Presentation on theme: "SUZUKI SHOKAN CO.,LTD Introduction of Cryogenic Division １． Company profile ２． History of Cryogenic Division ３． Contents of Business ４． Major Customer."— Presentation transcript:
SUZUKI SHOKAN CO.,LTD Introduction of Cryogenic Division １． Company profile ２． History of Cryogenic Division ３． Contents of Business ４． Major Customer ５． Sales Office & Sales Area ６． Features of Cryopump ７． Sales results １． Company profile ２． History of Cryogenic Division ３． Contents of Business ４． Major Customer ５． Sales Office & Sales Area ６． Features of Cryopump ７． Sales results
SUZUKI SHOKAN CO.,LTD １． Company profile
SUZUKI SHOKAN CO.,LTD １． History of Cryogenic Division ＊ 1971 Entered Cryogenic Business Technology Institute of former JR(Japan Rail Road) started basic experiment of liner motor train. Started sales and maintenance business of Helium Liquefier. Installation of Helium Liquefier and Helium Storage Tank for experimental liner motor train in Miyazaki. → Currently supply the same system to experimental liner motor train in Yamanashi.
SUZUKI SHOKAN CO.,LTD １． History of Cryogenic Division ＊ 1979 Entered Cryopump market ＊ 1983 Established joint venture company JECC with CVI in U.S. ＊ 1986 Maintenance facility is completed ＊ 1988 Started production of Torr-kun ＊ 1993 Entering to the business related to the superconductivity ＊ 1997 Established joint venture company JECC TORISHA with Nippon Sanso ＊ 1999 Change the Cryopump name from Torr-kun to SPACETORR
SUZUKI SHOKAN CO.,LTD ２． Contents of Business １． Sales and Maintenance of Cryopump ２． Production and Sales of Helium Refrigerator appliances OZONE JET SUPPLIER CRYOSTAT with GM REFRIGERATOR ３． Sales of L-He container Distributor of L-He Container （ CRYOFAB INC. in U.S.) ４． Sales & Production of Superconductivity magnet ５． Sales of the products of JECC TORISHA VACUUM INSULATION PIPING LN2 CONTAINER ６． Sales of Products for R & D field BAREBR-NICHOLS INC. AMERICAN SUPER CONDUCTER
SUZUKI SHOKAN CO.,LTD ３． Major Customers ＊ Semiconductor Manufacturer １） Transistor ２） Memory ３） System LSI ４） Logic ＊ Liquid Crystal ＊ Electronic Component （ Magnetic head, DVD, CD, MD etc. ） ＊ Optics ＊ Device Manufcturer for the above referenced process Ion Implanter,Sputtering Machine,Evaporation Machine,etc.
SUZUKI SHOKAN CO.,LTD What’s the advantages of Cryopump compared with diffusion pump? ● Water pumping speed improves drastically. ● A vacuum chamber inside is hardly contaminated. ● The counter flow of the oil never occurs. ● L-N2 is not required for the operation. ● The vacuum cold trap chiller, such as a Polycold is not required.
SUZUKI SHOKAN CO.,LTD Features of Cryopump ● Vibration effect to the carriage part and L/L were decreased. → Dropping or deviation of the wafer can be prevented. ● 16,000Hr recommendation maintenance period → Runing cost is much lower in comarison with the the other maker’s cryopump. １． Standarization of Low Vibration Performance
SUZUKI SHOKAN CO.,LTD Features of Cryopump １． Low Vibration Performance C T I Suzuki Shokan
SUZUKI SHOKAN CO.,LTD Low Vibration Performance ２. Panel for fast rate exhaust and enhanced capacity for hydrogen gas ● 3 times of exhaust gas capacity (In-house comparison) → Long interval period and stabilized exhaust performance
SUZUKI SHOKAN CO.,LTD What’s ＳＥＬＣＯＮ－ Ｓ？ Controller for the purpose to shorten the regeneration time. ● Cooldown time can be shortened by applying of the inverter. ● Time for temperature rising can be shortened by built-in heater.
SUZUKI SHOKAN CO.,LTD Comparison for regeneration time for A200(8inch)
SUZUKI SHOKAN CO.,LTD What’s the basic concept of SELCON-S ？ ● Curtailment of regeneration time ● Easy operation ● Down sizing & Light weight ● Evolution of regeneration box
SUZUKI SHOKAN CO.,LTD Shorten of the regeneration time
SUZUKI SHOKAN CO.,LTD Easy Operation ● Operation Method Compressor can be easily operated by the turning of the power switch. ● Maintenance It is easier to maintain our cryopump as compare with the cryopump equipped by controller. Our cryopump does not require the detaching of the controller, when maintenance. Easy maintenance, Less failure damage.
SUZUKI SHOKAN CO.,LTD Saving down time benefits you 90 hours of process operation time in one year
SUZUKI SHOKAN CO.,LTD Specification ● Weight: ７ｋｇ ● Power Supply: AC200V Single Phase 50/60Hz below 5A ● Applicable model 〇 Cryopump Low vibration cryopump with built in heater 〇 Compressor Unit All the models
SUZUKI SHOKAN CO.,LTD Features of Compressor Unit
SUZUKI SHOKAN CO.,LTD Features of Compressor Unit １． Designed only for the Helium refrigerant, and consistent production ● Ideal heat exchange in compression → Failure or damage of the discharge valve is improved drastically. A unique cooling system is adopted. This system removing the heat effectively caused by Helium compression. ● SANYO ELECTRIC ’ s superior refrigeration technology is applied. → Cooling water is not required for heat exchange. (Other maker ’ s compressor requires cooling water.)
SUZUKI SHOKAN CO.,LTD Features of Compressor Unit 2. The world maximum class of Helium discharging capacity ●The world maximum class of displacement as a rotary compressor. → Flow rate capacity of Helium is 20% ～ 30% larger in compare to other maker ’ s compressor.
SUZUKI SHOKAN CO.,LTD Features of Compressor Unit 2. The world maximum class of Helium discharging capacity.
SUZUKI SHOKAN CO.,LTD Features of Compressor Unit 3. Stable products quality by mass production of factory. ● An annual production of the factory: 3.5million sets → Other maker has to be supplied compressor unit from air-conditioning maker.
SUZUKI SHOKAN CO.,LTD C100G Compressor unit
SUZUKI SHOKAN CO.,LTD Specification for C100G Not to change Adsorber ！ Running cost is very low ！ Maintenance free ！ C300G have started to sell from this Sep. C200G will start to sell in near future.
SUZUKI SHOKAN CO.,LTD Countermeasures of Energy Saving
SUZUKI SHOKAN CO.,LTD Countermeasures of Energy Saving Aiming at accomplishment of 50% energy saving by March 2004 in compare with former model. ●Exhaust performance of Ar and H2 does not fall. ●Regeneration time is shortened by built in heater. ●Further evolving of multiple drive
SUZUKI SHOKAN CO.,LTD Countermeasures of Energy Saving Illustration of the multiple operation which the cryopump system of the new development was used for.
SUZUKI SHOKAN CO.,LTD Sales Results Standard cryopump of equipment maker Ion Implantor ： Sumitomo Eaton Nova （ Semiconductor ） Mitsui Engineering Ship(Poly- Si TFT) Sputtering ： Tokki （ OELD ） Optional cryopump of equipment maker Ion Implantor ： Nissin Ion(Semiconductor ） Varian Semiconductor Eqipment （ only E series ） Others Ion Implantor ： AMAT,ULVAC(Semiconductor ） Sputtering ： Hitachi,Sincron,Shinko Seiki,Shibaura （ TMR ）