2. Silicon wafer fabrication
Taken from

3. Silicon wafer fabrication – slicing and polishing
Taken from

12. LPCVD Systems

18. IBM 7-Level Cu Metallization

19. Micromachining Ink Jet Nozzles
Microtechnology group, TU Berlin

20. TI Digital Micromirror Device

21. MEMS Gyroscope Chip 1mm Drive 0.01Å Sense
J. Seeger, X. Jiang, and B. Boser

22. Single chip six-degree-of-freedom inertial
measurement unit (uIMU) designed by IMI
principals and fabricated by Sandia National Laboratories

23. Gene chips, proteomics arrays.

24. NEMS: TOWARD PHONON COUNTING: Quantum Limit of Heat Flow.
Roukes
Group
Cal Tech
Tito

25. Biological Nanomotor

27. What is a Microswitch? Surface Micromachined 5-500 Micron Size
5-300 V Actuation