1. IC-CAP Modeling Configuration Agilent Technologies November 01, 2005 Page 1 Agilent IC-CAP Modeling Configuration - Block Diagram (0.045-50 GHz) E8364B Vector Network Analyzer RF Subsystem 4156C Precision Parameter Analyzer Computer controller and IC-CAP software (quoted separately) DC Subsystem GPI B Parametric Signal Flow Diagram 4284A Precision LCR Meter E5250A Low Leakage Switch Mainframe x1 789 456 123 0. - @ n M  k m RF Signal Flow Diagram

2. IC-CAP Modeling Configuration Agilent Technologies November 01, 2005 Page 2 Agilent IC-CAP Modeling - Signal Flow Diagram (0.045 - 50 GHz) RF Subsystem DC Subsystem Probe Station or Test Fixture E8364B Port 1 Port 2 11900A Adapter 2.4 mm, (m- m) f m 85133F Flexible Test Port Cable Set, 2.4 mm f (1) 5063-9809 Flexible Cable 10 in., 2.4 mm (m- m) (1) 5063-9809 Flexible Cable 10 in., 2.4 mm (m- m) (4) 16494A #002 Triaxial Cable, 3 m 11900C Adapter 2.4 mm, (f-m) 16494A #002 Triaxial Cable, 3 m 16494A #002 Triaxial Cable, 3 m 11612V K21 B.N. RF In G RF/DC Out FS 11612V K11 B.N. RF In G RF/DC Out FS SMU1 S F SMU2 S F SMU3 S F SMU4 S F 4156C

3. IC-CAP Modeling Configuration Agilent Technologies November 01, 2005 Page 3 Agilent IC-CAP Modeling Configuration - CV Parametric Signal Flow Diagram (6) 16494A #002 Triaxial cable, 3 m 4284A 16048D Test lead 1.89 m Hpot Hcur Lpo t Lcu r Probe Card 1250-2405C BNC TEE Probe Station Alternate connection -> Direct to probe station Probe Card Cable E5250 A 10 x 12 sw.matrix OUTPUT 1 2 3 4 5 6 7 8 9 10 11 12 10 x 12 sw.matrix OUTPUT 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 SMU INPUT 5 6 AUX INPUT CV1 CV2 HF2 HF1 DC Subsystem 4156C MPSMU S F HPSMU S F MPSMU S F S F 1250-2405C BNC TEE

4. IC-CAP Modeling Configuration Agilent Technologies November 01, 2005 Page 4 Agilent IC-CAP Modeling Configuration - Rack Layout E3661B 1.6 m Rack Cabinet E3668B Feed through Panel Anti-static work surface 35181M Drawer Unit, 5.25 inch 4156C Precision Semiconductor Parameter Analyzer E8364B Vector Network Analyzer E5250A Low Leakage Switch Mainframe E7735A Filler Panel (5-EIA) E7731A Filler Panel (1-EIA) 4284A Precision LCR Meter E3668B Feed through Panel x1 789 456 123 0. - @ n M  k m

5. IC-CAP Modeling Configuration Agilent Technologies November 01, 2005 Page 5 Agilent IC-CAP Modeling Configuration - Rack Layout Footprint (top view) Rack Cabinet 60 cm W x 91cm D Work Surface 100 cm W x 67 cm D 142 cm Rack Cabinet height = 160 cm