1. National Nanofabrication Centre Centre for Nano Science and Engineering IISc, Bangalore, India
Clean room administrative committee Meeting
TUMS Murthy
Jan 29 , 2013
TUMS Murthy
Cleanroom Admin Commitee Meeting

2. Cleanroom Admin Commitee Meeting
Action Points
Sl.No
Item
Owner
Status 1
a. To invite Chandrasekhar for the fire drill at CeNSE and seek his help for demonstrating fire fighting equipments
b. To check with the original manufacturer of the sensors for the exact cost.
c. To provide a statistics on the annual downtime for cleanroom
Dr TUMS Murthy
Done 2
All the alarms installed to be checked on Friday 11th Jan 2013 with the help of third party
Mr.Adinarayana Murthy 3
To solve the issue for Tecport sputter 2
Dr.Vijayaraghavan/Prof Anilkumar 4
a. To include Anelva RF sputtering usage statistics also.
b. To include a slide about the industry users using the cleanroom
c. To provide a report on the Oxford workshop held at CeNSE
Dr.Vijayaraghavan 5
a. To include EVG bonder usage statistics also.
b. To provide a report on the Lithography workshop held at CeNSE
c. To check if litho wet benches can be delivered by next week.
d. To update the trend charts with the latest data.
Dr.Gopal Hegde
a. Done
b. Done
c. To be supplied next week. Invoice received.
d. Being Done
TUMS Murthy
Cleanroom Admin Commitee Meeting

3. Cleanroom Admin Commitee Meeting
Action Points
Sl.No
Item
Owner
Status 6
To make a database of the industry users using our facilities at CeNSE
Dr.Sanjiv Shrivastava
Done along with Dr.Girish Kunte 7
To correct the number of hits on twiki page
Sreelekshmy
Ongoing.
Alternate solution: Another plugin for Usage statistics available. In the process of installing it. 8
a. To add a poster with the list of names of industries that has been using the facility
b. To provide an update on the income from industry users and to give a projection on the expected usage for next year.
Dr.Girish Kunte a.
b. Done
TUMS Murthy
Cleanroom Admin Commitee Meeting

4. Cleanroom Admin Commitee Meeting
Operations
Issue of training new users raised by Profs. Ambarish and Manoj Varma
Training slots are being reserved for equipment having high demand
New users encouraged to observe operation of equipment outside their slots
Independent users not allowed to book more than a specified number of slots during normal shift
Manual control, feature not automated
TUMS Murthy
Cleanroom Admin Commitee Meeting

5. Cleanroom Admin Commitee Meeting
Operations
Clean room AMC implementation has started
PCW line in the clean room showing signs of rusting at welded joints on the outside. Nano Clean ( Madhu & Co) asked to come up with solutions
Proposal for passivation and biocidal treatment of PCW line has been requested from NALCO, a well know company of water treatment and distribution.
TUMS Murthy
Cleanroom Admin Commitee Meeting

6. Cleanroom Admin Commitee Meeting
Fire Drill
Fire safety and Evacuation exercise was conducted on 24th Jan.
Lessons learnt
PA systems of Cleanroom and Nano building need linking
Alarm as well as announcements were not audible in many places
Safety sweep of the building involved more than 10 people. Need strategy to tackle emergencies at night
External agencies’ involvement to be worked out
Fire fighting ring is yet to be handed over to institute (CCMD ??)
TUMS Murthy
Cleanroom Admin Commitee Meeting

7. Cleanroom Admin Commitee Meeting
Other issues
Previous proposal for Medical Insurance to NNfC, MNCF and other project employees not approved. What next ??
TUMS Murthy
Cleanroom Admin Commitee Meeting

8. Cleanroom Admin Commitee Meeting
Nitrogen Consumption
Current status
Liquid N2 consumption = 1129 litres/day . Equivalent Gas 800 m3 /day
Used as Liquid N2 = 20 litres/day ( ~ 14 m3/day)
Estimated usage by equipment = 700 m3/day ( To be validated)
Unaccounted 100 m3/day, equal to 140 litres/day
TUMS Murthy
Cleanroom Admin Commitee Meeting

9. Cleanroom Admin Commitee Meeting
Nitrogen consumption
Total consumption 800 m3/day
Major users are
Dry etch m3
Diffusion m3
Litho m3
Thin films m3
N2 Guns m3
Gas cabinets m3
Others m3
TUMS Murthy
Cleanroom Admin Commitee Meeting

10. Cleanroom Admin Commitee Meeting
Nitrogen consumption
Gas Cabinet consumption has to be reduced or eliminated
Reduced gas cabinet flow to 30 liters/min from 40
Saving 100 m3/day = 140 litres/day (verified)
Change alarm setting to reduce the flow further as a first step
Replace Nitrogen with CDA as a next step.
TUMS Murthy
Cleanroom Admin Commitee Meeting