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WIRE BOND PROCESS INTRODUCTION
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CONTENTS ASSEMBLY FLOW OF PLASTIC IC Wire Bond 原理 M/C Introduction
Wire Bond Process Material SPEC Calculator DEFECT
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封裝簡介 金線 Gold Wire 晶片Die 導線架 Lead fram
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封裝流程 Wafer Saw Die Bonding toaster Wire Bonding Die Surface Coating
Wafer Grinding Wafer Saw Die Bonding toaster Wire Bonding Die Surface Coating Molding Laser Mark Solder Ball Placement BGA Singulation Solder Plating Dejunk TRIM SURFACE MOUNTPKG Dejunk TRIM Packing THROUGH HOLE PKG Solder Plating TRIM/ FORMING
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Wire Bond 原理 Gold wire Wedge Bond ( 2nd Bond ) Ball Bond ( 1st Bond )
pad lead
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B.PRINCIPLE PRESSURE VIBRATION AL2O3 MOISTURE CONTAMINATION GOLD BALL
GLASS Al SiO2 Si
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銲接條件 HARD WELDING Pressure (Force) Amplify & Frequecy
Welding Time (Bond Time) Welding Tempature (Heater) THERMAL BONING Thermal Compressure Ultrasonic Energy (Power)
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Bond Head ASSY Low impact force Real time Bonding Force monitoring
High resolution z-axis position with 2.5 micron per step resolution Fast contact detection Suppressed Force vibration Fast Force response Fast response voice coil wire clamp
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X Y Table Linear 3 phase AC Servo motor
High power AC Current Amplifier DSP based control platform High X-Y positioning accuracy of +/- 1 mm Resolution of 0.2 mm
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W/H ASSY changeover · Fully programmable indexer & tracks
· Motorized window clamp with soft close feature · Output indexer with leadframe jam protection feature Tool less conversion window clamps and top plate enables fast device
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MACHINE SPECIFICATIONS (I)
Eagle Bonding System Bonding Method Thermosonic (TS) BQM Mode Constant Current, Voltage, Power and Normal (Programmable) Loop Type Normal, Low, Square & J XY Resolution 0.2 um Z Resolution (capillary travelling motion)2.5 um Fine Pitch Capability 35 mm 0.6 mil wire No. of Bonding Wires up to 1000 Program Storage 1000 programs on Hard Disk Multimode Transducer System Programmable profile, control and vibration modes MACHINE SPECIFICATIONS (I)
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MACHINE SPECIFICATIONS (II)
Eagle MACHINE SPECIFICATIONS (II) Vision System Pattern Recognition Time 70 ms / point Pattern Recognition Accuracy um Lead Locator Detection 12 ms / lead (3 leads/frame) Lead Locator Accuracy um Post Bond Inspection First Bond, Second Bond Wire Tracing Max. Die Level Different 400 – 500 um Facilities Voltage 110 VAC (optional 100/120/200/210/ 220/230/240 VAC
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MACHINE SPECIFICATIONS (III)
Eagle MACHINE SPECIFICATIONS (III) Material Handling System Indexing Speed 200 – “ pitch Indexer Resolution 1um Leadframe Position Accuracy + 2 mil Applicable Leadframe W = 17 – 75 bonding area in Y = 65mm = 17 – 90 bonding area in Y = 54mm L = 280 mm [Maximum] T = – 0.8 mm Applicable Magazine W = 100 mm (Maximum) L = 140 – 300 mm H = 180 mm (Maximum) Magazine Pitch 2.4 – 10 mm (0.09” – 0.39 “) Device Changeover < 4 minutes Package Changeover < 5 minutes Number of Buffer Magazine 3 (max. 435 mm)
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Bonding Process
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The Wire Bond Temp PREHEAT BONDSITE CU L/F200+/-10 200+/-10
AL L/F210+/ /-10 BGA / /-10 TFBGA150+/ /-10 LBGA / /-10 NOT INCLUDE DEDICATE LINE
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Free air ball is captured in the chamfer
pad lead
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Free air ball is captured in the chamfer
SEARCH HEIGHT pad lead
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Free air ball is captured in the chamfer
SEARCH SPEED1 pad SEARCH TOL 1 lead
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Free air ball is captured in the chamfer
SEARCH SPEED1 pad SEARCH TOL 1 lead
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Free air ball is captured in the chamfer
SEARCH SPEED1 SEARCH TOL 1 pad lead
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Free air ball is captured in the chamfer
SEARCH SPEED1 SEARCH TOL 1 pad lead
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Free air ball is captured in the chamfer
SEARCH SPEED1 SEARCH TOL 1 pad lead
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Formation of a first bond
SEARCH SPEED1 SEARCH TOL 1 pad lead
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Formation of a first bond
IMPACT FORCE SEARCH SPEED1 SEARCH TOL 1 pad lead
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Formation of a first bond Contact
PRESSURE Ultra Sonic Vibration pad heat lead
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Formation of a first bond Base
PRESSURE Ultra Sonic Vibration pad heat lead
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Capillary rises to loop height position
pad lead
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Capillary rises to loop height position
pad lead
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Capillary rises to loop height position
pad lead
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Capillary rises to loop height position
pad lead
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Capillary rises to loop height position
pad lead
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Capillary rises to loop height position
RH pad lead
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Formation of a loop RD (Reverse Distance) pad lead
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Formation of a loop pad lead
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pad lead
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WIRE CLAMP ‘CLOSE’ Calculated Wire Length pad lead
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Calculated Wire Length pad lead
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SEARCH DELAY pad lead
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TRAJECTORY pad lead
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TRAJECTORY pad lead
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TRAJECTORY pad lead
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TRAJECTORY pad lead
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TRAJECTORY pad lead
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TRAJECTORY pad lead
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TRAJECTORY pad lead
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TRAJECTORY pad lead
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TRAJECTORY pad lead
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TRAJECTORY pad lead
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2nd Search Height Search Speed 2 Search Tol 2 pad lead
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Search Speed 2 Search Tol 2 pad lead
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Search Speed 2 Search Tol 2 pad lead
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Formation of a second bond
pad heat lead
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Formation of a second bond Contact
pad heat heat lead
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Formation of a second bond Base
pad heat heat lead
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pad lead
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pad lead
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pad lead
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Tail length pad lead
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pad lead
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pad lead
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Disconnection of the tail
pad lead
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Disconnection of the tail
pad lead
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Formation of a new free air ball
pad lead
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Material Leadfram Capillary Gold Wire
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Leadfram (I)
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Leadfram ( II )
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CAPILLARY (I) Capillary Manufacturer (SPT, GAISER, PECO, TOTO…)
Capillary Data ( Tip , Hole , CD , FA&OR , IC )
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CAPILLARY (II)
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How To Design Your Capillary
CAPILLARY (III) How To Design Your Capillary TIP ..…… Pad Pitch Pad pitch x 1.3 ~ TIP Hole ..…. .Wire Diameter Wire diameter + 0.3~0.5 = H CD………Pad size/open/1st Ball CD ~ 0.6 = 1st Bond Ball size FA & OR….Pad pitch(um) FA > ,4 ~90/ ,8,11 < ,15 IC type …… loop type
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Gold Wire Gold Wire Manufacturer (Nippon , SUMTOMO , TANAKA…. )
Gold Wire Data ( Wire Diameter , Type , )
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SPEC Pad Open & Bond Pad Pitch Ball Size Ball Thickness Loop height
Wire Pull Ball short Crater Test
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BPO&BPP 單位: um or Mil BPO :是指Pad內層X方向及Y方向的size,一般是取最小值為 我們的data
BPO :是指Pad如左邊內層至右邊Pad左邊外層邊緣其它依此類推;或著一個Die上出現不同Pad大小那就是以兩個Pad中心距離為BPP,但是一般我們要取一個Die上最小的BPP Bond Pad Pitch Bond Pad Open Bond Pad Open
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Ball Size & Ball Thickness
單位: um,Mil 量測倍率: 50X Ball Thickness 計算公式 60 um BPP ≧ 1/2 WD=50% 60 um BPP ≦ 1/2 WD=40%~50% Ball Size Ball Thickness Ball Size
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Loop Heigh 單位: um,Mil 量測倍率: 20X Loop Height 線長
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Wire Pull 1 Lifted Bond (Rejected)
2 Break at neck (Refer wire-pull spec) 3 Break at wire ( Refer wire-pull spec) 4 Break at stitch (Refer stitch-pull spec) 5 Lifted weld (Rejected)
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Ball Short 單位: gram or g/mil² Ball Shear 計算公式
Intermetallic(IMC)有75%的共晶,SHEAR STRENGTH 標準為>6.0g/mil²。 SHEAR STRENGTH=Ball Shear/Area (g/mil²) Ball Shear = x; Ball Size = y; Area = π(y/2) ² x/π(y/2) ² = z g/mil²
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Shear Failure Modes 12 12 (A) Unsheared
(D) Ball bond-bonding pad interface separation (typical Au to Al) Wire Full ball attached to wire-except for regions of intermetallic voiding Bond shoulder Shearing ram Ball separated at bonding pad- Ball interface-residual intermetallic (and sometimes portion of unalloyed ball and metal) on pad in bond interaction area Interfacial contact ball bond weld area Ball bond Bonding pad C C h Ball bond L C C L Bonding pad Test specimen Test specimen Specimen clamp Specimen clamp (B) Wire (ball top and/or side) shear (E) Bond pad lifts Shearing ram Wire Residual pad on ball ball-pad interface remains intact Minor fragment of ball attached to wire Interfacial contact ball bond weld area Ball sheared too high (off line, etc.)only a portion of shoulder and ball top removed Pad metallization separates from underlying surface Ball bond C C C Bonding pad C L L Bonding pad Test specimen Test specimen Specimen clamp Specimen clamp (C) Below center line shear, ball sheared through (typically Au to Au) (F) Cratering Shearing ram Residual pad and substrate attached to ball,ball-pad interface remains intact Major portion of ball attached to wire Bonding pad lifts, taking portion of underlying substrate material with it Ball bond Interfacial contact- ball bond weld area intact C C Ball bond L C C L Bonding pad Bonding pad Test specimen Test specimen Specimen clamp Specimen clamp 12 12
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Crater Test
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Calculate (I) (Total Actual Production Times – Total Repair Time )
UP Time = Total Actual Production Time Total Repair Time DOWN TIME RATE= Total Actual Production Times Total Operator Actual Repair Time MTTS (MEAN TIME TO STOP ) = Total Operator Repair Frequency Stoppages Total Actual Production Times – Total Operator Repair Time MTBS (MEAN TIME BETWEEN STOP)= Total Operator Repair Frequency Stoppages Total Technical Actual Repair Times MTTA (MEAN TIME TO ASSISTANCE ) = Total Technical Repair Frequency Stoppages
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Calculate (II) Total Actual Production Times – Total Technican Repair Times MTBA (Mean Time Between Assistance) = Total Technical Repair Frequency Stoppages Total Actual Production Times – Total Technician Repair Time MTBF(Mean Time Between Failure)= Total Change Parts Repair Frequency Stoppage 規格寬度 規格上限 - 規格下限 CP ( 製程能力指標) = = 製程寬度 6 σ( 公差) (上限 or 下限 ) - 平均值 CPK = 三個公差
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Quality 正常品 Material Problem 1st Bond issue
(Peeling , Ball Lift , Off Center) 2nd Bond issue (滑針,縫點脫,short tail ) Looping Fail (wire snake wire,sweep wire loop base bent )
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正常品
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Material Problem
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Bonding Ball Inspection
Ball Detection With Ball Wire Pad Size Missing Ball Wire Broken
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Bonding Ball Inspection (cont.)
Ball Measurement Pad Center Ball Center Ball Size Ball Placement (X,Y) Ball Off Pad
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1st Bond Fail ( I ) Peeling
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1st Bond Fail (II) Ball Lift Ball Lift
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1st Bond Fail ( III ) Neck Crack
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1st Bond Fail (IV) Off Center Ball Off Center
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1st Bond Fail (V) Smash Ball Smash Ball
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Bonding Weld Inspection
Weld Detection Lead With Weld Wire Capillary Mark Missing Weld Wire Broken
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2nd Bond Fail ( I ) 滑針
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2nd Bond Fail ( II ) 縫點脫落 縫點脫落
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Looping Fail(Wire Short I)
Wire Sweep Wire Short
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Looping Fail(Wire Short II)
Loop Base Bend Wire Short
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Looping Fail(Wire Short III)
Excessive Loop Wire Short
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THE END
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