1. Valery Ray Particle Beam Systems & Technology, Methuen, USA vray@partbeamsystech.com High-Throughput Milling of HAR Vias with Concentrated Gas Delivery PBS&T FIB User GroupISTFA 2005 San Jose, CA

2. 5/20/2015 FIB User Group, ISTFA 20052 Concepts of Concentrated Gas Delivery Commercial “Shroud” concentrator “Cupola” concentrator

3. 5/20/2015 FIB User Group, ISTFA 20053 Imaging through Shroud Concentrator: FOV 20, 5.8pA Beam, Dielectric Sample Images taken through Shroud gas concentrator (left) have lower S/N then images taken with Penta nozzle (right).

4. 5/20/2015 FIB User Group, ISTFA 20054 Main Chamber Vacuum as Function of Gas Pressure with “Shroud” Concentrator Factor of ~35 pressure reduction in main chamber of FIB system CCIG, Torr

5. 5/20/2015 FIB User Group, ISTFA 20055 Comparison of 5µm via Milling in SiO2 with XeF 2, Penta (2 Torr) vs. Shroud (0.8 Torr) Dose, nC Time, mm:ss Mill box, µm Factor ~ 3.5 throughput enhancement

6. 5/20/2015 FIB User Group, ISTFA 20056 Endpointing with Gas Concentrator: Secondary Electron Signal Secondary electron endpoint of 5µm deep via made by 0.3x0.3µm mill box, 5.8 pA beam current, and 0.8 Torr XeF 2 gas pressure, shroud gas concentrator. 0V bias 2V bias

7. 5/20/2015 FIB User Group, ISTFA 20057 Endpointing with Gas Concentrator: Sample Absorbed Current Stage current endpoint of 5µm deep via made by 0.3x0.3µm mill box, 5.8 pA beam, and 0.8 Torr XeF 2 gas pressure.

8. 5/20/2015 FIB User Group, ISTFA 20058 Indirect Comparison of Via Profile: Penta vs. Shroud (Beehive) FOV 5µm Vias milled by Beehive are expected to have straighter profile then vias milled by Penta

9. 5/20/2015 FIB User Group, ISTFA 20059 Summary  Concentrated gas delivery is viable for milling of multiple access vias in FIB Circuit Edit.  Provides enhanced throughput and reduced pressure in main chamber.  Endpoint is reliable with sample absorbed current and secondary electrons.