The Saguaro from MGI, USA The Sonora Series MGI, USA Automated Batch Wafer Handling 1203 West Geneva Drive Tempe, Arizona USA Tel:

SONORA SERIES SOLAR CELL SONORA SERIES SOLAR CELL 3 Stage Back-to-Back Same Slot or Back-to-Back Proximity Transfer 4 Plastic Cassettes (4 X 50) into a 100 Slot Quartz Carrier ( ” -4.76mm Pitch).

3 Stage High-Density 3 Stage High-Density Single Slot Low Density or Single Slot High Density 25, 50, 100, 200, 250, 300, 350, OR 400 Solar cell capacity Conventional and Contiguous 125 mm, 156 mm, 125 & 156 mm

Sonora Vacuum Series

Key System Features Typical WPH Two plastic cassettes into a 100-slot process carrier ≧ 3000 WAFER PER HOUR Four plastic cassettes into a 200-slot process carrier ≧ 3600 WAFER PER HOUR Versatile system accommodates a wide range of wafer thickness and wafer sizes. Wafers: 125 mm X 125 mm or 156 mm X 156 mm (rectangular or pseudosquare). Easy to change platforms to accommodate different cassettes. Options include: Safety Light Curtain Multi colored light tower with audible alarm Serial Communications Parallel Communications Ports Networking capabilities UPS – uninterruptible power supply Warranty = 1 Year Facility Requirements Facility Requirements Dimensions: 3-Stage - Four Plastic Cassettes, One 200-slot Process Carrier ” (W) X 35 ” (D) X 98 ” (H) cm (W) X 89 cm (D) X 249 cm (H) Weight: 275 lbs, 125 kg System Power: USA 110Vac ±10%, 50/60Hz, 4 amps, single phase Europe / Asia Vac ±10%, 50/60Hz, 2 amps, single phase Compressed Air PSI, Kpa Temperature - 5 º C (41 º F) to 40 º C (140 º F) Humidity - 10% to 90% non-condensing Classification - ≧ Class 10 clean room Automated batch wafer handling systems use the most current effective method for moving Solar Cell wafers from transport or wet process cassettes to process Quartz / Silicon Carbide carriers. This system is designed to provide high throughput yet maintaining high yields. The Sonora SVAC systems are configured to batch transfer 25, 50 or 100 wafers at a time. This system can accommodate 125 mm X 125 mm and 156 mm X 156 mm wafers with little or no tooling change.