Modeling and Design Diaphragm Micropump University of South Florida - March 17, 2008
Diaphragm micropump with passive check-valves Destination Inlet valve Outlet valve Pump chamber p1 p2 s 1 2 d Diaphragm Source Valve discs z Vdead p2* p1* p(t) ΔV
Pump chamber: mathematical model
Pump chamber: Simulink model
Pump chamber: simulation results
Typical actuators
Thermopneumatic micropump
Diaphragm deflection
Temperature–deflection relationship
Temperature vs. deflection
Actuation chamber: math. model
Actuation chamber: Simulink model
Actuation chamber: simulation results Experimental data
Thermopneumatic micropump: Simulink model
Thermopneumatic micropump: simulation results
PCB Thermopneumatic micropump
PCB design (boards 1 & 2) 1 2 TOP BOTTOM
PCB design (boards 3 & 4) 3 4 TOP BOTTOM
Pneumatic micropump
Pneumatic micropump: math. model
Pneumatic micropump: Simulink model
Pneumatic micropump: results
Pneumatic micropump: volume pumped per cycle vs. frequency
Pneumatic micropump: flow rate vs. frequency
Pneumatic micropump: flow rate vs. back pressure