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Published byCathleen Dennis Modified over 9 years ago
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Project Title Name : University: Guide :
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Introduction Project – what is new / what are you analyzing from this work – Example: Solar cell – increase the efficiency – Example: Photo detectors – reduce cost and size
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Final Device structure Silicon ( p-type ) SiO 2 Al N+ Layer details, dimensions is a must
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Process Flow Silicon SiO 2 Eg: oxide deposition – thickness? Deposition method? Silicon SiO 2 Pho tore sist Eg: oxide etch – method? Lithography – pattern transfer, dimensions? Silicon SiO 2 Eg: Metallization – metal? method? Thickness? Try to do literature survey to understand the fabrication steps. Give clear representation to achieve your device structure.
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Facilities available in parent institute Facilities needed from CeNSE, IISc –
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Conclusion Incase any other images /results / papers you would like to mention ( only one slide )
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