Diode laser-induced fluorescence (LIF)measurements of metastable argon ions in a magnetized inductively coupled plasma （ ICP ）报告人：李长君组员：周涛涛刘皓东李长君吴凯.

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Presentation transcript:

Diode laser-induced fluorescence (LIF)measurements of metastable argon ions in a magnetized inductively coupled plasma （ ICP ）报告人：李长君组员：周涛涛刘皓东李长君吴凯任杰刘沛航

introduction metastable argon ion (in magnetized inductively coupled plasma) LIF velocity distribution functions metastable ion density and temperature construct a model theoretical model for T ion

MICP chamber fluorescence (442.72nm) laser (668.61nm) plasma(generated at 13.56MHz) Pyrex tube stainless steel chamber grounded electrode single-turn antenna bandpass optical filter (1nm bandwidth) PM tubefiber Langmuir probe

Measured metastable ion velocity distribution function

Theoretical model for metastable ion density Metastable ion density vs electron density when rf power changes neutrals ions zero-dimensional rate equation electron-impact excitation coefficient

Electron temperature, electron density, and plasma potential as a function of pressure, rf power, and B ﬁeld.

Comparison between measured metastable ion density and calculated metastable ion density as a function of pressure, power, and B ﬁeld. Both densities are normalized to 1 n i =10 7 ~10 9 cm -3

dc bias effect ion heating sources: electron-ion collisions, the acceleration from spatial potential, and wave-particle interactions.

Theoretical model for ion temperature spatial potential →additional v drift collide with other ions and neutrals transfer energy increase T i and T n charge exchange wiith a neutral convert to neutral kinetic energy T i and T n ← energy balance equation electron collisions the acceleration from spatial potential neutral collisions wall collisions

electrons and ions lose by the neutral collisions wall collisions