1. NanoSource Evaporation system with flow control APPLICATIONS
Analysis: Evaporation of liquid analytes, solvents, H2O...
Precursor supply for vapor deposition (CVD, LPCVD, PECVD, ALD), surface treatments
Operating principle :
For R&D applications, low to very low flow rates (Full scale from less than SCCM to a few hundred SCCM depending on the species to be vaporized and the size of the valve)
The species to be vaporized is heated in order to increase the saturation vapor pressure to a value sufficient to allow a flow rate in the process chamber. The flow rate is adjusted by means of a micrometric control valve guaranteeing good reproducibility.
High operating dynamics 1:100
Temperature of the vaporized species: up to 120°C
No carrier gas required
Complete set directly connectable to the process chamber
Compact, robust and economical system
For this purpose, the pressure upstream of the valve is kept constant by a digital control loop. Two parameters can be used to influence the flow rate: the inlet pressure (set by the temperature of the species to be vaporized in relation to its vapor pressure curve) and the opening of the valve. The combination of these two settings gives the NanoSource a high flow dynamics of 1:100
Operation under vacuum or atmospheric pressure
Suitable for corrosive, toxic, pyrophoric species
The quantification of the flow rate is based on nitrogen-referenced charts, other more precise methods are possible: gravimetric calibration, measurement of the rate of increase of the pressure in the chamber (Rate Of Rise)
Performance

2. Measurements : contact@omicron-technologies.com
Depending on the volume characteristics, species and length of the line, some optional modules are required.
Pump
Electronics
Purge plate
( optional)
Purge gas inlet
Container
Purge module
Spray module
Heated line
Process
Chamber
Purge plate
Measurements :
Flow control valve
Source isolation valve
Purge valve
Container isolation valve
To define the material, please specify:
Chemical species* Chemical formula
Process pressure Max/min flow rate
Container volumes 50mL mL mL to be specified
Length of the line 300mm 500mm mm to be specified
Fittings ¼ ’’ compression fittings mm compression fittings ¼ ’’ VCR 3/8’’ – ½’’ VCR
*If possible, provide us with the saturation vapor pressure curve