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Tadin for Process and Equipment Optimization Back Start Feb. 2008 Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd.

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Presentation on theme: "Tadin for Process and Equipment Optimization Back Start Feb. 2008 Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd."— Presentation transcript:

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2 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 1 by better utilizing their production assets helping our customers to increase profitability Please wait... Next

3 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 2 Good tools make good wafers Please wait... Next The basic concept:

4 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 3 Excursions: The big killer Dumping off your good wafers - the most painful loss. It often comes in lot of lots, …and its unpredictable! (?) Most excursions are predictable !! Tadin can predict many of them !! Please wait... NextAre Excursions really unpredictable???

5 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 4 Excursion Excursion Prevention by Real Real-time vigilance Tadins Technology: Please wait... Next Integrated Process and Machine Monitoring and Analysis System With real-time process watchdog and built-in historical analysis tools. Can perform independently or be integrated into a networked system.

6 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 5 All tools have built-in Excursion Prevention. Why add external system? Tools are generic, process is not final, future problems are unknown. Fact: Specific untreated killers are detected late in production. Tool manufacturers are slow to change. The tool computers are overloaded with control tasks – Can not handle high rate real-time data analysis. Engineers need flexibility and control over EP. Many malfunctions are control dependent – redundancy is needs. There are some good reasons: EP requires expertise: Not tool manufacturers core business. Please wait... Next

7 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 6 Data are directly collected from sensors. Data are also collected from SECS or files. The Tadin EP data source flexibility: Data can be collected from in-situ metrology tools Tadin can collect data from various sources, at various rates and levels, depending on the tool, EP requirement, specific problems, etc. Data can be collected from boards, connectors, etc. Please wait... Next....

8 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 7 Example: ProGuard on VDF* yellow areas by Tadin Tadin Status Panel Station Controller Fab LAN SecSpy Block Controller SECS to / from Host COM4 COM5 COM6 COM7 Data Backups Isolation layer TadCenter Network users More w.w.w users VDF001VDF002VDF003VDF004 VDF005VDF006VDF007VDF008VDF009VDF010 VDF011VDF012 VDF013VDF014VDF015VDF016 VDF017VDF018VDF019VDF020 PG VDF0XXVDF0YYVDF0ZZ PG Tadin LAN Please wait... Next * Kokusai Vertron-III

9 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 8 TadCenter Tool SECS to SC Machine Intrfce Tadin Interface Module 3,4Module 5,6 Tank Base Unit Analog Intrfce Analog Intrfce Module 3,4Module 5,6 Tank Base Unit Analog Module 1,2 Binary Typical Modules Loader ProGuard Master Typical Wet Station ProGuard Tadin General. Module Tadin Hub Example: Tadin EP system on Wet Stations Fab LAN Local UsersRemote Users W.W.W. Fab Host Database SecSpy RS232 Tadin internal multi-drop network More Stations Please wait... Next

10 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 9 Tadins Tool Status Annunciator Panel Please wait... Next

11 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 10 Absolute time scales Current recipe SECS status Current machine History: minimum one year, 0.1 Sec. Resolution. Binary channels Events Analog channels bar- graphs Alarm message Some Real-time data Current time Alarm status Cursors information And much more…. Typical history screen with analog and binary data display and real-time data channels can be displayed simultaneously Please wait... Next

12 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 11 Typical history screen: Novellus C1 with analog and binary data display and real-time data

13 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 12 Machine RT active Mimics, with Excursions display RT Lot & Recipe History search by Time, Lot, Recipe, Event, ….. Replay historical data Please wait... Next Real-time Graphs and Mimics, History Replay Here: MRC Eclipse

14 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 13 EP: On-line, real-time process and machine watch Here: Mattson Aspen asher (Machine: Mattson Aspen Asher) Typical examples of the EP watchdog system: Analog Pressure value Rate of pump- down MFC flow ramp Rate of End- point MFC Flow End-point stabilization Please wait... Next

15 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 14 Time alarm. In this example: Automatic real-time process timing checks EP: On-line, real-time process and machine watch (Machine Tegal etcher) Typical examples of the EP watchdog system: Timing Please wait... Next

16 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 15 In this example: Automatic real-time process sequence checks EP: On-line, real-time process and machine watch Machine: Eaton NV-10 HC Ion Implanter Excursion checking is active at all times Auto-learn and check machine sequences and combinations. Any deviation will generate an alarm. Typical examples of the EP watchdog system: Sequence Please wait... Next

17 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 16 Tool Performance Monitoring & Evaluation Please wait... Next RF ON defines actual process time6 consecutive lots defined by cursors TadiGuard measures and calculates: Intrinsic Equipment Efficiency (IEE) Wafers per Hour Number of Wafers Time for 6 consecutive lots:

18 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 17 On-the-fly Statistical Process Control and prediction In this example: Western Electric Rules Chart for Rate-of-pumpdown Machine: Mattson Aspen asher The Control limits are automatically calculated and set A distribution graph is displayed SPC parameters are displayed. Some can be modified. Standard SPC functions are immediately available Please wait... Next

19 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 18 On-the-fly statistical process control and prediction Machine: Tegal 903 Etcher Historical process- time trend Process-time prediction Violation Prediction in wafers and time. Current time Future In this example: Process time trend and prediction Please wait... Next

20 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 19 On-the-fly SPC and prediction Machine: Tegal 903 Etcher Process-time Histogram In this example: Process time distribution histogram Please wait... Next

21 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 20 Advanced Process and machine Historical Analysis Typical AMAT Centura CVD One Chambers critical parameters signature data analysis Please wait... Next Using cursors to measure, calculate and analyze process and machine Machine: AMAT Centura

22 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 21 Advanced Process and machine Historical Analysis Pressure instability in AMAT Centura causing low yield, non-uniform unstable process Please wait... Next Max Pressure 14.1 PSI at 22:18 Min Pressure 1.17 PSI at 10:58 Typical 24-hours cycle. Note pressure time- dependence.

23 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 22 Special real-time checks and alarm conditions Typical set-up of special alarm conditions. In this example, monitoring of asher end-point Machine: Mattson Aspen asher End-point signal Stability detected. Process complete. Complex alarm checking conditions setup Alarm message and event recording parameters Please wait... Next

24 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 23 Detection of RF Arcing and historical Overlay analysis Overlay: Single and multi-channel overlay analysis, tool matching, etc. Repetitive overlaid pattern. Can use analog or binary trigger point The number of patterns. Can set any time span Can be used for RT EP and for historical analysis RF arcing clearly shown Please wait... Next

25 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 24 Waterfall Overlay and Correlation Basic pattern Waterfall overlay Up to 4 additional synchronized parameters Calculated results The dispersal within each pattern (Sd) All extracted points values Please wait... Next

26 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 25 Data Correlation X-Y parameter Correlation: Any predefined parameter can be correlated With any other parameter Please wait... Next Dependence between parameters is clearly shown! The X-Y parameters calculated correlation

27 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd Parameters Dependence & Correlation X-Y-Z parameter Correlation: Any 3 parameters can be inter-correlated Please wait... Next The X-Y-Z parameters calculations results Rotate the X-Y-Z for clarity

28 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 27 Vacuum Analysis: Calculate system parameters Net Outgas flow Net Leak flow Calculated parameters: Net leak Net outgas Volume Ultimate pressure prediction Please wait... Next

29 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 28 Vacuum Analysis: Calculate system parameters Calculate net pumping speed at pumps port Calculate and draw graph of net pumping speed at pumps port Please wait... Next

30 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 29 Utilities: Calibrations and Calibration-checks Calibrate Flow, Pressure, Temp, etc. Perform routine Calibration checks. Typical calibration curve generated and used by the TadiGuard. Graphs can be imported and exported. The graphs information The calibration table The graph can be edited and modified Graph smoothing tools Please wait... Next

31 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 30 Machine: Eaton NV-10 Machine Mimics User defined machine real-time mimics Please wait... Next Tools to show wafers status and counts Vacuum systems and beam status shown

32 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 31 And many more performance enhancing features like: Full event logging Macros and Shortcuts X-Y displays History by Activity Map Password systemSoftware filter Please wait... Next And many user and tool customized systems and features…….

33 Tadin for Process and Equipment Optimization Back Start Feb Last view All rights reserved to Tadin – Tal Advanced Instruments Ltd. 32 by better utilizing their production assets by better utilizing their production assets helping our customers to increase profitability


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