1. 2011 ITRS REVISION SCHEDULE AND GUIDELINES CONTENTS 2011 Due Dates and Meetings Whats New for 2011 ? Template info Chapter required topics outline and section guidelinesChapter required topics outline Chapter section numbering examples Difficult Challenges Technology Requirements Potential Solutions Citations and References The ITRS On the Internet ITRS Website Information ITRS Basecamp Forums ITRS Assistance SLIDE NUMBER 2-4 5 6 7-8 9 10 11 12 13 14 TIP ! For hyperlinks to work, use the Slide Show mode !

2. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines2 JAN – MARCH – ITRS TABLES DRAFTS PREPARED –ITWGs and CrossTWG Study Group meet each month with their teams to work Difficult Challenges, Technology Requirements tables, and other tables to prepare for Spring workshop APRIL – ITRS SPRING WORKSHOP IN POTSDAM, GERMANY April 10-12, 2011 -- IRC AND ITWG Workshop April 13, 2011 -- More than Moore Workshop OBJECTIVE OF SPRING WORKSHOP MEETING: –ITWGS have all draft tables completed to share with the other working groups for input and consensus PREPARE AND BRING YOUR ITWG FIRST DRAFT TABLES TO THE SPRING MEETING ! MAY AND JUNE – ITRS FIGURES PREPARED, CHAPTER WRITING IS UNDERWAY –ITWGs work on Potential Solutions to match the Technology Requirements tables –ITWGS begin writing/editing draft chapter –Prepare for Summer workshop and to finalize all tables and charts 2011 ITRS SCHEDULE

3. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines3 JULY – 2011 ITRS SUMMER WORKSHOP AND SUMMER PUBLIC CONFERENCE IN SAN FRANCISCO CALIFORNIA July 11-12, 2011 -- IRC AND ITWG Workshop July 13, 2011 – ITRS Summer Public Conference OBJECTIVE OF MEETING: FINAL DRAFTS OF TABLES AND FIGURES COMPLETED FOR MEETING –ITWGs present at the conference for audience and other ITWG feedback. –FIRST Drafts of chapters are underway. AUGUST 1 – FINAL DRAFTS OF TABLES AND FIGURES FILES [EXCEL AND POWERPOINT] DUE TO ITRS EDITOR –Global input from July meeting is completed by this date! –All tables / charts / figures sent to editor as final drafts and global feedback finished for the ITWG authors to finish by September 15. AUGUST 15 – FINAL DRAFT [WORD DOCUMENT FILE] OF CHAPTER WRITING DUE TO ITRS EDITOR. –This step allows checking the progress of each team. –If there are any questions with the chapter, it is early enough to fix before the freeze date of September 15. 2011 ITRS SCHEDULE

4. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines4 SEPTEMBER 15 – FREEZE DATE FOR ALL MATERIALS! –THIS IS A VERY IMPORTANT DATE FOR ALL ITWGs. –NOTE ! All chapter reviews and feedback by ALL Global Regions should be completed BEFORE this date, by August 1, in time for the ITWG authors to finish by September 15. – Final acknowledgments and 1 page summary of "What's New" due for 2011 Executive Summary. – Future Fab International article due September 20, 2011 [details provided by FFI editors] OCTOBER and NOVEMBER 2011 – IRC REVIEWS AND FINAL EDIT CYCLES DECEMBER 2011– RELEASE 2011 ITRS, SEOUL KOREA December 12-13, 2011 -- IRC AND ITWG Workshop December 14, 2011 – ITRS Winter Public Conference, Seoul Korea 2011 ITRS SCHEDULE VERY IMPORTANT NOTES ON SEPTEMBER 15 DUE DATE TO ENSURE YOUR UPDATES ARE PUBLISHED IN 2011 No Group Reviews or Input after September 15! If FINAL material is NOT received on September 15, it will NOT post until end of 2012!

5. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines5 GOLD FILES ARE TO BE USED FOR ALL REVISIONS –Are the most accurate and are the posted versions online –Have the correct formats GOLD VERSION OF 2010 EXCEL TABLES –Unlocked worksheets –Can customize for ITWGS with formulas WORD VERSION OF 2009 CHAPTER GOLD VERSION OF 2009 POTENTIAL SOLUTIONS CHARTS mailto:linda.wilson@sematech.org to get these versions or go online to http://www.itrs.net/Links/2011ITRS/2011Preparations.htmlmailto:linda.wilson@sematech.orghttp://www.itrs.net/Links/2011ITRS/2011Preparations.html –User name = 2010 ITRS and Password = roadmap WHATS NEW FOR 2011? -- TEMPLATES

6. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines6 ALL SECTIONS AND SUBSECTIONS ARE NOW NUMBERED! Top Level Sections [Required Topics for each ITWG chapter]: 1.0 Scope 2.0 Difficult Challenges 3.0 Technology Requirements 4.0 Potential Solutions 5.0 Cross-cut Issues –5.1 ESH, Metrology, Yield Enhancement, Modeling & Simulation –5.2 Other Cross-TWG Discussions –5.3 Impact of Future Emerging Research Devices & Materials –5.4 Analog challenges/topics –5.5 MEMS structures 6.0 Other Considerations… 7.0 Conclusions 8.0 References Guidelines The top level sections above are the required topics and order for each chapter. Many chapters have more than these required sections. In that case, there may be more than 8 sections, which is okay. However, if your chapter has other sections besides these topics, please discuss with the editor as soon as possible (for planning purposes). Use Word auto-numbering. The next 2 slides have examples of numbering. Try to limit numbered subsections to only 4 or 5 levels. WHATS NEW FOR 2011? -- CHAPTER WRITING AND NUMBERED SECTIONS

7. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines7 3.0 TECHNOLOGY REQUIREMENTS 3.1 Logic 3.2 Memory 3.2.1 DRAM 3.2.2 Non-volatile Memory 3.3 Reliability 3.3.1 Introduction 3.3.2 Requirements 4.0 POTENTIAL SOLUTIONS 4.1 Logic 4.2 Memory 4.2.1 DRAM 4.2.2 Non-volatile Memory 4.3 Reliability 5.0 CROSS TWG ISSUES 5.1 Modeling and Simulation 5.2 Interconnect WHATS NEW FOR 2011? -- EXAMPLE 1 OF NUMBERED SECTIONS Technology Requirements and Potential Solutions as Separate Sections

8. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines8 3.0 TECHNOLOGY REQUIREMENTS AND POTENTIAL SOLUTIONS 3.1 Logic Technology Requirements and Potential Solutions 3.1.2 Logic Technology Requirements 3.1.3 Logic Potential Solutions 3.2 Memory Technology Requirements and Potential Solutions 3.2.1 DRAM 3.2.2 Non-volatile Memory 3.3 Reliability Technology Requirements and Potential Solutions 3.3.1 Introduction 3.3.2 Reliability Requirements 3.3.3 Reliability Potential Solutions 4.0 CROSS TWG ISSUES 4.1 Modeling and Simulation 4.2 Interconnect WHATS NEW FOR 2011? -- EXAMPLE 2 OF NUMBERED SECTIONS Requirements and Potential Solutions based on each Topic

9. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines9 Difficult Challenges Table Guidelines Near-term 2011-2018 Long-term 2019-2026 TEN Total Challenges ONLY Target the Top 5 most difficult challenges for near-term and the Top 5 most difficult challenges for long-term Difficult Challenges Table Guidelines Near-term 2011-2018 Long-term 2019-2026 TEN Total Challenges ONLY Target the Top 5 most difficult challenges for near-term and the Top 5 most difficult challenges for long-term WHATS NEW FOR 2011? -- DIFFICULT CHALLENGES BASED ON YEARS

10. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines10 TEMPLATE INFORMATION: ITWGS USE THE GOLD EXCEL FILE FOR REVISING YOUR TABLES! CONTACT LINDA WILSON AT mailto:linda.wilson@sematech.org IF NECESSARY.mailto:linda.wilson@sematech.org Timeframe : 20112026 Numbering for Tables, Figures, and Citations are self-consistent within each chapter. Tables and Figures use a prefix for each chapter, e.g., FEP tables start at FEP1; Lithography tables start at LITH1 Technology Requirements Legend Guidelines: Yellow cannot exist in 2011 Red cannot exist in next 3 years (2011, 2012, 2013**) ** An ITWG can have an exception approved through the IRC: Solution NOT known, but does not prevent production manufacturing. WHATS NEW FOR 2011? -- TECHNOLOGY REQUIREMENTS TABLES FROM 2011-2026

11. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines11 WHATS NEW FOR 2011? -- POTENTIAL SOLUTIONS TEMPLATE FROM 2011-2026 GUIDELINES2011-2026 ALL possible solutions are included. The ITRS does NOT pick solutions but instead identifies many potential areas of innovation needed to meet future requirements. Potential solutions should map to Technology Requirements. Example of 2011 Potential Solutions Excel template:

12. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines12 WHATS NEW FOR 2011? -- FOOTNOTES, CITATIONS, AND REFERENCES GUIDELINES FOOTNOTES are NOT cited works, but special notations to text. –Footnotes appear at the bottom of pages and are numbered uniquely to each chapter. CITATIONS are credited sources and must be correctly formatted as part of the draft process or will be rejected. –Citations appear as endnotes at the back of each chapter in the References section and are numbered starting at 1 sequentially and uniquely to each chapter. –NOTE! Sub-section numbering is part of the sequential numbering [so only one number 1 citation per chapter]. Use the IEEE Citation Style Guide –This is a short and simple cheat sheet provided by the ITRS managing editor and is also online at this link: http://www.itrs.net/Links/2009ITRS/IEEE%20Citation%20Style%20Guide.pdf http://www.itrs.net/Links/2009ITRS/IEEE%20Citation%20Style%20Guide.pdf Citations and references or materials uses permissions are the responsibility of the ITWG editors. Proofs of sources must be provided to the managing editor. Check all web links for accuracy GUIDELINES FOOTNOTES are NOT cited works, but special notations to text. –Footnotes appear at the bottom of pages and are numbered uniquely to each chapter. CITATIONS are credited sources and must be correctly formatted as part of the draft process or will be rejected. –Citations appear as endnotes at the back of each chapter in the References section and are numbered starting at 1 sequentially and uniquely to each chapter. –NOTE! Sub-section numbering is part of the sequential numbering [so only one number 1 citation per chapter]. Use the IEEE Citation Style Guide –This is a short and simple cheat sheet provided by the ITRS managing editor and is also online at this link: http://www.itrs.net/Links/2009ITRS/IEEE%20Citation%20Style%20Guide.pdf http://www.itrs.net/Links/2009ITRS/IEEE%20Citation%20Style%20Guide.pdf Citations and references or materials uses permissions are the responsibility of the ITWG editors. Proofs of sources must be provided to the managing editor. Check all web links for accuracy

13. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines13 ITRS WEBSITE www.itrs.net is the public homepagewww.itrs.net http://www.itrs.net/ITWG/home.html is the members-only working group site that requires a username and password.http://www.itrs.net/ITWG/home.html –VERY HELPFUL INFORMATION Meeting information and files, IRC/ITWG team contacts, most recent ITRS chapters as Word files, pointers for ITWG memberships, guidelines for the ITRS process, and MORE...! –ITRS website working group login information is Username = 2010 ITRS, Password = roadmap. (These are case sensitive.) ITRS BASECAMP FORUMS –These various sites are available for each ITWG to use. –Easy to set up for each team! Easy to use for posting, downloading files, uploading files and communicating to all your team! –Administered by the SRC team and ITRS managing editor. –Contacts: Leslie Faiers, leslie.faiers@src.org 919-941-9455leslie.faiers@src.org Linda Wilson, linda.wilson@sematech.orglinda.wilson@sematech.org –https://itrs.basecamphq.com/clientshttps://itrs.basecamphq.com/clients –Please send your teams contact information for each member: Name, Email, and Company to start the process of registration. FUTURE FAB INTERNATIONAL –Each January issue is devoted to only the new 2011 ITRS –All ITWG teams write an article based on their latest work. Deadlines for these ITWG articles are due end of September 2011 to the Future Fab editors. –Details for these articles will be provided by Future Fab editors. ITRS WEBSITE www.itrs.net is the public homepagewww.itrs.net http://www.itrs.net/ITWG/home.html is the members-only working group site that requires a username and password.http://www.itrs.net/ITWG/home.html –VERY HELPFUL INFORMATION Meeting information and files, IRC/ITWG team contacts, most recent ITRS chapters as Word files, pointers for ITWG memberships, guidelines for the ITRS process, and MORE...! –ITRS website working group login information is Username = 2010 ITRS, Password = roadmap. (These are case sensitive.) ITRS BASECAMP FORUMS –These various sites are available for each ITWG to use. –Easy to set up for each team! Easy to use for posting, downloading files, uploading files and communicating to all your team! –Administered by the SRC team and ITRS managing editor. –Contacts: Leslie Faiers, leslie.faiers@src.org 919-941-9455leslie.faiers@src.org Linda Wilson, linda.wilson@sematech.orglinda.wilson@sematech.org –https://itrs.basecamphq.com/clientshttps://itrs.basecamphq.com/clients –Please send your teams contact information for each member: Name, Email, and Company to start the process of registration. FUTURE FAB INTERNATIONAL –Each January issue is devoted to only the new 2011 ITRS –All ITWG teams write an article based on their latest work. Deadlines for these ITWG articles are due end of September 2011 to the Future Fab editors. –Details for these articles will be provided by Future Fab editors. ITRS ON THE INTERNET

14. LINK BACK TO CONTENTS 2011 ITRS Revision Guidelines14 ITRS ASSISTANCE Have Questions…? about the ITRS Process or ITWG Membership 2011 preparation files latest contact information for an ITWG chair or IRC member general meeting information about Forums or login information Need…? to post files to discuss due dates help with Word, Excel, or Powerpoint Linda Wilson Linda.wilson@sematech.org 512-356-3605 Have Questions…? about the ITRS Process or ITWG Membership 2011 preparation files latest contact information for an ITWG chair or IRC member general meeting information about Forums or login information Need…? to post files to discuss due dates help with Word, Excel, or Powerpoint Linda Wilson Linda.wilson@sematech.org 512-356-3605