Probestation 1: 6“ (200mm * 300mm + 360° rotation + 15mm Z) QTC Instruments: HP4274A (LCR), K6517 (electrometer), HP6614C (voltage supply), K595 (quasistatic.

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Presentation transcript:

Probestation 1: 6“ (200mm * 300mm + 360° rotation + 15mm Z) QTC Instruments: HP4274A (LCR), K6517 (electrometer), HP6614C (voltage supply), K595 (quasistatic CVmeter) Status: Operational (used to measure Hamamatsu) Software (user friendly and some error protections) Probestation 2: 6“ (200mm * 100mm + 15mm Z) IQC Instruments: LCR, electrometer, voltage supply Status: Operational Misc: Homemade relay system (17 channels each) Optical Inspction: Zeiss CMM (500*500*500) Res.: 1  m (Z~5  m) Hardware setup

Chuck

Probestation

Error estimation 1000 measurement runs on one strip (ST teststructure) ParameterMean  MinMax Rpoly (M  ) 1,0640, Leakage current (pA) 62,12,259,064,0 Coupling capacitance (pF) 108,30,78106,13108,57

Software – Front panel Testing time ~ 2h

Probing marks Hamamatsu Karlsruhe

Pick up tool

Packaging (Hamamatsu) Sensor Teststructures Sandwich packaging in envelope Bad to handle Optical inspection  HANDLING  against specification Takes time Air cusion effect while placing  gliding

Packaging 2 (ST) Optical inspection  very good Easy to take out All 4 TS available

Optical survey and dimensional measurements

Check Sheet:

Pictures 25  m

More pictures Scratchpad used RpolyAdd DC pad 3 AC pads

Electrical characterization of sensors Rpoly with 10VRpoly with 2V Changes in measurement with respect to specs

Electrical characterization of sensors Summary

Electrical characterization of sensors CV & IV

Electrical characterization of sensors Rpoly

Electrical characterization of sensors coupling capacitance

Electrical characterization of sensors leakage current

Comparison of our test results with industry results (based on 5 sensor of 8 ) IV even lower than company measurement CV perfect agreement Some Rpoly higher than company measurement (but company only measured 1 per batch or even TS only) No single strip fault (agreement) (neglect Rpoly)

Relevant problems Nothing Serious V depletion not calculated Improvements: Automatic web publishing (ready 50%) Implement Pattern recognition

Optical survey of ST prototype Pinhole or bad coupling capacity No strange electrical behavior

Optical survey of ST prototype 2 Z (  m) Bowl shape! Asymmetric cut! Global size OK!

Pads

Electrical Survey Very high total leakage current Depletion voltage fine One region (7 strip) with a very high leakage current Some coupling capacitors out of specs