1. ESH Task Force Presentation to Joint Steering Committee Shoumian Chen ICRD Shanghai / China Feb 21-23, 2011

2. Update for Joint Steering Committee
ESH Task Force
Update for Joint Steering Committee
The ESH Task Force convened from February with representation from all regional Semiconductor Industry Associations
Working Groups’ status reports
PFOS
Energy Saving and Quantitative Targets
PFC
Legislative updates
ISESH meeting rotation schedule
New Chemical Working Group
RoHS harmonization statement A G E N D

3. Voluntary Agreement Status
PFOS Working Group
Voluntary Agreement Status
The WSC PFOS Working Group agrees that the terms of the agreement have been met and the risk to humans and the environment has been minimized by our activity
The associations have aggressively worked to replace and reduce use and continue to do so
The associations have eliminated non-critical uses
A significant amount of R&D has been performed to create alternative chemicals and control emissions
Most waste is being destroyed through high temperature incineration and the small residual amount entering the environment has decreased to extremely low levels 3

4. Voluntary Agreement Status
PFOS Working Group
Voluntary Agreement Status
Our data shows
Amount of use for critical applications has decreased by 82% from 2005
Amount released to the environment has decreased by 99% to 7 kg/yr from 2005
Additionally
All known manufacturers of raw materials used to create PFOS for SC use have ceased production
Suppliers of critical lithography chemicals have identified alternatives for most uses
The work performed by the Working Group informed the UN Stockholm Convention process to ensure SC exemptions exist until critical replacements have been proven and implemented 4

5. PFOS Working Group
PFOS Trends 5

6. PFOA and Related Compounds Regulatory Activity
Canada: Prohibited manufacture/import of 4 fluorotelomers that could degrade into PFOA; issued plan to ensure additional substances prohibited
Norway: Ban PFOA, salts and ethers in finished consumer product at % - Jan 2013 (proposed SC exemption until 2015)
California: Law regulating products
Japan: Chemical Substances Control Law monitoring import, export and manufacture
MN, NJ, WV: Drinking water health limits
European Union: PFOA likely to be regulated within the next 2-years
Australia: Cautionary alerts urging only essential use
United States: Voluntary EPA 2010/15 Stewardship Program established; TSCA polymer exemption eliminated, EPA announces intent to regulate Perfluorinated Chemicals more aggressively
International – potential global regulation for PFOA in the next 5-years
Through Feb 22, 2011 6 6

7. PFOS Working Group Summary
2010 Release of Information will include a description of the success of the Working Group
The PFOS WG activities will be successfully concluded after the Release of Information in May 2011
PFOA
Is used by all regions and will likely be globally regulated in 2-5 years
Technical and critical use is still being investigated by Sept DC meeting
PFAS
USEPA is demonstrating some resistance to approvals of our alternatives C2 and C4
SIA in US will meet with USEPA TSCA to determine their thinking by Sept DC meeting 7

8. Energy Working Group Outcome
Revised Policy Paper sent to SEMI
Keep timeline defined in Kobe
Started discussion with SEMI
Agreed to expectation value for waste in Kobe meeting
Will continue to collect the 2010 data for energy, water, and waste by March 2011
Will continue to report to JSTC an aggregate Normalized Net Feed Water, but no target will be applied

9. Energy Working Group Outcome
Policy Paper on energy reduction
Wait for SEMI feedback beginning March on Policy Paper and possibly include feedback
Option to escalate Policy Paper to SEMI Board of Directors in March
If no agreement with SEMI is achieved, revise and publish Policy Paper as WSC in May 2011
Reduction program
Review technical trends in order to provide reduction target proposal to TF September 2011 by Energy WG Core Team, possibly including SEMI
Approve target in February 2012
Officially communicate WSC reduction target at WSC May 2012
Share information on communication strategy for semiconductor industry as enabler of resource efficiency in September 2011 9

10. WSC Electricity Data: 2001- 2009
Energy Working Group
WSC Electricity Data:
- weighted average -
Normalized: Kilowatt-Hours per cm² Silicon
Subsequent process and
facility improvement & invest
Technical frame-conditions
(e.g. 300mm)
Downturn end 2008, CY2009
WSC Weighted Average Total Energy Usage
40.43 TWHr
1.49 KWHr/cm2
2001
2002
2003
2004
2005
2006
2007
2008
2009
SIA in China data included beginning 2004

11. PFC Working Group Status Update
Objective
Reviewed 2010 data and progress on 2010 goal
Project update
All associations were able to provide data for 2010 (there are some small remaining gaps to close before final)
All associations met goal of at least 10% below baseline levels by 2010
Total WSC emissions are estimated to be 23% below baseline levels
Including SIA in China, without adding to baseline, WSC is still 5% below baseline levels 11

12. PFC Working Group 12

18. PFC Working Group Status Update
Objective
Finalize 2020 WSC goal
Project update
Goal ratified by all associations
Implementation of “Best Practices” by all companies in WSC
Inclusion of “Rest of World” fabs
These actions project to result in a 30% NER reduction from 18

19. PFC Working Group Status Update
Objective
Develop Best Practices document
Project Update
Best Practices document developed by PFC WG
Reports on current state of PFC reduction technology
Documents expectation that new facilities apply best practices
Agreement by PFC WG to continue to share updates on Best Practices and update document at least every 2 years 19

20. PFC Working Group External Reporting
Include status on the implementation of Best Practices
Provide aggregate results of absolute PFC emissions (MMTCE) trend
Provide aggregate results of NER trend (kgCO2/cm2) and relative target – 30% below 2010 NER value 20

21. PFC Working Group 21

22. Draft Communication and Justification Document
PFC Working Group
Draft Communication and Justification Document
JSTC requested document on justification for changing to NER for 2020
PFC WG included justification as part of draft communication on 2010 goal status and 2020 agreement
This is just a draft and not expected to be finalized until April 22

23. PFC Working Group Next Steps
Finalize 2010 data and verify analysis for 2020 goal by March 2011
Finalize text of WSC voluntary agreement for 2020 by April 2011
Distribute draft for WSC PFC WG by beginning of March 2011
Finalize WSC communication document on achievements and justification for 2020 program by April 23 23

24. Legislative Updates
Semiconductor Industry Association in United States
US Climate Change Developments
EPA TSCA Reform Update
CA “Green Chemistry”
Conflict Mineral legislation
Semiconductor Industry Association in Korea
National GHG info Management System
Emissions Management Target Act
Semiconductor Industry Association in Japan
Tokyo City Cap-and-Trade Program
Emissions Trading System
Technical instructions for the treatment of PFOS contained wastes 24

25. Legislative Updates
Semiconductor Industry Association in Chinese Taipei
The Optoelectronics Industry Discharge Water Standards
Semiconductor Industry Association in Europe
RoHS Final
REACH - ‘Substances in Articles’
F Gas Review
Semiconductor Industry Association in China
Interim Rule for Environmental Emergency Plan Management
Measures on Environmental Management of New Chemical Substances

26. ISESH Rotation Proposal
ESH TF/JSTC
JSTC/WSC
ESH TF/ JSTC/GAMS
ISESH
2001 US
Japan
US*
2002
Europe
2003
Korea
2004
2005
2006
2007
Chinese Taipei
2008
Japan＊
2009
China
Postponed
2010
Chinese Taipei＊
2011
2012
2013
Postpone
2014
2015
2016
2017
2018
  US → Postpone？

27. New Chemical Working Group
ESH TF has decided to begin a new Chemical WG
Develop WSC policy positions to address developing legislation, regulations, international agreements, science, and public perceptions that have the potential to affect the availability and use of chemicals and materials by the global semiconductor industry.
Promote policy positions focusing on global harmonization of chemicals regulations, based on principles of environmental stewardship, open trade, and economic feasibility.
Each association will designate a representative by April 2011
First meeting in September 2011 in ESH TF