2. Contents Introduction Markets OLED Structures Technology
Fabrication Process
Evaluation (Microstructure & etc)
Summary

3. Introduction [Merit of Rigid OLED Display] Cheap product cost
Foldable
Rollable
[Merit of Rigid OLED Display]
Cheap product cost
Mass production
Free size & Large area display
[OLED Display : Rigid  Flexible ]
Light & unbreakable materials
Easy to handle (folding & rolling)
Free shape (rounding type)

4. Introduction Curved & Bendable Foldable & Rollable Stretchable Terms
Simple structure
Large area shaping
Periodically transformation
Easy displacement
Random change
Bio-medical insertion
Applications
Exclusive design
Increased visible immersion
High reslolution
High portability
Unlimit from phone to tablet
Simple installation (rollable)
Realized free form-factor
Multi-folding
Customized display
Benefits

5. Market size of foldable phone Market trends of Display Type
Galaxy X series : 8.94 inch out-folding type
Huawei Mate X : 8.4 inch 4K in-folding type
(dual display, fingerprint)
Apple : plastic display (under testing)
Y2016 ~ Launch to Curved (LG signature TV)
Y2020 ~ Dominant market to Foldable Display (12 ~ 14 inch Tablet)
Y2025 ~ established to Rollable Display (Signage & Public Display)
Rollable
Foldable
(Citation : HIS Market 2016)

6. Flexible OLED Structure
Encapsulation Barrier Film
WOLED + MOx TFT
Flexible Color Filter
Touch Film
Substrate (PI Film)
Cover Plastic
Carrier Film
FEM
Front Glass
OLED (RGB)
Color Filter
Oxide TFT
Cover Plastic
Back Glass
Protection layer
Sputter layer
Monomer layer
Sputter layer
Film Substrate
Anti-reflection
[Requirements of Products]
Degrees of Water vapor transport ratio as same as glass(OLED+O2 = Degradation) : 10-4 ~ 10-6 g∙cm/day
Degrees of transmittance as same as glass : PET 90% ↑, COP 92% ↑
Degrees of Anti-reflection ratio : reflectance 1.0% ↓

7. Flexible OLED Process PET Adhesive (weak) Barrier Encapsulation OLED
Curl protection films before lift off glass
188 micro PET film
3 ~ 10 g adhesive properties
Barrier Encapsulation
Glass
Polyimide
Oxide TFT
OLED
weak to attack from water vapor or oxygen
PC, COP or PET film
SiO2
ITO
Enhanced barrier properties after glass remove
Transparent EMI shield properties
Properly adhesiveness between PI and ITO layer

8. Key Technology
▶ Main : SIO2 and other various oxides sputtering of single or mulyi-layer using plasma & vacuum technology
▶ Key technology :
Low temperature sputtering (Polymer Film base)
Gas distribution system (Optical & electrical properties decides)
Detail thickness Uniformity Controls (Max 1,600mm width within 3%)
Roll to Roll tension control (minimize film damage )
Adhesion promotion between substrate film and coating layer
Optical design and simulation technology by Mclaud
[R2R sputter system]

9. Key process Conventional Process FEM Process Repeat Vacuum Vacuum
Coating
Drying
Repeat
Sputter target
Vacuum
wet
Inclusion
Defect
Scratch
Sputter target
Sputter
target
Under coating
PET film
Oxide/Nitride
monomer
Vacuum
Cover coat

10. High Barrier structure
Over-all Structure
PET
Layer 1
Layer 2
Layer 3
Layer 4
H/C
Layer 5

11. Competitor Barrier Film
High Barrier Structure
FEM Inorg./Org./Inorg.
Competitor Barrier Film
Structure
(SEM)
OTR*
(cc/㎡day)
below 5 X 10-5
5 X 10-3
WVTR*
(g/㎡day)
5 X 10-4
5 X 10-2
K-PET (12.5㎛)
AL foil (7㎛)
Ny (25㎛)
LLDPE (50㎛)
PET(12㎛)+Al(30㎚)
LLDPE (50㎛)
* OTR (Oxygen Transmission Rate), WVTR (Water Vapour Transmission Rate)

12. Reliability Test Results
Spikes : plastic & handling
Scratches : handling
Pits – arcing, possible contamination
of plastics
Barrier cracking : local adhesion
issues (pre-contamination

13. Structure of multi-functional barrier encapsulation films
Functional Layers for Flexible OLED
PET
Oxide layer
Nanostructured
oxide
oxide
multi layer barrier film
polymer A R T O U C H S B E I
Out
Structure of multi-functional barrier encapsulation films
Transparent Flexible OLED (under development)
Permeation barrier degree : 10-2~10-5 g/m2/day (encapsulation properties)
Silver nanowire type capacitive touch panel systems with COP substrates
Anti-reflection layers by multi-layer sputter coating (5 or 7-layers)
T: 94.5%, R: 0.13%, Haze 0.65% (substrates : PET)
Additional anti-finger, anti-smuggles or anti-corrosion coatings

14. Water or Oxygen transportation mechanism
Permeation Blocking Mechanism
Water or Oxygen transportation mechanism
Environmental Test
Water penetration
Monomer
Wet coating
Inorganic
Competitor
FEM
<Competitor> <FEM>
Vacuum coating
Inorganic
monomer
Inorganic
50 nm

15. Slide Header Optical properties PET PC/PMMA COP T (%) 90.2 89.46 91.6
96.1
95.77
96.6 a*
-0.02
-0.01
0.01 b*
0.26
0.49
0.13
Haze
0.46
0.14
0.32 R
R (%)
9.41
10.93
9.21
36.7
39.46
36.3
-0.78
-0.5
-0.49
0.43
-1.7
-0.7
WVTR (g/m2·day)
OTR (g/m2·day)
PET
5.6
14.1
PC/PMMA
4.2
13.6
COP
2.1
12.0

16. Barrier Properties

17. Slide Header Flexibility & Mechanical properties
Bending Axis
ITO Film
ITO Film
Bending/Rolling Axis
Tensile strength : 231 MPa
Elongation : 65 %
Tensile strength : MPa
Elongation : 82 %

18. Inorganic layer Configuration
Thickness Control od Silicone Oxide for low surface roughness
< SiOx (1) >
< SiOx (2) >
< SiOx (3) >
Optical Properties of Silicone Oxide
Sample No.
SiOx (1)
SiOx (2)
SiOx (3)
투 과 율
T (%)
90.04
90.77
89.15 L*
96.01
96.32
95.64 a*
0.49
1.07
0.91 b*
0.41
1.22
2.33
반 사 율
R (%)
10.45
9.57
9.86
38.64
37.06
37.6
-2.51
-5.49
-5.39
1.57
-0.5
2.74

19. Surface roughness Surface Characteristics : Normal
Surface Characteristics : After Treatment

20. Summary
1. Roll-to-Roll coating Barrier Film by 500 mm wet & dry coating systems
- Formation of Inorganic / Organic / Inorganic multi-layer with vacuum conditions
- Surface roughness control and hydrophilic multi-layer condition of substrate to enhance moisture barrier property
2. Improvement of transmittance and optical characteristics    - Since it is difficult to secure the optical characteristics as a basic process, it is possible to lower the reflectance      Improved transmittance and other optical properties by coating the optical control layer on the opposite side of the
barrier film    - Developed non-yellowish barrier film by improving colors such as a * and b *
3. Development of multi-layer process technology    - Monolayer high density thin film conditions to replace common wet organic coatings    - Development of facility concept to coat wet and dry on-line at one time    - Establishment of process to impregnate nano-particles finally after implementing multilayer film by dry process