1. Quanta FIB Basic Training xT Microscope Control
Central Analytical Facility
The University of Alabama

2. Microscope Server and User Interface (UI)
While the xT Server software should be open most of the time, to start it double click the icon
Click the “Start UI” button
Mouse over the microscope icon and select “Show tiny view”
Do not click “Shutdown”, as this shuts down the entire system
Log in to the FEI User interface:
Name: support
PW:feico95-001

3. Application Status Menu
xT microscope Control
Tool Bar
Pages and Menus
Data bar
Image Windows
Application Status Menu

4. Menu Bar – File & Detectors
Open
Save
Save As
Record Movie
Digital files (AVI) of experiments
Import
STG files (stage positions)
EPM files (End Point Monitor Graphs)
Export
Log Off (Do not use)
Exit (Alt + X)
List of detectors
The system will detect when a detector has been added for ESEM work
Unavailable detectors will be greyed out

5. Menu Bar - Scan Pause (F6) Snapshot Photo (F2) Videoscope (F3)
Pauses the image
Can be set in Preferences to:
One Press – stops at the end of a frame; Two press – stops immediately
One press – stop immediately
Green “Pause” icon appears in upper left corner when image screen is paused
Snapshot
Single preset scan that pauses at the end
Photo (F2)
Single preset slow scan that pauses at the end with a prompt to save
Videoscope (F3)
Histogram displaying intensity along horizontal scan line
Reduced Area (F7)
Opens a small area with a faster raster speed, good for focus and stigmation
Full frame (default mode)
Spot
Switches scan off and places a green cross on the image
Line
Displays a green line on the screen which the beam scans along
External
Switches to active external control (e.g. EDS program, usually automatic)
Beam blank

6. Menu Bar - Scan Slow/Fast Scan Slower/Faster Scan
Preset scan speeds
Slower/Faster Scan
Live
Unfiltered direct image
Average
Continuous average of a specific number of frames
Integrate
Accumulates preset number of frames then pauses
Note:
Filters can be set for each display quadrant (e.g. live and filtered images can be displayed simultaneously)
Scan rotation (Shift + F12)

7. Menu Bar – Beam, Patterning, and Stage
Electron/Ion/Optical
Selection changes the source of the active screen
Coupled magnifications
Couples the electron and ion beam imaging to the same
Note:
This is used in ion milling, a separate subject discussed in detail later
Start Patterning
Starts ion milling a selected pattern
Reset Pattern
Resets to the beginning of the patterning procedure
xT Align
Navigation aid for orientation in the horizontal or vertical
Compucentric rotation
Keeps a feature in the center of view with stage rotation
Define User Units
Dialogues for the user unit values for X and Y movements
Offset Alignment
Movement relative to existing alignments
User Units
Switch to defined user units
Beam Shift Reset
Zeros beam shift and moves the feature to the center of the image without stage movement
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Home stage
Link Z to FWD
Sets Z to Free Working Distance
Reference Position
Establishes a reference position for all further points to refer to
Tilt to 0º/52º
Sets stage perpendicular to the electron beam/ion beam

8. Menu Bar – Tools, Window, and Help
Auto Contrast Brightness (F9)
Not available when using gaseous detectors
Auto Focus (F11)
Application Status
Displays application status window
Lab Notes
Opens a Windows Notepad. Use Labnotes to enter all SEM filament changes
FEI Movie Creator
For collection of sequences images
Center Cross
Places a cross in the center of the screen
Alignment rectangle
Places a staggered rectangle in the screen
CCD 15 mm Marker
Places a 15 mm marker in the optical window
Single/Quad Mode (F5)
1/2/3/4
Toggles the active window
A PDF of the manual can be found here

9. Tool Bar
The Tool Bar shares a number of duplicate functions with the menus, however not all icons are active in particular modes
1) Electron/Ion/IR source
2) Magnification
3) Accelerating Voltage
4) Current
5) Reduced area (F7)
Very useful for focus and stigmation, as well as imaging with large ion beam currents
6) Degauss e-beam
7) Link Z to FWD
8) Auto contrast (F9)
9) Auto focus (F11)
10) Videoscope (F3)
Note: Link Z, auto contrast, and auto focus require an active image

10. Tool Bar 11) Dwell time 12) Resolution 13) Beam blank 14) Snapshot
15) Pause
16) Live/Average/Integrate
17) Start/Pause patterning
18) Stop patterning
19) Record movie

11. Pages – Beam Control 1) Pages 2) Pump/Vent controls
Beam control, Navigation, Patterning, Processing, and Adjustments
Contain modules for different applications (e.g. Vacuum, System, Beam)
Adjustments page is not used by standard users
2) Pump/Vent controls
3) Low vacuum and environmental mode
4) Wave up and sleep options for source
Note: The ion source is only slept on weekends with no users to extend lifespan
If only using the e-beam, there is no need to wake up the ion beam
5) Accelerating voltage and source status
6) Stigmator and beam shift
Beam shift is very useful in situations where the stage cannot be moved (e.g. wedge lift out)

12. Pages - Navigation 1) Coordinate system 2) Current coordinates/input
Actual – Current coordinates
Target – Coordinates to move to
Relative – Coordinates relative to actual
2) Current coordinates/input
3) Position list
Store, update, or remove positions
4) Scan rotation
For image rotation when stage rotation is not an option

13. Pages - Patterning 1) Pattern selection 2) Hide/Show, Trash patterns
Different patterns for specific applications
2) Hide/Show, Trash patterns
Hide and show the pattern overlay on the ion beam image
3) Pattern parameters
Application is used to switch between Pt deposition and milling
4) Patterning progress
For image rotation when stage rotation is not an option
5) Omniprobe insertion/removal
6) GIS injection
Heat – Warms the GIS
Check box inserts GIS
Note: It is important to Link Z to FWD before inserting the Omniprobe or GIS. This not only confirms you’re at the proper working distance, but the GIS is also interlocked to where it will not insert without the link.

14. Pages - Measurement

15. Microscope Server and User Interface (UI)