Academic Advisor: Dr. Dave Turcic Team Members: Ron Pahle Khoa T. Tran Duc M. Le Thanh Q. Nguyen Shafi Alhajri Sponsoring Company: Edwards Vacuum Ltd. Contact Engineers: Mark Romeo Bree Edwards

 Project Background  Mission Statement  Project Plan  Customer Identification  PDS Requirements  House of Quality  Risk Mitigation  Questions

 Edwards Vacuum Ltd. is contracted by Intel Corporation to provide pumps designed for atmospheric control in sensitive microchip fabrication processes.  These manufacturing processes have a strict tolerance in the range of the nano- scale.

 There is evidence that Edward’s Vacuum pumps are a cause of unwanted vibrations, and could effect the manufacturing tools used in Intel’s microchip fabrication processes.  Edwards has a current vibration isolation plan implemented, but would like to pursue an improved product to stay at the top of the vacuum pump supply industry.

 Derive a solution to minimize the vibration propagated from the pump system, through the steel frame and to the surrounding workplace.  This solution will consist of a working prototype, supporting data, detailed drawings and a final report.

 Access to Intel Corporation’s manufacturing facility is not available. This requires that the solution derived be tested and applied at Edward’s facility.  The solution will then be applied to new systems and tested and improved by Edward’s Engineers.

Highlights of our Gantt Chart.  PDS Document- 2/9  Research- 2/21  Diagnostic Testing- 3/1  Concept Evaluation- 3/13  Detail Design- 4/10  Prototyping and Testing- 5/1  Finalized Solution- 5/22  Design Reviews- 2/21, 3/13, 5/22

 External Customers Primary- Edwards Vacuum Ltd. Secondary- Intel Corporations  Internal Customers Portland State University Faculty Capstone Courses ME 491/492/493

High Priority Requirements  Vibration Reduction- 25% (Edwards)  Clean Room Compatible (Intel)  Power Consumption- 0 Watts (Edwards)  Timeline- 5/22 (Edwards/PSU) Medium Priority Requirements  Cost- <1000$/Pump (Edwards)  Size- Must fit within frame (Intel)  Ease of Use- Totally Passive (Edwards)

 No current solution to compare to.

 Attempting to reduce the risk in the following categories