1. Welcome to Nanofabrication Laboratory at MC2
Clean Room Introduction and safety course

2. Clean Room Introduction and safety course
MC2 cleanroom facility
Cleanroom design and layout
11.15 Administrative guidelines
Cleanroom behaviour
DVD-Cleanroom behaviour (15 min)
Cleanroom access
LIMS
Process tools/driving license
Working hours/lab buddy/ visitors
12:00 Lunch break
13:15 Work Environment and Safety gear
Risks with chemicals (Kaija Matikainen)
Categories of chemicals (acids, bases, solvents, photochemicals)
Handling of chemical waste (Svante Pålsson)
14:15 Safety first
Safety policy at MC2 and Chalmers
DVD- Cleanroom safety (25 min)
Alarm systems
15:30 Lab tour (Ulf Södervall)
Clean Room Introduction and safety course

3. Clean Room Introduction and safety course
MC2 Building
Inauguration: Year 2000
Measurements Lab- & Office Area: m2
Cleanroom operation starts: Year 2001
Process Lab Area: m2
Cleanroom Class:
Investment: M€
Clean Room Introduction and safety course

4. Clean Room Introduction and safety course
The Aim of this course;
To inform about the regulations and rules regarding safety and work environment associated with work in the MC2 Nanofabrication laboratories.
Safety declaration
Safety regulations, procedures and
potential dangers
14:50 reak
Clean Room Introduction and safety course

5. Clean Room Introduction and safety course
The Aim of this course;
Anyone who violates the safety
regulations,
or in any way
Exposes himself/herself or others to
danger
Will be denied accesss to the
laboratory by the decision of the
executive management
Clean Room Introduction and safety course

6. Registration document & Questionnaire
Clean Room Introduction and safety course

7. Clean Room Introduction and safety course

8. Working in a Cleanroom environment
Sources of contamination
Cleanroom garments
Cleanroom behaviour
Training in the gowning procedure
Clean Room Introduction and safety course

9. MC2 NanoFabrication laboratory
Cleanrooms often found in processing industry
electronics, pharmaceutical, biopharmaceutical, medical device industries, food and critical manufacturing environments (semiconductor, biology) and hospitals.
The only way to control contamination is to control the total environment. Air flow rates and direction, pressurization Temperature Humidity and specialized filtration
Clean Room Introduction and safety course

10. MC2 NanoFabrication laboratory
A cleanroom is laboratory with a controlled environment, where products are manufactured. A room in which the concentration of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation and retention of particles inside the room and in which the other relevant parameters e.g. temperature, humidity and pressure are controlled as neccessary (ISO )
Typical office building contains ca 1 million particles/foot3. The Federal standard 209E (ISO 14644) is a document that establishes standard classes of air cleanliness for airborne particulate levels in cleanrooms
Clean Room Introduction and safety course

11. Origin of contamination
Personal 35%
Process equipment 25%
Process 20%
Chemicals 20%
Clean Room Introduction and safety course

12. Clean Room Introduction and safety course

13. Classification of particle sizes
Clean Room Introduction and safety course

14. The cleanroom garments
Filtering function
Low penetration for particles>0,3my.The garments should be worn properly sealed
Wear resistant
Strong material, wear, laundry resistant
ESD (Electro Static Discharge) safe
Conductive fibres in the hood, cleanroom suit and boots including the sole
Comfort
Breathing material and comfortable fit
Size
Choose the correct size. Too tight garments cause friction and increase particle generation. Too large garments may cause the ”air balloon effect” resulting in excessive release of particles
Clean Room Introduction and safety course

15. Clean Room Introduction and safety course
Contamination from personal
particles of >0,5 my diam. generated/minute from the human body
Action Ordinary clothes Clean room clothes
Sitting 500, ,000
Standing up 2,500, ,000
Walking slowly 5,000, ,000
Running 10,000, ,000
Clean Room Introduction and safety course

16. Clean Room Introduction and safety course

17. Clean Room Introduction and safety course
Cleanroom areas in the Nanofabrication laboratory
Processlab 1 (cleanroom- class 100/10)
Processlab 2: (”The training lab”- class 1,000)
MBE-lab (class 10,000)
Dicing and CMP room (class 100,000)
Chemical preparation room ( class 1,000)
Visitors corridor, (class 10,000)
air-locks and gowning rooms (class 100,000)
Other areas:
Media basement (below process lab 1)
Machine hall;Fans, pressurised air, central vacuum,CVC,Water purification
pump service and UHV preparation room
Media attic(above process lab 1, 2)
Scrubber room
Steamer room
House E: House gases, Nitrogen purifier, Neutralisation plant, waste tanks, Emergancy power facility
House G: Special gases
Clean Room Introduction and safety course

18. Clean Room Introduction and safety course
”Fan tower”
HEPA filter
Plenum
Media basement
MC2 Cleanroom ventilation system, PL1
Clean Room Introduction and safety course

19. Technical Data; Process laboratory 1
m3/h of air is circulated (c:a 500 HEPA)
90% of the air is recirculated, 10% is evacuated
Temperature= 21 C +/- 1 C
Relative humidity=43% +/- 5%
Air Velocity= 0.4 m/s
Noise level specification=53 dB
Vibration level=BBN-E
Clean Room Introduction and safety course

20. Cleanliness & Climate Control
Particles:
Class
Clothing:
Full body suits to limit particle generation
Ventilation:
m3/hour capacity
Climate control:
Humidity control within ± 3% RH,
Temperature control within ± 1°C (± 0,1°C around e-beam column)
Clean Room Introduction and safety course

21. Vibration Minimization
Cleanroom has independent support from rest of building
Multiple layers of vibration insulated pillars
3 µm/sec (curve E) is met with good margins
Vibration sensitive equipment not in contact with cleanroom floor
Roughing pumps located on media level
Clean Room Introduction and safety course

22. Cleanroom functions and Media
Static electricity and ESD
General media
House gases
Special gases
Drain
Ventilatiojn exhaust (solvent, Acid, Toxic)
Electrical power
DI water
CDA, Vacuum, LN2
Clean Room Introduction and safety course

23. Clean Room Introduction and safety course

24. Entry and Exit to Cleanroom On and Off garment procedure
Clean Room Introduction and safety course

25. Cleanroom rules To consider before entering the Cleanroom
A proper personal hygiene is a condition for working in the cleanroom
Persons suffering from a cold or eczema should not enter the cleanroom
Cosmetics, rings and wristwatches have to be removed before entering the gowning area
Persons wearing glasses must clean those before entering the gowning area
Mobile phones are not allowed in the cleanroom areas
Men with a beard have to use a beard cover
Smokers should wait at least 10 minutes after smoking before entering the cleanrrom
Smokers and snuff users have to rinse their mouth before entering the cleanroom
Clean Room Introduction and safety course

26. Cleanroom rules To consider in the cleanroom
All movements should be slow and well planned
Avoid crowding as this concentrates the contamination
Do not carry items close to your body
Do not touch your face or garment with your clean gloves
Avoid touching any clean surfaces; such as load locks, etc
Avoid talking while near your component/product
No food (including chewing gum) or beverages are allowed in the cleanroom. Only ”cleanroom compatible matters/materials” are allowed.
Garments that are wet or stained have substantially reduced filtering effect and have to be exchanged immediately
Clean Room Introduction and safety course

27. Clean Room Introduction and safety course
DVD- Cleanroom behaviour
Contamination and people
Human microenvironment
Speed of movement
Carrying materials
Correct working behaviour
Clean Room Introduction and safety course

28. MC2 ; Administrative guidelines
Design dictated by
Cleanliness
Vibration minimization
Safety
Support access
Professional lab staff of 14 engineers specialized in
Lithography and Nano Processing
Thin Film and Plasma Processing
Thermal and Chemical Processing
and 6 technicians working with
Service & Maintenance
Clean Room Introduction and safety course

29. Clean Room Introduction and safety course
Machine Park
>170 Tools
Silicon processing up to 150mm
Extensive III-V and wide bandgap processing
Extensive nano-processing capabilities
Clean Room Introduction and safety course

30. Clean Room Introduction and safety course
Nanofabrication Laboratory
Clean Room Introduction and safety course

31. Nanofabrication laboratory organisation
Lab Manager; Peter Modh
Process specialists
Johan Andersson
Bengt Nilsson
Piotr Jedrasik
John Halonen
Karin Hedsten
Göran Alestig
Mahdad Sadeghi
Mats Hagberg
Henrik Frederiksen
Ulf Södervall
Martin Hollerz
Göran Pettersson
_ Zonghe Lai
Service and Maintenance
Svante Pålsson
Göran Reivall
Lars-Åke Sidengren
Christer Andersson
Kaija Matikainen
Fredrik Johansson
Emmy Nilsson
Clean Room Introduction and safety course

32. Clean Room Introduction and safety course
Cleanroom introduction course
Compulsory for all cleanroom users
Over 600 participants so far
Safety
Rules & regulations
Proper cleanroom behavior
“Driving licence”-training
To use any equipment in the cleanroom it is compulsory to have the relevant training before using it .
Ph D Processing course
For graduate students in applicable programs
Theoretical background and demonstrations of a wide variety of micro/nano processing techniques
Course for Masters students
Clean Room Introduction and safety course

33. Clean Room Introduction and safety course
MC2 Equipment booking system LIMS- Laboratory Information Management System
Clean Room Introduction and safety course

34. Clean Room Introduction and safety course
MC2 Equipment booking system LIMS- Laboratory Information Management System
Log in!
Clean Room Introduction and safety course

35. Clean Room Introduction and safety course
MC2 Equipment booking system LIMS- Laboratory Information Management System
Clean Room Introduction and safety course

36. Clean Room Introduction and safety course
MC2 Equipment booking system LIMS- Laboratory Information Management System
Clean Room Introduction and safety course

37. Clean Room Introduction and safety course
Consider the following when you book equipment
Plan your process steps. Do not book more time than you need.
Make sure that your process step is finished by 18.00, unless you have a backup( see ”lab buddy” system)
Cancel booked time that you do not intend to use.
In case somebody do not show up at the booked hour, another user can take the time after 30 min.
Apply a professional attitude to your work, and keep your booked time strictly. Delays will cause irritation among the subsequent users.
Make sure that you have booked sufficient time for cleanup and resetting the equipment to original state.
Clean Room Introduction and safety course

38. Clean Room Introduction and safety course
Lab usage
Only authorized users may use the process equipment in the lab. You need a ”drivers licence” for ALL tools (including microscopes, wet benches)
How to acquire an equipment drivers license??
The purpose of the drivers license is to make sure that the user is able to handle the tool in a manner that is
Safe for the user,
Safe for the tool itself
Safe for the process running at the tool.
Clean Room Introduction and safety course

39. Clean Room Introduction and safety course
The following outline should be applied for complex tools:
Find someone in your group who is already experienced with the tool, and work with him/her until you are both satisfied with your basic handling of the tool.
Once both you and your teacher agree that you are able to work independently with the tool, your teacher should contact the tool responsible and state that you are trained well enough for independent work. Please note that you are under no circumstances allowed to actually work with the tool without supervision without a license. Your teacher must be present at all times during training.
The tool responsible person will give the training needed, and you will be granted the ”driving license”
Clean Room Introduction and safety course

40. Clean Room Introduction and safety course
Opening hours
Approved users have access to the process laboratories 24 hours a day, all year, with the exeption of certain holidays. When the lab is closed, an announcment is always displayed at
BUT!
If you want to use the process laboratory late at night or at other times outside normal working hours ( ) you need to use the back-up or lab buddy system
Also; new users will automatically only have access during office hours.
Clean Room Introduction and safety course

41. Clean Room Introduction and safety course
Back-up system; ”lab-buddy”
”if there is any risk of accidental personal injury occuring while working alone, then the worker must be assured quick access to help in case of an emergency”
When you use the ”lab-buddy” system it is required that
Another approved user is present in the lab (or close by) to assist you in the event of an accident/emergency
Lab-buddies have close contact (not by mobile-telephone) for the system to work efficiently
The backup person must be an experienced lab user, familiar with the process lab and its safety devices and alarm system.
(ArbetsMiljöLagen ,AML, 3 Chp ; 2§ paragraph)
Clean Room Introduction and safety course

42. Clean Room Introduction and safety course
User responsiblities;
MC2 assumes that every user
Has read and understood the lab-safety manual
Has attended the training course given by MC2 for new users
Carefully follows the MC2 rules and regulations for cleanroom work
Does not lend or copy keys or card-keys for the MC2 facility
Follows the directives given from the MC2 staff
Maintains a proper personal hygiene
Acknowledges the established work and access hours
Pays attention to the information updates issued by MC2
Acts in a professional manner
Register his/her adress to the MC2 introduction course manager
Users with experience from smaller process laboratories may see the MC2 regulation framwork as complex and over-worked. However, both the size and cleanliness level of the facility calls for rigorous safety rules and cleanroom discipline. In the end, it is the user who benefits from a safe and functional working place
Clean Room Introduction and safety course

43. Lab staff responsibilities
The MC2 facility staff has the following functions and responsibilities
To give advice and suggestions regarding process issues
Execute projects according to process plans
Ensure that safety,cleanliness and equipment standards are maintained
Perform service and maintenance
Maintain booking systems and other administrative functions connected to the lab
Train new users in cleanroom behaviour and dress code
Inform users via about changes related to the process lab
Please note that it is NOT within the responsibility of the lab group staff to
Clean the equipment after other users
Execute process steps or tasks without approval from the project manager
Clean Room Introduction and safety course

44. Clean Room Introduction and safety course
Lab usage- Storage
Every user will be assigned a personal storage space with a corresponding storage box
Intended for temporary storage of work material such as tweezers, ”personal items”, cleanroom pens and notebooks, etc
Only ”harmless” materials may be stored in the personal storage boxes
Personal storage boxes are personal. You should not borrow items from a box that belongs to someone else.
Materials with high probability of contamination or which may impose a safety risk, may under no circumstances be stored in the personal storage boxes.
Clean Room Introduction and safety course

45. Clean Room Introduction and safety course
Lab usage- Visitors
Every user have the possibility to bring a visitor in the laboratory only with the following restrictions
Visitors corridor: You may bring visitors without special permission. Visitors muct be accompanied all the time and must be properly gowned (cleanroom coat and hair cover). No bags, mobil phones, coats are allowed
Process lab 1 -requires special permission from the lab manager. All guests must be informed about safety rules and cleanroom behaviour
Process lab 2. Normally not accessable for visitors. Guests must be accompanied all the time. Make sure that your guests are gowned properly and instruct them not to touch anything.
MBE lab, CMP and chemical preparation room- Normally not accessable for visitors. You need permission from the lab staff if you want to bring visitors here..
Clean Room Introduction and safety course

46. Clean Room Introduction and safety course
Lab usage
It is the responsibility of the user to clean and reset the process equipment after use
A user can be banned from the cleanroom, or be ordered further cleanroom training, if persistent or serios errors in the work procedure are observed
Clean Room Introduction and safety course

47. Clean Room Introduction and safety course

48. Work environment risks (Kaija Matikainen)
Clean Room Introduction and safety course

49. Clean Room Introduction and safety course
The objective of this chemical safety training course is to identify potentially hazardous chemicals, and to establish safety routines for work in the lab.
Clean Room Introduction and safety course

50. Hazardous Chemicals at MC2 Nanofabrication Laboratories
Acids
Bases
Oxidizers
Solvents
Clean Room Introduction and safety course

51. Potential hazards using liquid chemicals
1.Liquid chemicals requires a lot of handling in your work.
There are many liquid chemicals used throughout the lab, each with a different set of hazards and precautionary measures required for use.
3. Unconventional use of standard chemicals can present unexpected hazards not associated with normal use in the lab.
Clean Room Introduction and safety course

52. Material Safety Data Sheet, MSDS
Material identification – name, CAS #, formula.
Physical data – chemistry (boiling point, solubility etc.).
Hazardous ingredients – TLV (Threshold Limit Value).
Fire and explosion data – AIT, LEL, UEL.
Health hazard data – overexposure, first aid.
Reactivity data – stability, incompabilities.
Spill or leak procedures – what steps to take.
Special precautions – handling and storage.
Emergency phone contact
Clean Room Introduction and safety course

53. Clean Room Introduction and safety course
Risk analysis: Acids
Hydrofluoric acid, HF
BOE/BHF, Buffered Oxide Etch (HF/NH4F)
Sulphuric acid, H2SO4
Nitric acid, HNO3
Hydrochloric acid, HCl
Clean Room Introduction and safety course

54. Nitric acid could form ignition at reaction with organic substances!
Risk analysis: Nitric acid, HNO3 Nitrous gases are highly toxic – and you can’t smell them!
Nitric acid could form ignition at reaction with organic substances (e.g. alcohols), and form highly toxic nitrous gases, especially when heated. Reaction could be explosive.
Nitric acid could form ignition at reaction with organic substances!
Clean Room Introduction and safety course

55. Risk analysis: HF and BOE
Exposure to diluted HF or BOE can produce harmful health effects that may not be immediately apparent.
Diluted HF or BOE penetrates the skin with no immediate pain. And then cause serious tissue and bone damage before pain begins. This attack could be inhibited by treatment with HF-Antidote Gel.
Immedately flush the exposed area with water at least one min. Flush well but briefly. It is critical to apply antidote as soon as possible. Carefully remove contaminated clothing at once, wipe dry and apply HF-Antidote Gel to exposed area gently and freely. Aggressively massage the gel into the skin (wearing gloves) and continue to reapply and massage until pain and/or redness disappear or until medical treatment is available. Seek medical attention as soon as possible for all burns regardless of how minor they may appear initially.
Clean Room Introduction and safety course

56. A.A.A. – Always Add Acid into the water rule
Do not add water to an acid solution; instead, gradually add the acid to the water.
Clean Room Introduction and safety course

57. Clean Room Introduction and safety course
Risk analysis: Bases
Ammonium hydroxide, NH4OH
Potassium hydroxide, KOH
Developers: AZ 351B(NaOH), MF312, MF319…
TMAH (Tetra Methyl Ammonium Hydroxide) could produce toxic nitrous gases!
Clean Room Introduction and safety course

58. Risk analysis: Oxidizers
Hydrogen peroxide, H2O2
Sodium persulfate, Na2S2O3
Ammonium peroxidesulfate, (NH4)2S2O8
Nitric acid, HNO3
Clean Room Introduction and safety course

59. Symptoms: Acids, Bases, and Oxidizers
After inhalation:
Depending on the concentration of the chemical and length of time symptoms may result in corrosive attack on the respiratory passages and lungs. Exposure may produce upper airway oedema, respiratory failure, pulmonary oedema (lung water) and inflammation (pnemonitis). A person may get better but then worse again from 30 hours up to 1 week later.
After skin contact:
Contact with skin can cause redness, pain, blistering, or severe tissue burns.
After eye contact:
Corrosive to eyes. Symptoms of redness, pain, blurred vision, and permanent eye damage can occur. Possibly delayed (up to one week), possible blindness.
Clean Room Introduction and safety course

60. First aid measures: Acids, Bases and Oxidizers
After inhalation:
Remove to fresh air. Keep warm and resting. Get medical attention immediately. Report incident to safety responsible person.
After skin contact:
Immediately flush with water for at least 15 minutes and rinse thoroughly. Remove contaminated clothing. Get medical attention in case of symptoms. If skin contact results in severe tissue burns, have someone call 112 for prompt emergency transport while you continue flushing the affected area with water, or have someone to make arrangement for transport to nearest “akutintag”, emergency room unit.
After eye contact:
Immediately flush thoroughly with water continuously for at least minutes, forcibly hold eye open to ensure effective wash behind eyelids. Get medical attention immediately. Report incident to safety responsible person.
Clean Room Introduction and safety course

61. Risk analysis: Solvents
Cleaning solvents: Methanol, ethanol, IPA, acetone.
Resists for optical and e-beam lithography.
Resist removers: Shipley Microposit Remover 1165 (NMP), MEK, DEK, and acetone.
Developers: Toluene, xylene, MIBK, and XP SU-8.
Resist thinners: Anisole, EC-solvent, cyclopentanone, and chlorobenzene.
Clean Room Introduction and safety course

62. Risk analysis: Solvents There is no safe way of heating up flammables!
Because the vapours can travel a considerable distance, the source of ignition can be far away from the flammable container itself.
Always make sure that your work bench has 100% exhaustion when working with flammables, and that flammable containers should be restored back to the flammables cabinet immediately after use.
Clean Room Introduction and safety course

63. Clean Room Introduction and safety course
Symptoms: Solvents
After inhalation:
Can cause irritation of eyes, nose and throat. Prolonged exposure can cause headache, sickness (nausea), confusion, drowsiness, convulsion and coma.
After skin contact:
Prolonged or repeated exposure may cause irritation, itching, skin dryness or cracking characterised by redness and inflammation.
After eye contact:
Vapours may cause severe irritation with redness, pain, tearing and inflammation. Splashes may cause eye damage.
Clean Room Introduction and safety course

64. First aid measures: Solvents
After inhalation:
Remove to fresh air. Report incident to safety responsible person.
Get medical attention in case of symptoms.
After skin contact:
Immediately wash with water and rinse thoroughly. Remove contaminated clothing.
Get medical attention in case of symptoms. Report incident to safety responsible person.
After eye contact:
Immediately flush thoroughly with water continously for at least minutes, with eyelids held wide open during flushing. Get immediate medical attention.
Report incident to safety responsible person.
Clean Room Introduction and safety course

65. PPE, Personal Protective Equipment: Gloves
Put chemical protection gloves outside the disposable gloves before you start working with hazardous chemicals at the wet benches.
Inspect your chemical protection gloves carefully. If the gloves are discoloured or damaged, they should be disposed immediately.
Rinse the gloves carefully before disposing them.
When your work in the process wet bench has been completed, the chemical protection gloves should be rinsed and put back to their designated place, without touching any surface outside the process wet bench.
Gloves should always be rinsed with water before handling wash bottles or other laboratory fixtures.
Clean Room Introduction and safety course

66. Clean Room Introduction and safety course
PPE, Personal Protective Equipment: Eye protection IT IS MANDATORY TO WEAR SAFETY GLASSES IN THE LABORATORY!
Use apron and face shield when mixing or using strong acids, bases or oxidizers.
Put on face shield when you are wet etching.
Use apron and safety glasses when dicing materials and at CMP (Chemical Mechanical Polishing) machines.
Clean Room Introduction and safety course

67. Safety routines at MC2 Processlabs
Do not leave your chemicals unattended. Clearly mark the content of your chemicals, your name, phone, and date plus time on a clean room note.
You are responsible for removing and disposing of your personal chemical containers when they are no longer in use.
Chemical containers, that are not clearly labelled, should be disposed immediately. Mark the container “ unknown content “ and contact the lab staff.
Put the cap back on each chemical bottle securely. Rinse and dry the outside of the bottle before returning it back to the storage.
Never mix chemicals without prior knowledge about the consequences!
You are responsible for the security when handling chemicals at your wet bench. Clean up your wet bench when you have finished your work.
Clean Room Introduction and safety course

68. The MC2 Process laboratory safety declaration
Remember, you are responsible for your own safety, and that for others around you.
MC2 provides you with information, recommendations, and necessary resources for you to be able to do your work safely. It is up to you to ensure that you take appropriate precautions for your safety and your fellow lab members.
Clean Room Introduction and safety course

69. Clean Room Introduction and safety course

70. CHEMICALS (Svante Pålsson)
Chemical supply to lab
Chemical waste from the lab.

71. CHEMICAL SUPPLY TO THE LAB.
Please, order standard chemical by , a day ahead from
Special chemicals have to be requested and granted by MC2.

72. CHEMICAL SUPPLY TO THE LAB.
Major stock in basement.

73. CHEMICAL SUPPLY TO THE LAB.
Minor stock for day use close to the lab.

74. CHEMICAL WASTE FROM THE LAB.
Waste has to be marked with adequate marking for disposal.

75. CHEMICAL WASTE FROM THE LAB.
Diluted chemicals can be disposed down the drains. Acid drains in wet benches.
Neutralization in basement.

76. CHEMICAL WASTE FROM THE LAB.
Solvent drain for acetone, and alcohol to tank.
Emergency drain to tank.
Tanks are emptied with a truck.

77. CHEMICAL WASTE FROM THE LAB.
Place empty chemical bottles on the trolley.
Please rinse the bottles with water before disposing.

78. CHEMICAL WASTE FROM THE LAB.
Material waste are disposed in special waste basket inside the lab.

79. Clean Room Introduction and safety course

80. Clean Room Introduction and safety course
“Safety First”
Chalmers safety plan and organisation
4.6 MC2 safety policy
4.7 Alarms (gas, fire and process)
4.7.1 Evacuation of cleanroom
5.1 First aid
5.2 Safety gear
5.3 Fire extinguisher
Eye and body showers
5.6 Antidote gel
In case of an emergency
Chemical spill
Clean Room Introduction and safety course

81. Clean Room Introduction and safety course
Wet bench training,
1 hour hands on demonstration in lab.
Clean Room Introduction and safety course

82. Clean Room Introduction and safety course
Chalmers safety organisation
President
a) information group
b) catastrophe organisation
MC2 Prefekt
a) Alarm levels
MC2 lab manager
a) work delegation
b) Education
Clean Room Introduction and safety course

83. Clean Room Introduction and safety course
Clean Room Introduction and safety course

84. Clean Room Introduction and safety course

85. Clean Room Introduction and safety course
All activities within the MC2 Nanofabrication facility comply with the Swedish safety and work environmental laws and regulations
Clean Room Introduction and safety course

86. Clean Room Introduction and safety course
DVD- Safety in Cleanroom
Cleanroom hazards (fire, explosions, toxicity, physical
Hazardous materials (flammable, reactive, corrosive, poison/toxic)
Hazardous materials (handling & storage)
Dealing with emergencies (water based, foam, carbon dioxide, powder)
Clean Room Introduction and safety course

87. Clean Room Introduction and safety course
ALARM SYSTEM
Smoke detector/ alarm
Fire sensors and alarms in wet bench units with solvents
Sprinkler system
Clean Room Introduction and safety course

88. Clean Room Introduction and safety course
ALARMS
Fire alarm
acoustic signal and flashing red light ACTION: Evacuation of laboratories
Gas alarm
Process alarm
acoustic signal and flashing blue light ACTION: Contact the lab staff
Clean Room Introduction and safety course

89. Clean Room Introduction and safety course
In case of emergency (fire,gas,etc)!
Manual Alarm
Push the knob to evacuationalarm; this also gives an alarm to Rescue service
Automatic alarm from fire,gas sensors
Rescue those who are in danger
Evacuate building
Call (00) 112 and inform about;
what has happened
if there are any people locked in
who is calling ( see last page in lab manual)
Clean Room Introduction and safety course

90. Clean Room Introduction and safety course
Meeting point after evacuation
In case of evacuation alarm!
Put out fire using extinguisher ONLY ”if it is possible without danger for your health) and you have the proper training
Use ”Fire choking cloth”
Evacuate from building via emergency exits.
Local evacuation officers in house
Do not use elevators at evacuation
Close doors to minimize smoke spreading
Point of assembly after evacuation from MC2 (“VASA square”), wait for further information
Do not enter building again unless red alarm lamps has stopped flashing
Clean Room Introduction and safety course

91. Clean Room Introduction and safety course
Preventive actions;
what to know before entering laboratory!?
Look at evacuation plans (”close to exits”) and recognize evacuation exits
At least 2 escape ways from each position!
Clean Room Introduction and safety course

92. Clean Room Introduction and safety course

93. Clean Room Introduction and safety course
First aid kit
Eye and body showers
Clean Room Introduction and safety course

94. Clean Room Introduction and safety course
In case of Fire
Fire extinguisher classes: A, B, C, D
Foam, S (Skumsläckare, A+B); for wood, paper, gases, liquids,
CO2 ,K (Kolsyresläckare; B) for gases, liquids and electrical equipment risk for choking
Clean Room Introduction and safety course

95. Clean Room Introduction and safety course
Chemical Spill;
Isolate the area
Call the lab staff
If possible use absorbing material (is available in cupboard in Processlab )
If you spill chemicals onto yourself, use the emergency showers and let somebody else take care of the items above.
Clean Room Introduction and safety course

96. Clean Room Introduction and safety course
Nanomaterial hazards
Nanomaterials (4.2.8)
Nanomaterials are applications with morphological features smaller than a one tenth of a micrometer in at least one dimension. Despite the fact that there is no consensus upon the minimum or maximum size of nanomaterials, with some authors restricting their size to as low as 1 to ~30 nm, a logical definition would situate the nanoscale between microscale (0.1 micrometer) and atomic/molecular scale (about 0.2 nanometers).
The hazards associated with handling of novel nanomaterials are still under debate, but first of all those new materials are not yet proven to be non-hazardous. We require that our users keep updated on information about the potential risks with their material, and using the appropriate precautions during handling.
A good recommendation is to start reading the following 2 links;
( and the European project Nanosafe (
Clean Room Introduction and safety course

97. Clean Room Introduction and safety course

98. Clean Room Introduction and safety course
You are strongly encouraged to recommend changes that make the cleanroom facility; safer, cleaner, easier to use, or less expensive to maintain!
When in the cleanroom, be aware of your knowledge limitations. It is extremely important that you ask someone for help if you are unsure about the operation of these facilities.
Clean Room Introduction and safety course

99. Clean Room Introduction and safety course
Laboratory tour;
Entering main cleanroom area; shoe protection/change, hair protection
Entering procedure for the Processlab 2 and visitors corridor(visitors gowning room),
Enter procedure for Processlab 1; handwash, new garments (hood, overall, shoes, personal hanger), gloves
Processlab 1; equipment layout, ventilation circulation, alarm system, emergency escape ways, eye and body showers, cloth/cushion for chemical spill
Undress cleanroom garment procedure
Exit from clean room zone
Clean Room Introduction and safety course