1. Downsizing Semiconductor Device (MOSFET)
EMT 251

2. Downsizing Device

3. Downsizing Device Downsizing of semiconductor devices (MOSFET/CMOS)
More transistors can be fabricated into single chips.
G-Shock Combination Wristwatch
(Fujitsu/Flash 0.5 mm pitch by IEP Technologies)
MSI (medium)
LSI (large)
VLSI (very large)
ULSI (ultra large scale integration)
SCALING DEVICES!!

4. SCALING DEVICE Original Device Scaled Device n+ Volt, V Wiring tox W
Gate
Wiring W XD LG n+
tox
p-Substrate, Doping = NA
Volt, V
W/
LG/
tox/
p-Substrate, Doping = NA
V/

5. Scaling Technique Scaling of MOSFET device and circuit parameters
Constant-field scaling
(Full scaling)
Constant-voltage scaling
Device dimension (tox, L, W,Xj )
1/S
Power supply voltage (VDD) 1
Electric field (E) S
Threshold voltage (VT)
Doping density (NA,ND) S2
Drain current (Id)
Oxide capacitance (Cox)
Capacitance (C)
Circuit delay time ( τ )
1/S2
Power dissipation (P)
Power delay (Pτ)
1/S3
Power density (P/A) S3
Sheet resistance (R)
Scaling of MOSFET device and circuit parameters

6. STANDARD PARAMETERS PUBLISHED BY ITRS
SIZE
LG(µm)
TOX(nm)
VTH
NMOS
PMOS
180nm
0.18±15%
4.2±4%
0.40±12.7%
-0.42±12.7%
130nm
0.13±15%
3.3±4%
0.34±12.7%
-0.35±12.7%
100nm
0.10±15%
2.5±4%
0.26±12.7%
-0.30±12.7%
70nm
0.07±15%
1.7±4%
0.20±12.7%
-0.22±12.7%

7. Example 150nm 0.15 ±15% SIZE LG(µm) TOX(nm) VTH NMOS PMOS 180nm
0.18±15%
4.2±4%
0.40±12.7%
-0.42±12.7%
150nm 
 0.15 ±15%
  ?
130nm
0.13±15%
3.3±4%
0.34±12.7%
-0.35±12.7%
100nm
0.10±15%
2.5±4%
0.26±12.7%
-0.30±12.7%
70nm
0.07±15%
1.7±4%
0.20±12.7%
-0.22±12.7%

8. Example (cont…)
VTH NMOS=0.3642
VTH PMOS=

9. Example (cont…)
NMOS
PMOS
Complete CMOS Structure

10. Example (cont…)
Id - Vd
NMOS
PMOS
Id - Vg

11. Advantages of MOSFET/CMOS downsizing
High Integration
High Speed Operation
Decrease the Switching Time of the Transistor
Low Cost
Low Power Consumption
CMOS has the lowest power consumption!
Complementary nature of PMOS and NMOS

12. Scaling Limitation Factors
Short channel effect (SCE)
Drain-Induce Barrier Lowering (DIBL)
Bulk Punch-trough
Hot Electron Effect
Extra Notes!!

13. THE END