1 POLYGENERATION OF ELECTRICITY, HEAT and ULTRA PURE WATER for SEMICONDUCTOR INDUSTRY Chuanfeng Liu Supervisors: Andrew Martin EGI KTH Aapo Sääsk Xzero AB Henrik Dolfe Xzero AB Heat and Power Technology, Stockholm, Sweden

2 Content Heat and Power Technology, Stockholm, Sweden 1.Objectives of thesis 2.Current UPW system in semiconductor industry 3.Principle of air gap membrane distillation 4.Xzero test facility of Air Gap Membrane Distillation 5.Integrated MD in cogeneration cycle 6.Conclusion

3 Objectives Integrate MD technology into traditional heat and power cogeneration cycle to produce UPW for semiconductor industry Theoretical study of membrane distillation Experimental study of air gap membrane distillation Economic analysis

4 UPW Consumption in Semiconductor Industry Heat and Power Technology, Stockholm, Sweden 50% of total UPW market worldwide. More than 6000 liters UPW for one eight-inch wafer million liters UPW per day The cost of a UPW system in a fab is more than $10 million.

5 Present UPW Production System Heat and Power Technology, Stockholm, Sweden Reverse osmosis (RO) and Electro-deionization (EDI) KWH per cubic meter UPW 2-3MW-- 6% of total fab energy consumption

6 Make-up Section Raw Water Tank Multi Media Filter Carbon Filter Heat Exchanger Cartridge Filter Reverse Osmosis and EDI Break Tank with Nitrogen Blanket Degas Primary Mixed Bed Exchange UV System Cartridge Filter Reject To Polishing Loop Section

7 UPW Polishing Loop Section UPW Water Tank With nitrogen blanket TOC UV Heat Exchanger Polishing Mixed Bed Ion Exchange Germicidal UV Cartridge Filter Ultra Filter Fab Tool Use UPW return line Drains & Rinse From Make up section

8 Principle of Membrane Distillation Membrane Hot Side Cold side

9 Advantages of MD Heat and Power Technology, Stockholm, Sweden 100% (theoretical) rejection of non-volatile matters lower operating temperatures lower operating pressure reduced chemical interaction reduced vapor spaces compared distillation processes

10 Flow Diagram Of Xzero Test Facility

11 Computer Simulation of Membrane Distillation Module emplyed in Aspen Utilites

12 Integrated Cogeneration of MD in the Semiconductor Industry The power requirement of one typical semiconductor fabrication plant is equal to what 7500 single-family homes consume. The average power consumption for the fab is 2.18 KW/m 2, and the average cooling load is 1.53 KW/m 2.

13 Combined Heat Recovery Chiller With MD Units Waste Heat From Fab

14 Combined MD With Waste Heat From Fab Total MW Air conditioner system 4-5MW Condenser side 12 MW 20,000 l/hour possible with readily available waste heat sources About 1/3 of fab UPW requirement

15 Integrated MD With Power Production 36 Mw ei (fab electricity demand covered ) 48,000 L/hr (2/3 UPW demand)

16 Conclusion Polygeneration is promising in semiconductor industry. With CHP and waste heat utilization, up to 65 m 3 /hr UPW possible for a fab with 5000 wafers production per week. Capital cost is around $3 per cubic meter UPW.