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SEM- Schematic Overview. Electron Detection Tungsten Filament Electron Source.

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Presentation on theme: "SEM- Schematic Overview. Electron Detection Tungsten Filament Electron Source."— Presentation transcript:

1 SEM- Schematic Overview

2 Electron Detection

3 Tungsten Filament Electron Source

4 Filament Emission

5 Field Emission Gun

6 Magnetic Lenses

7 Focusing Optics

8 Effect of Working distance

9 Effect of Condenser Lense

10 Aberations to Minimum Spot Size

11

12 Voltage and Atomic Number Effect on Backscatter Electrons

13 Monte Carlo Simulation and Secondary Electron Generation

14 Electron- Atom Interaction

15 X-ray Emission

16 X-ray Generation

17 Characteristic X-rays Characteristic radiation intensity is proportional to the tube current and the difference between the accelerating voltage and the excitation voltage. n ~ 1.5

18 X-ray Transitions

19 Energy Spectrum for Pure Ni

20 Auger Electron Spectroscopy

21 Energy Versus Penetration

22

23 SEM Operational Components

24 Line Scan Process

25 Pixel Element and Sample area Scanned

26

27 Effect of Working Distance and Aperture on Depth of Focus ( in  m)

28

29 Electron Detector and Electron Sources

30

31 Non Dispersive X-ray Detection

32 Non Dispersive Detector

33 Multichannel Analyzer

34 Super Alloy X-ray Spectrum

35 Peak Broadening Due to Resolution of Si Detector

36 X-ray Energies 1-10 KeV

37 Mid Energy K and L Spectra

38 Bi M and Cu Spectra

39 Common Interfering X-ray Lines

40 EDS Spectra of Glass

41 Wavelength Dispersive X-ray Detector

42

43

44 X-ray Detection Gas Proportional CounterSingle Channel Pulse Height Detector

45 Detector Output

46 Wavelength Dispersive Spectra

47 Comparison of EDS and WDS

48 EDS Spectra of Glass

49 WDS Spectra of High Z Glass

50

51 Corrections to Measured X-ray Spectra

52 X-ray Generation with Depth  (  z)

53 Absorption of X-rays Through Specimen

54 Effect of Absorption on  (  z)


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