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Silicon makes up 25.7% of the Earth's crust. Most of it is in the form of silicon dioxide, also known as silica: Sand, amethyst, agate, quartz, rock crystal,

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Presentation on theme: "Silicon makes up 25.7% of the Earth's crust. Most of it is in the form of silicon dioxide, also known as silica: Sand, amethyst, agate, quartz, rock crystal,"— Presentation transcript:

1 Silicon makes up 25.7% of the Earth's crust. Most of it is in the form of silicon dioxide, also known as silica: Sand, amethyst, agate, quartz, rock crystal, chalcedony, flint, jasper, and opal Diamond cubic crystal structure.

2 Czochralski single-crystal growth process Bridgman-Stockbarger technique

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4 less than 10 -4 Torr ~ 10 -11 Torr 3. W.T. Tsang, “From Chemical Vapor Epitaxy to Chemical Beam Epitaxy”. J. Cryst. Growth. 95, 121 (1989)

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7 Silicon band gap energy at 300 K = 1.12 eV = 1107nm

8 Phonon (lattice) scattering. Angle between and planes is 54.7 degree plane

9 Silicon band gap energy at 300 K = 1.12 eV = 1107nm

10 Russell Ohl in 1939, discovered the PN barrier and is generally recognized for patenting the modern solar cell (US Patent 2402662, "Light sensitive device"). p side is higher doped. Donors: group V Phosphorus (P) Arsenic (As) Acceptors: group III Boron (B) Aluminium (Al)

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12 Dose and energy requirements of major ion implantation applications (species shown roughly in order of decreasing usage). D=D0*exp(-E A /kT) ElementD [cm 2 /s] (RT)D [cm 2 /s] (1.3kK) B1.08197E-611.17661E-13

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