Nanoscience, Nanotechnology and Nanomanufacturing Exciting new science and technology for the 21st century

Nanotechnology Is a broad, interdisciplinary topic involving physics, chemistry, biology and engineering It has potential impact in electronics, health, energy, materials, and a wide variety of other application areas.

How small are nanostructures? Single Hair Width = 0.1 mm = 100 micrometers = 100,000 nanometers ! 1 nanometer = one billionth (10 -9 ) meter

Smaller still Hair. Red blood cell 6,000 nanometers DNA 3 nanometers

How do we make nanostructures? How do we see nanostructures?

First, how do we make nanostructures? Lithography Self-assembly - physical or chemical

Lithography Mark Tuominen Mark Tuominen Mark Tuominen

Making a microscopic mask Silicon crystal Polymer film Electron Beam Nanoscopic Mask !

Lithography IBM Copper Wiring On a Computer Chip Patterned Several Times

SELF ASSEMBLY Block A Block B 10% A 30% A 50% A 70% A 90% A ~10 nm Ordered Phases PMMA PS Scale set by molecular size Diblock Copolymer

BASIC NANOPOROUS TEMPLATE PROCESS APPLICATIONS Deposition Template Etching Mask Nanoporous Membrane Remove polymer block within cylinders (UV or ebeam exposure; Acetic acid rinse) A versatile, self-assembling, nanoscale lithographic system

SEM IMAGE OF NANOPOROUS POLYMER TEMPLATE Array Period = 24 nm Pore Diameter = 14 nm MW = 42,000 PS/PMMA

NIRT UMass Amherst FUNCTIONAL NANOARRAYS Glass Pillars Patterned Media Copolymer Template Separations & Sensors Template Transfer Nanowires Devices

NANOWIRE ARRAYS using ELECTRODEPOSITION 1.2 trillion wires/in nm 20 nm 100 nm silicon gold electrodeposited cobalt nanowires unfilled polymer template cobalt nanowires ULTRA-HIGH DENSITY MAGNETIC DATA STORAGE

unexposed region of copolymer film patterned nanowire array vertically-oriented diblock copolymer film patterned nanoporous polymer template LATERALLY-PATTERNED MEDIA HOLES NO HOLES

How do we see nanostructures? A light microscope? An electron microscope! A scanning probe microscope!

Television Set eye electron beam TV screen Light ! electron source

Electron Microscope SAMPLE Electron Beam DETECTOR

Scanning probe microscope Surface Vibrating Cantilever

Image of Nickel Atoms

Pushing Atoms Around

The New UMass Nano Center Hierarchical?

Example: google maps Earth -- countries -- states -- cities -- blocks -- houses -- rooms Hierarchical Structures

Examples in Nano: Biological Cell and Computer Chip Hierarchical Structures In nanomanufacturing we are integrating "bottom up" self-assembly with "top down" lithography Hierarchical Manufacturing!