1. Midterm Project 授課老師：劉承賢 老師 Student : G923795 蘇家興

2. Abstract Piezoresistive Effect Design of Piezoresistive Pressure Sensor Parameters of Commercial Product

3. Piezoresistive Effect Variation of resistance caused by stress (1) Piezoresistance matrix for (1 0 0) crystal (2)

4. Piezoresistive Effect Change in resistance (3) (for diffused resistors with longitudinal stress and transverse stress) Piezoresistive Coefficient (4)

5. Piezoresistive Effect From the equation (2)(3)(4), the resistance equation(5) of piezoresistor

6. Design of Piezoresistive Pressure Sensor Piezoresisitive Sensor Bulk Piezoresistive Sensor Commercially useful Surface Mounted Piezoresistive Sensor Experimental

7. Design of Piezoresistive Pressure Sensor

8. Bulk Piezoresistive Pressure Sensor A thin monocrystaline silicon membrane Silicon diaphragm Substrate Elastic material

9. Design of Piezoresistive Pressure Sensor

12. Differential Voltage Output of Pressure Sensor (6) Sensitivity of pressure sensor (7)

13. Design of Piezoresistive Pressure Sensor Operation Parameters of Pressure sensor

14. Design of Piezoresistive Pressure Sensor Parameters of Membrane Parameter Size of the membrane 1500*1500*100 um (L*W*H) Size of the piezoresistor350*5*1 um Spacing between the piezoresistor and the silicon edge 50 um

15. Parameters of Commercial Product

16. 1kPa=0.145Psi

17. Parameters of Commercial Product

18. Reference Ranjit Singh, Low Lee Ngo, Ho Soon Seng, Frederick Neo Chwee Mok. A Silicon Piezoresistive Pressure Sensor.IEEE(2002). William P. Eaton, James H. Smith, David J. Monk, Gary O’Brien, and Todd F. Miller. Comparison of Bulk- and Surface- Micromachined Pressure Sensors. Micromachined Devices and Components, Proc SPIE, Vol 3514, p. 431.

19. Reference Motorola Semiconductors H.K. Ltd.; Silicon Harbour Center, No. 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. http://www.allsensors.com http://www.amsys.info

20. Thank You