SEM microscope By: Doug, Holly & Oleg. Scanning Electron Microscope vs. Optical Microscope Advantages Continuously variable magnification High resolution.

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Presentation transcript:

SEM microscope By: Doug, Holly & Oleg

Scanning Electron Microscope vs. Optical Microscope Advantages Continuously variable magnification High resolution Depth of focus Elemental analysis attachments DisadvantagesCost More knobs Vacuum Sample limitations

Scanning Electron Microscope (simplified drawing) sample tungsten filament (electron source) electrostatic lens (F = qE) accelerating voltage anode electromagnetic lenses (F = q v x B) (condenser lenses) electromagnetic lens (objective lens) & deflector coils (raster scan) e-e- detector (scintillator & PMT) SE

Signal Generation In (Probe) Focused mono-energetic electron beam Out (Signal)  Imaging Backscattered electrons Backscattered electrons Secondary electrons Secondary electrons  Analysis X-rays X-rays Characteristic x-rays Bremsstrahlung x-rays (background “noise”) Auger electrons Auger electrons

Topographic contrast surface same penetration depth shorter exit distance, higher signal longer exit distance, lower signal

SEM general info

SEM General info Mount the sample on the holder “Paint” the conductive path

SEM General info Load the sample into the SEM

SEM general info Vacuum pump 4 minutes Turn on filament current & accelerating voltage Fiddle with the knobs

Sample Prep Quenched from 1700 degF Anneal to 900 degF Furnace cooled from 1700 degF Low C steel High C steel Unknown C steel

High C (optical 600x) High C (SEM 400x) High C (SEM 3000x)

Low C (600x optical) Low C (SEM 400x) Low C (SEM 3000x)

Unknown C (SEM 400x) Unknown (optical 600x) Unknown (SEM 3000x)

Low C vs High C (SEM 200x) Low Carbon Plastic High Carbon

Low C (3000x vs 10000x)