1. Furnaces and wet benches - update Savitha P

2. Current status of old equipments One bench could work: Exhaust problem need to be solved Wet oxidation and boron doping working Dry oxidation tube goes only to 500 deg C Can be used for annealing in N2 or O2 ambient Quote received for refurbishment (~$10000.0)

3. New equipment – Wet bench Wet bench: – CMOS pre-clean ready – General lift-off ready – Replacement for broken baths expected by March 15 th – MOS chemicals not expected atleast till June – Fill baths with GR chemicals for the time being?

4. New Equipment - Furnaces Had issues with power supply and Hydrogen leak Hydrogen no longer leaking Power supply problem is being monitored – Scrubber EGC 610 (for LPCVD and doping furnace) is tripping – LPCVD and Oxidation and doping furnace not functional Annealing Furnaces under optimization Hoping to open reservation for annealing furnace as soon as possible (recipes ready, boats under modification)