1. by Meint de Boer Technology Support Training

3. Index Equipment Database Path of life of a Nanolab cleanroom user Process Document Process flow database Steps to be followed

4. The database is your guide for: General information of equipment Process Information (e.g. allowed materials) Manuals Available materials & processes (recipes) Equipment Database

6. 1.Idea (experiment, device) 2.Design description 3.Selection of materials 4.Selection of processes 5.Selection of apparatus 6.Writing Process document 7.Fabrication in the NL-cleanroom Path of life of a NanoLab cleanroom user

7. Process Document A process document is a working method to compile all the information needed for the fabrication of a device or experiment. A process flow is part of the process document, allowing the user to work succesfully and efficiently in the NanoLab.

8. Advantages of using a Process Document To work with reliable (standard) technology. To prevent contamination of equipment. To prevent damage of equipment. To work safe. To save money (e.g. limited project budget).

9. How to write a process document Download the template from the process flow database and follow the instructions given in the process document form. For design issues and technology questions, contact Meint de Boer

10. Process Document-Template

11. Process Flow Database The database contains a range of standard procedures NL- users need to take note of and comply with in order to work in the cleanroom of the NanoLab. The standard procedures in the database are a result of various demands in our multi-user facility and allow NL-users to perform reliable processing of devices as well as to carry out experimental research.

12. Process Flow Database NL-users have to use the composer of the database to construct process flows that contain information about the standard procedures. Part of the standard procedures focusses on cleaning in order to prevent cross-contamination of equipment. Feedback on missing procedures and input of new processing developments from NL-users is very important in order to keep the database up-to-date and can be sent to Meint de BoerMeint de Boer

14. Important notes Each process flow has to be checked by the NL-staff in terms of compatibility to the processes and equipment in the cleanroom of the NanoLab, reliability and cross-contamination. This is especially important for process flows that have been developed for the old cleanroom of the MESA + institute or for any external cleanroom.

15. Important notes In case you want to introduce a new material or non-listed material in the database into the cleanroom, contact Meint de Boer (process advice), Christiaan Bruinink (quality control), Peter Linders (safety) and the administrator of the equipment. New chemicals or non-listed chemicals in the database, contact Peter Linders (safety), administrator of the equipment.

16. Steps to be followed You need an account for the process flow database Make appointments for: 1. Intro process document-process flow 2. Discussion/advice design-process flow 3. Final check process flow Contact: Meint de Boer (m.j.deboer@utwente.nl)m.j.deboer@utwente.nl