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National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India TUMS Murthy Jan 29, 2013 Clean room administrative committee.

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Presentation on theme: "National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India TUMS Murthy Jan 29, 2013 Clean room administrative committee."— Presentation transcript:

1 National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India TUMS Murthy Jan 29, 2013 Clean room administrative committee Meeting TUMS Murthy1Cleanroom Admin Commitee Meeting

2 TUMS Murthy Cleanroom Admin Commitee Meeting Jan 29, Action Points Sl.NoItemOwnerStatus 1a. To invite Chandrasekhar for the fire drill at CeNSE and seek his help for demonstrating fire fighting equipments b. To check with the original manufacturer of the sensors for the exact cost. c. To provide a statistics on the annual downtime for cleanroom Dr TUMS Murthya.Done b. 2All the alarms installed to be checked on Friday 11 th Jan 2013 with the help of third party Mr.Adinarayana MurthyDone 3To solve the issue for Tecport sputter 2Dr.Vijayaraghavan/Prof Anilkumar 4a. To include Anelva RF sputtering usage statistics also. b. To include a slide about the industry users using the cleanroom c. To provide a report on the Oxford workshop held at CeNSE Dr.Vijayaraghavana.Done 5a. To include EVG bonder usage statistics also. b. To provide a report on the Lithography workshop held at CeNSE c. To check if litho wet benches can be delivered by next week. d. To update the trend charts with the latest data. Dr.Gopal Hegdea. Done b. Done c. To be supplied next week. Invoice received. d. Being Done

3 TUMS Murthy Cleanroom Admin Commitee Meeting Jan 29, Action Points Sl.NoItemOwnerStatus 6To make a database of the industry users using our facilities at CeNSE Dr.Sanjiv ShrivastavaDone along with Dr.Girish Kunte 7To correct the number of hits on twiki page SreelekshmyOngoing. Alternate solution: Another plugin for Usage statistics available. In the process of installing it. 8a. To add a poster with the list of names of industries that has been using the facility b. To provide an update on the income from industry users and to give a projection on the expected usage for next year. Dr.Girish Kuntea. b. Done

4 Issue of training new users raised by Profs. Ambarish and Manoj Varma – Training slots are being reserved for equipment having high demand – New users encouraged to observe operation of equipment outside their slots – Independent users not allowed to book more than a specified number of slots during normal shift Manual control, feature not automated Operations TUMS MurthyJan 29, Cleanroom Admin Commitee Meeting

5 Clean room AMC implementation has started – PCW line in the clean room showing signs of rusting at welded joints on the outside. Nano Clean ( Madhu & Co) asked to come up with solutions – Proposal for passivation and biocidal treatment of PCW line has been requested from NALCO, a well know company of water treatment and distribution. Operations TUMS MurthyJan 29, Cleanroom Admin Commitee Meeting

6 Fire Drill TUMS MurthyJan 29, Cleanroom Admin Commitee Meeting Fire safety and Evacuation exercise was conducted on 24 th Jan. Lessons learnt – PA systems of Cleanroom and Nano building need linking – Alarm as well as announcements were not audible in many places – Safety sweep of the building involved more than 10 people. Need strategy to tackle emergencies at night External agencies’ involvement to be worked out Fire fighting ring is yet to be handed over to institute (CCMD ??)

7 Other issues TUMS MurthyJan 29, Cleanroom Admin Commitee Meeting Previous proposal for Medical Insurance to NNfC, MNCF and other project employees not approved. What next ??

8 Current status – Liquid N2 consumption = 1129 litres/day. Equivalent Gas 800 m3 /day – Used as Liquid N2 = 20 litres/day ( ~ 14 m3/day) – Estimated usage by equipment = 700 m3/day ( To be validated) – Unaccounted 100 m3/day, equal to 140 litres/day Nitrogen Consumption TUMS MurthyJan 29, Cleanroom Admin Commitee Meeting

9 Total consumption 800 m3/day Major users are – Dry etch 60 m3 – Diffusion 80 m3 – Litho 20 m3 – Thin films 45 m3 – N2 Guns 25 m3 – Gas cabinets 400 m3 – Others 70 m3 Nitrogen consumption TUMS MurthyJan 29, Cleanroom Admin Commitee Meeting

10 Gas Cabinet consumption has to be reduced or eliminated – Reduced gas cabinet flow to 30 liters/min from 40 – Saving 100 m3/day = 140 litres/day (verified) Change alarm setting to reduce the flow further as a first step Replace Nitrogen with CDA as a next step. Nitrogen consumption TUMS MurthyJan 29, Cleanroom Admin Commitee Meeting


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