SEM microscope By: Doug, Holly & Oleg
Scanning Electron Microscope vs. Optical Microscope Advantages Continuously variable magnification High resolution Depth of focus Elemental analysis attachments DisadvantagesCost More knobs Vacuum Sample limitations
Scanning Electron Microscope (simplified drawing) sample tungsten filament (electron source) electrostatic lens (F = qE) accelerating voltage anode electromagnetic lenses (F = q v x B) (condenser lenses) electromagnetic lens (objective lens) & deflector coils (raster scan) e-e- detector (scintillator & PMT) SE
Signal Generation In (Probe) Focused mono-energetic electron beam Out (Signal) Imaging Backscattered electrons Backscattered electrons Secondary electrons Secondary electrons Analysis X-rays X-rays Characteristic x-rays Bremsstrahlung x-rays (background “noise”) Auger electrons Auger electrons
Topographic contrast surface same penetration depth shorter exit distance, higher signal longer exit distance, lower signal
SEM general info
SEM General info Mount the sample on the holder “Paint” the conductive path
SEM General info Load the sample into the SEM
SEM general info Vacuum pump 4 minutes Turn on filament current & accelerating voltage Fiddle with the knobs
Sample Prep Quenched from 1700 degF Anneal to 900 degF Furnace cooled from 1700 degF Low C steel High C steel Unknown C steel
High C (optical 600x) High C (SEM 400x) High C (SEM 3000x)
Low C (600x optical) Low C (SEM 400x) Low C (SEM 3000x)
Unknown C (SEM 400x) Unknown (optical 600x) Unknown (SEM 3000x)
Low C vs High C (SEM 200x) Low Carbon Plastic High Carbon
Low C (3000x vs 10000x)