2. Module 1: System Overview
This section describes a general overview of the following systems:
SBD100 (Slurry Blend & Delivery System)
Lift Station
Host & Remote

3. Slurry System Overview
Chemical System Overview
The SBD100 Slurry Dispense System automatically stores, blends and delivers the same mixture of slurry to multiple Points of Use (POU) areas in the FAB at a constant pressure. Three stations deliver the slurry through two Global Loops. Two of the stations are online at any given time and a third station is used as a backup, ready to come online as needed.

4. Slurry System Overview, continued
Fab
GLOBAL LOOP #1
Chem
GLOBAL LOOP #2
Chem N2
Slurry System Overview N2 DI
Drain DI
Drain
ABPR
ABPR
ABPR
STATION A
STATION B
STATION C
When the Dispensing station reaches the Start New Batch sensor (SNB), the Blending station starts the slurry blending process.
When the Dispensing station reaches the Low level, the Blending station begins Dispensing simultaneously with the original Dispensing station, eventually becoming the active Dispensing station.
When the remaining slurry in the original Dispensing station reaches the Low-Low level, it stops dispensing, becomes the Standby station, and begins the flush/purge sequence.
The “new” Dispensing station continues until it reaches the SNB level, at which point the Standby station becomes the Blending station and starts blending a new batch.
The SBD100 contains 3 stations: Blending, Dispensing, and Standby.
While the system is Dispensing in 1 station, Blending can be occurring in a 2nd station, while the 3rd Standby station is being flushed and purged.
This series of events continues, keeping the Fab continuously supplied with slurry.
DISPENSING
BLENDING
BLENDING
STANDBY
STANDBY
DISPENSING
SNB
LOW
LOW-LOW
SNB
LOW
LOW-LOW
SNB
LOW
LOW-LOW
Wait…
Next Page
Press Start Animation
Start Animation
Drain
Drain
Drain
Drain
Drain
Drain
Drain
Drain
Drain N2
Sample
DIW
Drain

5. Slurry System Overview, continued
Station Overview
Slurry
Loop #1
Chem
Slurry System Overview
Loop #2
Fab
DIW (Flush/Purge)
DIW
ABPR
LSH
Sample Port
Loop
Sample
SNB
LOW
The batch is recirculated through the Local loop to maintain a homogenous mixture before dispensing begins.
When the Dispense tank reaches the Low setpoint, a signal is sent to start dispensing from the Blend tank.
When the signal is sent to Start a New Batch, chemical, slurry, and DI water flow into the tank to start building a batch.
LOW-LOW
Drain
Loop
Sample
To Tank
Sample
Sample
Press Start Animation
Start Animation
Next Page
Wait…
Drain
Drain

6. Slurry System Overview, continued
Distribution Filtration
Drain
Module 2: System Overview
DIW
Slurry System Overview N2
Drain
Bank A
Loop #1
Filt Bank
A Sample
Drain
Drain
DIW N2
Drain
Bank B
The standby filter bank (E) is used when filters from Bank A or Bank B must be changed or serviced.
Blended slurry flows through the filtration system on Banks A and B. Bank E is the Standby filter bank.
Filt Bank
E Sample
Drain
Drain
DIW N2
Drain
Loop #2
Wait…
Next Page
Press Start Animation
Start Animation
Bank E
Filt Bank
B Sample
Drain

7. Lift Station Overview
Lift stations are used to pump chemical or slurry materials from Mega tools to the appropriate drains.
Sensors on the lift stations denote four liquid levels in the tanks: empty, low, high, and high / high.
When the level of the liquid in the lift station tank reaches the low level, the lift station will begin pumping out of the tank until the empty level is reached.
The high level in the lift station denotes a condition in which the lift station cannot accept any more chemical.
The FMCS or SCADA will read this level and generate a warning to the operators and the tools, the latter of which may inhibit the tools from dispensing sump liquid to the lift station. After the high sensor trigger is removed, the tools can resume pumping into the lift station tank.
Lift Station Overview
Lift Station Front
Lift Station Back

8. Host & Remote Overview
The MegaLink Host 120 system provides control of valve manifold boxes (VMBs) and status interfacing between point-of-use (POU) tools and Mega slurry and chemical tools.
When tool sends a chemical available signal, a contact is closed allowing the MegaLink H120 to receive a demand signal from the POU.
When a POU sends a chemical demand signal, the MegaLink H120 opens the appropriate valve in the VMB to supply to the POU.
The MegaLink H120 displays the status of demand signals received from the POU tools.
The PanelView Plus 1000 interface enables the user to operate and monitor the hosts and remotes through the use of function keys and screen displays.
Host & Remote Overview
Host
Remote

9. Module 2: Operation
Module 2: Operation

10. HMI Overview Touch Screen Graphics Menu Bar Automatic Valves Tank
Pumps
Function Buttons
Process Data

11. System Startup
The system is initially set up and powered on by an operator or engineer with an administrative password.
Refer to Restarting after EMO if restarting the system.
System Startup
Toggle the AC Disconnect switch to the ON position.
Ensure the EMO is disengaged (pulled out).
Press the green Start button on the front of the Controls cabinet.
When the startup is complete, the Home screen is displayed.

12. Login/Logout Password Permissions
The user password authorizes the user to view and/or edit various controls in the system.
The touch screen interface is set up with the following three levels of permissions:
Login/Logout
Default - enables an operator to view all screens in the system.
Mega - enables an operator to view and edit the controls required to run the system.
Admin - enables the user access to all screens and their functions, particularly to modify critical controls in the system.

13. Login/Logout, continued
Logging In
Touch Login on the Menu bar located at the top of the screen.
Login/Logout
Press the User Name field to enter a login name.
Use the on-screen keypad to enter a name, and then press the return key. Your login name appears as the system user.
Press Password to enter the corresponding login password.
Use the on-screen keypad to enter a password, and then press Enter.
Press OK to exit the Log On Dialog.
Logging Out
Press the Logout button on the Menu bar to log out of the system.

14. Automatic Operation
The following procedure places the system into Automatic operation.
Press Maintenance to display the Tool Maintenance screen.
Ensure the pumps are ready for operation, and then toggle each pump online by pressing the applicable pump switch to Online mode.
Press the Auto/Manual Mode Control button to toggle the station(s) to Auto operation. The Flush/Purge sequence begins. See Flush/Purge.
Automatic Operation
Maintenance Screen Example

15. Monitor the System in Manual Mode!
Manual Operation
Placing the system in Manual mode de-energizes all solenoid valves. This sets all valves in their normal (safe) state when Manual mode is activated.
In Manual mode, combinations of valves can accidentally be opened or closed that are outside the scope of the equipment design. The operator assumes all responsibility for running the system in Manual mode.
If …
Start…
Opening valves
Downstream and move in the upstream direction.
Closing valves
Upstream and move downstream.
Manual Operation
CAUTION
Monitor the System in Manual Mode!
Some alarms may not function in Manual mode. Potential hazards may be created. Use caution.

16. Manual Operation, continued
Login with Admin credentials for placing the system in Manual Mode.
Press Maintenance from the Home screen.
Press the Auto/Manual Control Mode button to toggle the station to Manual mode.
Press the Previous button to return to the Home screen.
Press the appropriate Station Overview button.
Press valve icons on the Overview screen to energize or de-energize the selected valve.
A green valve is open.
A red valve is closed.
Return the system to Automatic mode as soon as possible.
Manual Operation
Maintenance Screen Example

17. Restarting after an EMO
If the system shuts down while running an operation, it does not continue where it left off after the restart.
An Abort decision is required before continuing to Local or Global recirculation to ensure a high-quality batch in the tank.
If the system is shut down due to an EMO condition, pull the EMO button out before the next step.
Press the green Start button. After the system fully initializes, the Flush/Purge Control Dialog displays.
Continue with the steps in Flush/Purge.
Restarting after EMO

18. Obtain Appropriate Authorization!
Flush/Purge
Batch Abort
Batch aborts (flush/purge) may be necessary if process parameters, such as pH and density, are out of specification range or if the batch becomes contaminated.
A flush/purge is used to drain and flush the blend tank, and when a thorough cleaning is necessary.
A gravity drain dumps the entire blend tank contents to the drain, however, residual fluid is left in the process piping.
NOTICE
Obtain Appropriate Authorization!
Batch Abort dumps the tank contents to the drain. Obtain authorization before proceeding with a Flush/Purge.
Flush/Purge

19. Flush/Purge, continued
Flushing and Purging
Select the type of abort (flush/purge) sequence you would like to perform.
Gravity Drain Only
Complete Flush/Purge
Reset Flush/Purge
Based on the abort sequence chosen, select the action you prefer to perform at the end of the abort sequence.
If you choose…
Your choices are…
Gravity Drain Only
Put station in Manual
Put station in Standby
Start a new batch (Blend station only)
Complete Flush/Purge
Reset Flush/Purge
Put station in local recirculation
Flush/Purge
Press the Execute button to start the Abort (Flush/Purge) sequence.
Repeat for the remaining station(s).

20. Sampling system chemistry exposes the operator to chemical hazards.
CAUTION
Chemical Hazard!
Sampling system chemistry exposes the operator to chemical hazards.
Wear the following PPE when taking samples:
Acid-resistant gloves
Chemical safety goggles and full-face shield
Protective clothing such as a lab coat, apron, or coveralls
Use an approved container to hold the sample.
Sampling

21. Sampling, continued From the Overview screen, press the Sample button.
Press the Start Sampling button.
Follow the on-screen steps to complete the sampling process.
Sampling