1. IAEA CRP Nuclear data for IBA © Matej Mayer Identification of the most important cross section data M. Mayer Max-Planck-Institut für Plasmaphysik, EURATOM Association, Garching, Germany

2. IAEA CRP Nuclear data for IBA © Matej Mayer What are important cross section data? Specific cross-section data are important, if Required for actual research  What is in use?  Citations  What could be used?  Research topics Alternative reactions available? Sensibility: Cross-section should be high Depth profiling: Cross-section should be sufficiently smooth Resonant depth profiling: Resonance should be sharp Availability of experimental data?  Energy and angular range; quality of data Availability of theoretical models?

3. IAEA CRP Nuclear data for IBA © Matej Mayer Which cross-sections are in use? Proceedings of IBA 2003 RBS Most often analysed elements: C, N, O, Al, Si Often analysed elements: Li, Be, F, Na, Mg, P, S, Ca, Ti Rarely analysed elements: He, B, Ne, Ar, K, Sc

4. IAEA CRP Nuclear data for IBA © Matej Mayer Research topics Environmental sciences, earth sciences: RBS for C, N, O, F  PIXE for heavier elements Fusion research: Be, B, C, O, Si, Fe, Ni, Cu, W Often layer thicknesses > 10 µm  High energy protons Hard or protective coating, ceramics: Diamond-like C, a-C:D BN, B 4 C, Al 2 O 3, TiO 2, SiO 2, SiN, MgO, ZrO 2, ZnO,... Semiconductors, magnetic materials: Doped Si, SiO 2, SiO x N y, InP/InGaAsP, GaAs, GaN,... LaAlO 3, LaSrTiO 3, Co/TiO 2,... Need for cross-section data: Be, B, C, N, O, F, Al, Si, P, S, Ti

5. IAEA CRP Nuclear data for IBA © Matej Mayer Suitability for depth profiling Smooth cross-section  suitable for depth profiling Broad resonance  maximum sensitivity Many resonances  not suitable for depth profiling

6. IAEA CRP Nuclear data for IBA © Matej Mayer Availability of data Many data available Reasonable agreement Theoretical model available Limited amount of data Agreement not good No theoretical model

7. IAEA CRP Nuclear data for IBA © Matej Mayer Backscattering cross-section data for protons IBANDL 13.10.2005

8. IAEA CRP Nuclear data for IBA © Matej Mayer Conclusions Most important cross-section data are identified according to Requirement for actual research Availability of alternative reactions Suitability for depth profiling Availability of experimental data Availability of theoretical models