Maximal Permissible Error on the positioning: MPEE [µm] = 0.3 + L/1000 100mm 1250mm Seismic sensor Wire going through the BPM and the magnet 700mm BPM Magnet Nano-positioning system Stretcher Manual pre-alignment system CMM granite table Maximal Permissible Error on the positioning: MPEE [µm] = 0.3 + L/1000

Air bearings Lock Scale reader Motor Sensor Lock command Stator Rotor Aim: If the measurements were performed on a perfect cylinder with a diameter of 0.1 mm, the form error measured by the sensor should be smaller than 0.1 µm. NB: Smallest measurement uncertainty linked to the circularity measurement of a gage (METAS): 10 nm

Allowing high repositioning accuracy Sensor (next slide) Air bearings: Vibrations The rotor + stator Motion error < 0.1 µm Thickness Scale & readers Allowing high repositioning accuracy Sensor (next slide) Precitec sensor Micro-Epsilon sensor White light interferometre Motor Must not generate too much heat nor vibrations Must stand strong magnetic fields Lock: mechanical re-positioning using the elasticity: which size for the aperture? Total system Weight < 1.2 Kg (might be possible to increase to 3) Communication: synchronization of the data from the sensor with the CMM Possibility of air supply Possibility of energy supply Optical fiber Electricity for the motor Clamping system adapted to the CMM Air bearings Lock Scale reader Motor Sensor Lock command Stator Rotor Possibility of measuring from 100 µm up to 250 µm features (wires) Possibility to measure vertical wire?!

Micro-Epsilon sensors Spot sizes: 6 µm or 9 µm Resolution (claimed): 10 nm or 16 nm Precitec white light sensor Spot size: 3.5 µm Resolution (claimed): 3 nm 66 mm * φ 8mm, 36 g White light interferometric sensor I do not know more about it

Z Function Analysis System Technique: FAST diagram X Y Why? How? Technical solutions

Air bearings : 12x24 mm size 47,7N load 5 µm gap 323 € The error motion is a function of the bearing surface