Slide ITRS Spring Meeting Sponsored by Infineon Technologies Philips Semiconductors STMicroelectronics

Slide 2 Monday Plenary Agenda Monday Morning –Welcome –Overview of Days Agendas & Special Events –2006 Update Task –2006 Key Dates –Instructions for the ITWGs for Monday –other items Monday Afternoon –IRC Rollout [Start times may be adjusted] –TWG Q&A

Slide 3 Tuesday Plenary Agenda Tuesday Morning –Optional Plenary [decided at Monday PM] –Key Challenges for each ITWG for 2006 Tuesday Afternoon –IRC Rollout –TWG Q&A

Slide 4 Agenda April 6 (Thursday) 8:30 - 9:15 Registration 9: :00Plenary General Session with ITWGs/IRC 10: :00Breakout for ITWGs and IRC 12: :30Lunch 13: :45Continued Breakout for ITWGs and IRC 16: :30Plenary with ITWGs/IRC Rollout 17: :00Break before dinner 18:00 Bus leaves for Hap and Stap event 18:00- 20:00Dinner Evening Details The special event on Thursday evening is called Hap and Stap. It includes a walking tour of Maastricht and a selection of restaurants for the evening.

Slide 5 Agenda April 7 (Friday) 8: :00Breakout for ITWGs and IRC [or Optional Plenary with IRC/ITWGs] 10: :00 Continued Breakout for ITWGs and IRC 12: :00Lunch 13: :45Continued Breakout for ITWGs and IRC 16: :30Plenary 17:30- 18:00 Break before dinner 18: :00Buffet Dinner in the Hotel

Slide 6 What is the 2006 Update? Each working group reviews their tables only for any corrections or updates, based on the industrys latest information –If a TWG needs to update figures or text, then report to IRC for discussion/approval. –2006 Timeframe Update uses the 2005 ITRS 15-year timeframe: 2005 through –Use the WAS-IS format from the 2005 tables for those rows that need to be updated. –Each ITWG writes a 1-page summary of key changes/challenges for the 2006 Update. –These updates must be finished by September 2006

Slide ITRS Update Instructions Instructions cover the 2005 ITRS table line items that are updated, deleted, or added. The word file of each TWG chapter is posted online at and was sent to each team in January. [Ask your TWG chair] Tables requiring revision can remain in Word or put into Excel spreadsheets for update by the TWG. Update format must be maintained in order to see new revisions as follows: –Each table indicates 2005 line items that require revision as WAS, with duplicate rows beneath the WAS row for update if new data or correction for 2006 Update apply. –Each ITWG fills in this new IS row with the new data. Deleted or new additional lines can also be indicated. –Deleted line items are noted as DELETE and with the data struck through. –New lines are noted as ADD and are located as they should be within a table. As added new information, these do not have WAS rows.

Slide 8 Jan – AprIRC, CrossTWG Study Group, and DTWG meetings ITWGs receive packets of 2005 chapter in Word, instructions for 2006 update. ITWGs work on review and update of tables only. [chapter text is NOT required to be updated!] Apr 5 – 7 ITRS ITWG/IRC meeting near Maastricht, the Netherlands at the Dolce Kasteel Vaalsbroek Jun 30Group 1 tables due to Group 2 teams and the ITRS office Jun 30Presentation Drafts due for preparing the July handout CD: 1 page text summary of key changes to tables and ~20 slides in powerpoint [do NOT send PDF…] Jul 10 – 11 ITRS ITWG/IRC meeting in San Francisco at the Hotel Marriott Jul 12ITRS Conference at the Hotel Marriott 2006 ITRS Key Dates for IRC and ITWG

Slide 9 Jul 24Group 2 tables are due to Group 1 and 3 teams and the ITRS office Aug 24Group 3 chapters are due to Group 2 and 3 teams and the ITRS office Sep ITRS content is frozen OctRegional Executives Advisory board approve ITRS Nov 10 Presentation Drafts due for preparing for December Public meeting CD Dec 4 ITRS ITWG/IRC meetings in Hsin Chu, Taiwan at the Ambassador Hotel Dec 5ITRS Conference at the Ambassador Hotel Dec 2006 Update is posted online to the public ITRS Key Dates for IRC and ITWG

Slide ITRS Working Groups Group 1 System Drivers & Design, Process Integration, RF/AMS Wireless, ORTC Group 2 Front-end Processes, Lithography, Interconnect, Assembly & Packaging, Test & Test Equipment, ORTC Group 3 Emerging Devices, ESH, Yield Enhancement, Metrology, Modeling, Factory Integration, ORTC

Cross TWG Schedule Slide 11

Cross TWG Schedule Slide 12

Cross TWG Schedule Slide 13

Slide 14 ITRS Special Events Electronics Manufacturers Summit webcast by Semiconductor International – April 18, 19, 20 ASMC highlights on ITRS Boston, MA – May 22-24