2. Modular Cleanrooms, Inc.

5. Silicon wafer fabrication Taken from www.egg.or.jp/MSIL/english/index- e.html

6. Silicon wafer fabrication – slicing and polishing Taken from www.egg.or.jp/MSIL/english/index- e.html

16. LPCVD Systems

22. IBM 7-Level Cu Metallization

25. What is a Microswitch? Surface Micromachined 5-500 Micron Size 5-300 V Actuation

28. MEMS Gyroscope Chip 1  m Drive 0.01 Å Sense J. Seeger, X. Jiang, and B. Boser

29. Single chip six-degree-of-freedom inertial measurement unit (uIMU) designed by IMI principals and fabricated by Sandia National Laboratories

30. TI Digital Micromirror Device

31. Micromachining Ink Jet Nozzles Microtechnology group, TU Berlin

32. Gene chips, proteomics arrays.

33. NEMS: TOWARD PHONON COUNTING: Quantum Limit of Heat Flow. Roukes Group Cal Tech Tito

34. Biological Nanomotor