Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 Status of Process Qualification Centers Florence, Strasbourg, Vienna Mirko Brianzi Anna Macchiolo Jean-Charles Fontaine Jean-Marie Helleboid Christophe Hoffmann Thomas Bergauer Margit Oberegger

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 System Configuration Probe-card to contact the 9 test-structures Switching matrix in K7002 main-frame PC or MAC to control the system through Labview software Measuring Instruments

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 Probe-card  After finalisation of HPK and ST mask designs we have agreed upon the positions of the probe-card 52 contacts  The same probe-card is compatible for the test- structures of both the suppliers for all the sensor-types  Contacts on the baby detector designed to align the probe-card with the probe-station chuck and the standard moon Cap-ts Sheet GCD Cap-AC Baby Cap-DC Diode Mos

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 From the probe-card to the switching matrix Flat cable from the probe-card Connection box between flat-cable and cables to the switching matrix 4 K7154 modules of the switching matrix: 10 inputs each

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 Measuring Instruments HV source : up to 1000 V (IV_baby) V source:  20 V All the instrument drivers are ready and included in the common software LCR meter + decoupling box

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 New measurement configuration  Change of the previous measurement configuration in order to:  Make it compatible for the different instrumentation present in the three laboratories  Improve the accuracy of some measurements  Reduce the needed electronic equipment  At the moment each lab is testing the new configuration. After this phase it will be implemented in the common software

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 Switching matrix Slot 2 k7154 Switch System K7002 Slot 5 K7153 Slot 1 K7154 Slot3 k7154 Slot 4 k7154 K7153: 5 input channels from the measuring instruments New configuration: Using a common Low for the HV and V sources we could remove a K7153 module from the Switching System, now available as spare Common Low (HV+V source) High HV source High V source 4 outputs to the K 7154 modules In Florence we are now replacing our old multiplexers K7158 (30 V limit on input voltage) with K7154 (1100 V limit)  the switching system is going to be exactly the same in the 3 labs

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 Common Software Selection of the lab Strasbourg is now implementing the last changes in the common software Visualisation of the full set of results of the 9 measurements on a standard moon

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 Gate Controlled Diode V gate (V) New configuration: Common LOW for HV source and V source Florence: we had to swap HV and V source because of worse resolution of the A-meter of HV generator V back = 10V Surface generated current (A) inversiondepletion accumulation CSEM M200 Standard moon

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 Gate Controlled Diode (Strasbourg) OLD= HV source and V source HIGH were referred to the same potential NEW= HV source and V source LOW are referred to a common GRND

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 CV MOS HPK M200 standard moon, similar behaviour for STM M200 Changed the connection between High and Low of HV source and LCR meter through the switching matrix (same for CV on diode) V fb (F) V gate (V) LCR meter + decoupling box HV source LCR Low to 0V since all the instrument GNDs are connected together To back To MOS metal

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 Tests of the new configuration (Strasbourg)

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 CV on CSEM MOS Vgate (V) f = 100 Hzf =100 Khz

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 R interstrip Polarisation bias to the back To the central strip To the first neighbouring strips Need high sensitivity of A-meter on HV source Measured on CAP-DC: 9 strips without bias resistor Voltage applied across the central strip and the neighbouring ones

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 IV dielectric

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 Still to do... Implement the new configuration in the final software and then test it. Install the probe-card and complete the connection with the switching system. Test the fully automatic procedure with the probe-card. Interface to the DB : a first draft of the output file and of the VI files to generate it was prepared in Vienna. The connection to the main acquisition software has to be implemented in Strasbourg.

Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001 Logistic Florence: IB1, IB2, OB1, OB2 (no-longtime IV) from QTC Perugia and Pisa 5% of the wafers = 693 standard moons Strasbourg: W3, W5A, W5b, W6a, W6b from QTC Karlsruhe 271 standard moons Vienna: W1, W2, W4, W7A, W7b from QTC Vienna 235 standard moons