Ion　Implantor：Nissin　Ion(Semiconductor）
　　　　　Varian　Semiconductor　Eqipment（only　E　series）
Others
　　Ion　Implantor：AMAT,ULVAC(Semiconductor）
　　Sputtering：Hitachi,Sincron,Shinko　Seiki,Shibaura（TMR）
SUZUKI　SHOKAN　CO.,LTD

33. Sales　Amount
SUZUKI　SHOKAN　CO.,LTD