1. 회사 소개서
July ’

2. 기업 소개 소 재 : ㈜ 티티에스 설 립 일 : 2000년 7월 9일 자 본 금 : 5억 인 원 : 80 명
Semiconductor
LCD
Solar Cell
소 재 : ㈜ 티티에스
설 립 일 : 2000년 7월 9일
자 본 금 : 5억
인 원 : 80 명
매 출 액 : 160억(2010년 기준)
주 고 객 :
주 생산품 및 생산능력
-Suscetor 및 Heater 제작

3. Company Profile 년도
내 용
2010년
*High-Temp( 1300℃ ) Heater (W , Q’tz) Under development
*Present Capital : 5억
2009년
*Liquid Vaporizer Development
*8.5G Solar cell Susceptor Development and Delivered manufactured goods
*ZnO Hot trap Development and Delivered manufactured goods
2008년
*TPS consulting & 高 품격 5S활동
*5G Solar cell Susceptor mass-production and Delivered manufactured goods
*4G Susceptor 국내 최초 수산법(C2H2O4) 피막적용 수출
2007년
*Sep, Rebuilt factory and transferred
*5G Solar cell Susceptor Development
*8G Susceptor mass-production and Delivered manufactured goods
2006년
*February : 8G Susceptor Development
*May : Parts & Material Enterprise Enrollment (Established Manufactured goods Factory)
*Nov : INNO-BIZ Enrollment
2005년
October : 7G Susceptor mass-production and Delivered manufactured goods
2004년
*March : 7G Susceptor Development
*August : Venture business Enrollment, R&D Enterprise Enrollment
2003년
*January : Developed Ceramic coating molding heater
*June : Delivered molding heater for PE-TEOS
*July : 5, 6G Susceptor Development and Delivered manufactured goods
*September : Delivered Ceramic coating molding heater
2001년
*January : Developed CVD Metal molding heater (Aluminum , Inconel)
*February, ISO 9001 Certified
2000년
*May : Established TTS

4. Others 3% Machining Product 15% Semiconductor HTR LCD CVD HTR 49% 16%
Sales Milestones
LCD CVD HTR
49%
Solar cell HTR
17%
Others
16% 3%
Semiconductor HTR
Machining Product
15%
매출액
(단위:억) 30 40 50
100
150
2000
2003
2004
2005
2006
2008
2009
2010 (Year) 5G 6G 7G 8G
8.5G SC
5G SC

5. Organization

6. Layout of Factory Total : 239.4m2/790py Ass’y Room 1FL (100m2/330py)
Office 2FL (45.5m2/150py)
Machine Room 75.8m2/250py
Clean room 19.4m2/64py
복지관 : 식당 1FL / 기숙사 2FL

7. Tools (For Metal) No. Description Spec Q’ty Etc. 1 Machining Center
3700 x 4500 x 1000
1Set
LP4035 2
2800 x 4000 x 1000
2Set
LP4028 3
2700 x 4000 x 1000
LP4027 4
2500 x 4000 x 1000
LP4025 5
2000 x 900 x 850
VX-900 6
1400 x 650 x 650
VX-650 7
1000 x 600 x 600
SPF-160F 8
Lathe
Large
PROTEC 9
Middle
NSL-580X1000G 10
Small
EMCO 11
Milling Machine
NSM-7 12
D.I Generator
150L / hr
D9-0352 13
Ultra cleaner
Special
TTS 14
Ceramic coating M/C 15
Welding Tool
Ar welding machine
YC-200TWSP-3 16
Electric welding machine
Sam hwa 17
FSW(Friction Stir Weld)
1set
#35호기 18
열 해석 Tool
CF Design Simulation Tool
Heater Pattern Design Tool

8. Tools (For Ceramic) No. Description Spec Q’ty Etc. 1 Vacuum Hot Press
RT~2000℃, 250Ton, N2, 10-3torr, W600 x D600 x H600
1Set 2
Vacuum Furnace
RT~2000℃, N2, 10-7torr, W850 x D1,300 x H600 3
Electric Furnace
RT~1500℃, W500 x D500 x H600 4
Pre-Press
50Ton, W600 x D600 x H700 5
Test Chamber
RT~1000℃, TC wafer, RF generation, Gas control 6
Vacuum Oven
RT~300℃, Low vacuum 7
He Leak Detector
Max 10-12torr 8
3D Inspection
Inspection range : 500 x 800 9
LCR Meter
10KHz, Capacitance, Inductance, Resistance 10
Elcometer
Dielectric thickness (0~5,000㎛) 11
Image Analyzer
0~1000배 12
Mixer
Mixing & De-airing 13
Ball Milling
Mixing 14
Ceramic Coater
Al2O3, Y2O3(etc Oxide), Thin Film (0~10㎛)

9. Customer

10. Patent & Certification
-Application : 22ea
-Registration : 15ea
-A patent on a new device :1ea
-R&D Enterprise
-Professional Manufacture Enterprise
-Venture Business Enterprise
-ISO certificate
-INNO-Biz certificate

11. In-line & Gas Line Heater SUS Plate Heater(Wafer)
Major Product Contents
Non Metal Heater 개발 중
Semiconductor
LCD
Solar Cell
Molding Heater
PE-CVD
Susceptor
PE-CVD
Susceptor
Q’tz Heater
Vaporizer
Hot Plate
(LCD & LTPS)
MO-CVD
Susceptor
AlN Heater
In-line & Gas Line Heater
Wall Heater
Wall Heater
Hot Trap
Shower head
SUS Plate Heater(Wafer)
H2 burn Heater
Chamber Unit
Cool Plate
Source Canister
Chamber Unit
Chamber Unit

12. Heater Products LCD Susceptor (2200 x 2500) Al Molding Heater
Gas Line Block Heater
Liquid Vaporizer
In-line Heater
Inconel
Molding Heater
Quartz Heater
ZnO Hot Trap
Multiple Hot Trap

13. CVD-Metal Heater Low Temp. Heater High Temp. Heater
Aluminum molding heater (200,300mm)-
■ Powerful by “Fluorine” damage (Ceramic Coated)
 Possibility in-situ dry clean
■ Powerful by thermal short
■ Low cost
■ Temp range : Under 450℃
■ Leak free because EBW welding
■ Good uniformity
■ Powerful by thermal short
■ Low cost
■ Temp range : Under 650℃
■ Leak free because EBW welding
■ Good uniformity

14. In-Line & Gas Line Block Heater
In-Line Heater
Block Heater
- In-Line Heater -
▶ Heating Element :Kanthal Wire
Power :AC 208V 1500W 7.2A
Temp : Max Temp’:800℃ /1000℃
Gas Line Block Heater -
▶ Heating Element :Cartridge
Power :AC 208V /120V
Temp : Max Temp 250℃
Gas Line別 Unif. Range <3℃

15. The other ② ① ③ Asher - Metal Heater The other
- Aluminum molding heater (200,300mm)
▶ Heating element
 Resistance : 21.6Ω±5%
 Power : 208V, 2000W, 9.6amp (Max)
 Maximum temperature : 450℃(Wafer temp.)
① PZT Sputter / Inconel /200, 300mm
② UV Bake Heater /Aluminum / 200mm
③ BW(Wsix) Heater /Aluminum / 200mm

16. ALD Source Canister ALD Source Canister - Source Canister -
▶ High Purity (Buffing & Electro Polishing)
▶ Leak Free

17. LCD PE-CVD Parts 5,6,7,8,8.5th Gen. ■ Powerful by “Fluorine” damage
 Possibility in-situ dry clean
■ Powerful by thermal short
■ Low cost
■ Temp range : Under 450℃
■ Good uniformity
■ Excellent flatness < 0.5mm
■ Excellent anodizing & Roughness Unif.

18. LCD PE-CVD Parts Shower head ■ Excellent flatness < 0.2mm
■ Excellent Hole size Unif.
- Lid & Diffuser Cover -

19. The others - LCD

20. The others - Semiconductor

21. Solar cell Parts PE & MO Susceptor The Other (Glass & Wafer)
SUS Hot plate
- Shower head -
- Chamber/cool Plate-
Aluminum Susceptor –
 Maximum temperature : 400℃(Glass temp.)
SUS Susceptor –
 Maximum temperature : 500℃(Glass temp.)
- Lid & Diffuser Cover -

22. TTS AlN Properties ■. Properties Item Sub-Item TTS-AlN Remark General
Color
Gray
High purity
Density
3.2~3.2 g/cm3
Electrical
Volume Resistivity
1.0~9.0x1013 Ω㎝
High electrical resistance
Dielectric Constant (RT, 1MHz)
9.1~10.0
Thermal
Thermal Conductivity at 20℃
150~160 W/mk
High thermal conductivity
Low thermal expansion coefficient
Thermal Expansion Coefficient
1~9x10-6
Mechanical
Bending Strength
300 MPa
High strength
Vickers Hardness
9~10 Gpa
Product
Product
- Plate Heater & Plate & Ring type
- Shaft Heater type

23. ■. Manufacturing process
TTS AlN Product
■. Product
■. Manufacturing process
Item
Sub-Item
TTS-AlN
Visual
Color
Gray
Shape
Plate
Diameter max Φ320
Thickness 5~30 [mm]
Heater
Material
: Temp
Mo(wire & coil) type
: Working temp (RT~600℃)
Connect
Brazing
1. Powder
2. Sintering
3. Machining
4. Brazing
■. Equipment
5. Machining
6. Inspection
7. Cleaning
8. Packaging
1. Hotpress : Temp(~1900℃)
2.Working zone: 600 x 600 x 600
1. Vacuum furnace : Temp(~1900℃)
2. Working zone : 600 x 800 x 600

24. TTS의 경쟁력

25. D E L Q Quality of Heater Design Efficiency Low Cost Quality
Good Design
Good Simulation
Repeatability
Quick Temp down
(30%~40% 단축)
Cooling 적용 특허 보유
Design D
Efficiency E
Low Cost L
Quality Q
Good Life Time
-Leak Free Weld – 2년간 leak 없음
-Non-Crack Anodizing Process
-열선 수명 3년 보장
Cost Reduction
FSW (Friction Stir Welding)적용
-EBW대비 40%절감
N-CAP

26. 독자적인 Pattern Design Surface Roughness 방식
Welding Type
자체 Pattern Design을 개발하고 Simulation하여 적용함에 따라 제품의 크기에 상관없이 모든 Heater에 대응 가능한
기술 보유함.
FSW 방식을 적용함으로써 충분한 용접면을 확보한 결과 Manual 또는 EBW 대비 Vacuum Leak측면에서 탁월한 품질을 Guaranty할 수 있음.
Surface Roughness 방식
Bead Material을 변경함으로써 기존의
Glass Back side Scratch를 최소화 시킴에 따라 불필요한 Aging 공정 (Dummy Glass진행-강제마모)및 Loss를 최소화 시킬 수 있음.
X100 표면촬영
Glass Scratch
Test
Material Al2O3
(#80+#220)
X100 표면촬영
Glass Scratch
Test
Material SiO2 
[타 업체 표면조도 방식]
[TTS 표면조도 방식]

27. Inspection Inspection 고객만족 [ 350℃ Temp U/F 확인 ] -.Power Control Box
-.Temp controller
-.Digital Chart Recorder
[ 평탄도 확인 ]
-.대형 석정반
-.Laser 측정기
Temp
Uniformity
Flatness
Inspection
[ 피막두께 확인 ]
-.Elco Meter
※ 표면조도가
5.0um이상이면
Back side에서 측정함
[ 절연저항 확인 ]
-.Mega Ohm Tester
Insulation
Resistance
Anodizing
Thickness
고객만족
[ 표면조도 확인 ]
-.표면조도측정기
※ Glass면 기준으로
약 270point를 측정함
[ Welding부 Leak 확인 ]
-.Helium Leak Tester
Surface
Roughness
Vacuum
Leak

28. Korea "I"社 America "A"社 Japan "T"社
LCD Part’s 실적
Susceptor
구 분
2008 ~ J社 S社 I社 T社 L社 E社 F社
TOT
2G ST 12 8 32
3.5G ST 11
4G ST 24
4G ST(SUS) 16
4.5G ST 2
5G ST
134 35 20 15 30
234
5.2G ST 9
5.5G ST 5
5.5G ST(SUS) 1
6G ST 95 10
123
7G ST 21
8G ST
147 25
202
8.5G ST 34
481 67 44 26 33 55
739
Dry 전극 Part’s
구 분
상부전극
차광판
Part's(이중Wall 및 기타)
Maker
2008 61 10
972
Korea "I"社 America "A"社 Japan "T"社
2009 56
1349
2010
101
572
1186
2011 45
238
663
TOT
263
830
4170

29. Thank you !!
고객이 먼저 원하는 기업이 되겠습니다.