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Filter, Valve and Pipng in semiconductor application TSMC F14 TFE3 May 10 2011.

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Presentation on theme: "Filter, Valve and Pipng in semiconductor application TSMC F14 TFE3 May 10 2011."— Presentation transcript:

1 Filter, Valve and Pipng in semiconductor application TSMC F14 TFE3 May

2 Outline Introduction Filter Introduction Introduction Valve Introduction Introduction Piping Introduction Q&A Q&A

3 Filter Introduction

4 What is a Filter? A filter consists of a series of pores (channels) of a given size A filter consists of a series of pores (channels) of a given size All particles bigger than the pore size are retained All particles bigger than the pore size are retained All particles smaller than the pore can go through the membrane All particles smaller than the pore can go through the membrane

5 Depth Filter Characteristics & Structure Relatively thick (fractions of an inch) Relatively thick (fractions of an inch) Random structure Random structure High particle holding capacity High particle holding capacity Relatively low retention efficiency Relatively low retention efficiency Potential for shedding & particle release Potential for shedding & particle release Typically used as pre-filter Typically used as pre-filter High material content High material content Materials: Polypropylene fiber or fiberglass Materials: Polypropylene fiber or fiberglass

6 Membrane Filter Characteristic Relatively thin (150 microns) Relatively thin (150 microns) Continuous polymeric sheet Continuous polymeric sheet Defined pore size with high retention efficiency Defined pore size with high retention efficiency High Porosity ( Track etched low porosity ) High Porosity ( Track etched low porosity ) Low particle holding capacity Low particle holding capacity Typically used as final filters Typically used as final filters Materials - PTFE, PVDF, UPE etc. Materials - PTFE, PVDF, UPE etc.

7 Comparison of Membrane and Depth Filter Characteristics

8 Depth Filter – Graded Density Filter is constructed by wrapping multi-layers of fibrous non-woven media on a core Filter is constructed by wrapping multi-layers of fibrous non-woven media on a core There is retention gradient along the depth of flow direction by using different media There is retention gradient along the depth of flow direction by using different media Larger particles retained at outer section and smaller particle retained at inner section Larger particles retained at outer section and smaller particle retained at inner section Planargard : CMP1,3,5,7,9,11,13,16 Planargard : CMP1,3,5,7,9,11,13,16 Flow Schematic of Depth Filter

9 Typical Filtration Devices: Pleated Cartridges Filter "pack" contains membrane, plus upstream & downstream fibrous supports. Filter "pack" contains membrane, plus upstream & downstream fibrous supports. Supports can be a source of particles and can prevent efficient removal of bubbles. Supports can be a source of particles and can prevent efficient removal of bubbles. Pleat pack is thermoplastically potted to form a cartridge. Pleat pack is thermoplastically potted to form a cartridge. Can be made in varied lengths from 2" to 40". Can be made in varied lengths from 2" to 40". Permeate Flow Path Inlet Flow Path Cross Section of Pleats

10 Filter Cartridge Holders T-Style Housing Inlet Outlet Typical Flow Path Inline Housing Inlet Outlet Typical Flow Path

11 Typical Disposable Filter Assembly Vent Drain Internal Filter Element outlet inlet

12 Retention Mechanisms: Sieving and Interception In sieving (size exclusion), particles are too large to pass though the pore structure. They are either captured on the surface or in smaller passages inside of the structure. In sieving (size exclusion), particles are too large to pass though the pore structure. They are either captured on the surface or in smaller passages inside of the structure. For interception to occur, the particles move with the fluid flow but touch a surface and are held there by strong forces. For interception to occur, the particles move with the fluid flow but touch a surface and are held there by strong forces.

13 Retention Mechanisms: Adsorption Most particles in liquids have a negative charge and can be captured by attraction to a positively charge spots on the filter. Most particles in liquids have a negative charge and can be captured by attraction to a positively charge spots on the filter. Can be a large factor in liquids with some membranes. Can be a large factor in liquids with some membranes.

14 Retention Mechanisms: Diffusion Due to molecular motion, very fine particles move in an almost random manner that follows a mean free path. Variations along this path may cause the particles to come in contact with the filter structure and be captured. Due to molecular motion, very fine particles move in an almost random manner that follows a mean free path. Variations along this path may cause the particles to come in contact with the filter structure and be captured. Although this is a factor in liquids, it is the largest factor for high efficiency gas filters. Although this is a factor in liquids, it is the largest factor for high efficiency gas filters. Actual path Mean Free Path

15 What is Pore Size Rating and Nominal Retention? Pore Size Rating Definition: Pore Size Rating Definition: the largest actual or estimated size pores or holes in a filter the largest actual or estimated size pores or holes in a filter Nominal Retention: Nominal Retention: Some Fractional Retention of a particular particle size (ex. 90%, 95%, 99%, 99.9%, etc.) Some Fractional Retention of a particular particle size (ex. 90%, 95%, 99%, 99.9%, etc.)

16 What is Pore Size Distribution? Pore Size Distribution Definition: Pore Size Distribution Definition: An estimate of the range and frequency of pore sizes which make up a given filter membrane An estimate of the range and frequency of pore sizes which make up a given filter membrane Tight DistributionLoose Distribution Both are 0.2 um rated filters based on definition of pore size rating Loose Vs Tight Distribution

17 Effects of Particle Loading Smaller membrane pores are plugged first. Smaller membrane pores are plugged first. Larger pores remain open resulting in pathway for particles to travel through Larger pores remain open resulting in pathway for particles to travel through Retention decreases with heavy loading Retention decreases with heavy loading Decrease in retention can occur before any noticeable pressure drop increase Decrease in retention can occur before any noticeable pressure drop increase Increase in pressure drop or reduction in retention

18 Simple Cartridge/Bowl Installation Twist cartridge 1/4 turn to lock Tighten locking ring Attach bowl to head Housing Type For Cartridge Filters Chemlock Housing

19 Micro Contamination Removal What do we use to Remove This Undesired Matter? Filters- Particle Removal Filters- Particle Removal Purifiers- Molecular Impurities Purifiers- Molecular Impurities (e.g. H2O, O2, Hydrocarbon..) (e.g. H2O, O2, Hydrocarbon..)

20 Gas filters- Materials of Construction PTFE (Teflon) PTFE (Teflon) Chemically stable to all gases Chemically stable to all gases Low pressure drop Low pressure drop Metal Metal Stainless steel (316L Low sulfur) Stainless steel (316L Low sulfur) Chemically stable, except in corrosives & Ozone Chemically stable, except in corrosives & Ozone Nickel Nickel Chemically stable to most gases Chemically stable to most gases Not for Ozone, CO, hydride gases (PH 3, AsH 3, B 2 H 6 ) Not for Ozone, CO, hydride gases (PH 3, AsH 3, B 2 H 6 ) Ceramics Ceramics Chemically stable to most gases Chemically stable to most gases can release organics and light metals can release organics and light metals

21

22 Valve Introduction

23 A valve is a device that regulates, directs or controls the flow of a fluid (gases, liquids, fluidized solids, or slurries) by opening, closing, or partially obstructing various passageways. Valves are technically pipe fittings, but are usually discussed as a separate category. In an open valve, fluid flows in a direction from higher pressure to lower pressure. Valves may be operated manually, either by a handle, lever or pedal. Valves may also be automatic, driven by changes in pressure, temperature, or flow. These changes may act upon a diaphragm or a piston which in turn activates the valve, examples of this type of valve found commonly are safety valves fitted to hot water systems or boilers. More complex control systems using valves requiring automatic control based on an external input (i.e., regulating flow through a pipe to a changing set point) require an actuator. An actuator will stroke the valve depending on its input and set-up, allowing the valve to be positioned accurately, and allowing control over a variety of requirements. Whats a valve

24 ,,,,,,,,,,,,,,,,,,,,,,, (Globe Valve) (Ball Valve),,,,, (Plug Valve–Eccentric Plug Type), (Butterfly Valve),, (Gate Valve), (Check Valve), (red Valve) Valve type

25 Valves are quite diverse and may be classified into a number of basic types. Valves may also be classified by how they are actuated: Hydraulic Pneumatic Manual Solenoid Motor Valve Type and classified

26 globe valve (Ball Valve)

27 (Plug Valve–Eccentric Plug Type) (Butterfly Valve)

28 (Check Valve) A check valve, clack valve, non- return valve or one-way valve is a mechanical device, a valve, which normally allows fluid (liquid or gas) to flow through it in only one direction

29 Advantages over Ball and Gate Valves In order to operate and seal effectively, seat wear is inherent in most ball and gate valve designs. When the seats eventually wear away so does the ball or gate valve ability to seal. Emergency sealant injection to energize the seal most often enters the flow, potentially damaging downstream instrumentation and or contaminating the flow media. In fire-safe ball and gate valves when the primary elastomeric or plastic seals wear away or are destroyed, metal to metal contact between the secondary metal seal on the ball or gate creates abrasion and costly damage to the key sealing components.

30 Solenoid Valve, Pneumatic Control Valve A- Input side B- Diaphragm C- Pressure chamber D- Pressure relief conduit E- Solenoid F- Output side

31 1.Valve Body 2.Inlet Port 3.Outlet Port 4.Coil / Solenoid 5.Coil Windings 6.Lead Wires 7.Plunger 8.Spring 9.Orifice The media controlled by the solenoid valve enters the valve through the inlet port (Part 2 in the illustration above). The media must flow through the orifice (9) before continuing into the outlet port (3). The orifice is closed and opened by the plunger (7). The valve pictured above is a normally-closed solenoid valve. Normally-closed valves use a spring (8) which presses the plunger tip against the opening of the orifice. The sealing material at the tip of the plunger keeps the media from entering the orifice, until the plunger is lifted up by an electromagnetic field created by the coil.

32 Direct acting 2-way valves Two-way valves are shut-off valves with one inlet port and one outlet port. In the de-energized condition, the core spring, assisted by the fluid pressure, holds the valve seal on the valve seat to shut off the flow. When energized, the core and seal are pulled into the solenoid coil and the valve opens. The electro-magnetic force is greater than the combined spring force and the static and dynamic pressure forces of the medium. Direct acting 3-way valves Three-way valves have three port connections, one being the "common" port and two valve seats. One valve seal always remains open and the other closed in the de-energized mode. When the coil is energized, the mode reverses. This is the pneumatic equivalent of a single-pole single-throw electrical switch. Direct acting 4-way valves Four-way valves have four port connections and two valve seats. When the coil is energized, one set of ports is connected straight through to the other set of ports. In the de- energized mode, the connection is reversed.

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34 Piping Introduction

35 Within industry, piping is a system of pipes used to convey fluids (liquids and gases) from one location to another. The engineering discipline of piping design studies the efficient transport of fluid. Industrial process piping (and accompanying in-line components) can be manufactured from wood, fiberglass, glass, steel, aluminum, plastic, copper, and concrete. The in-line components, known as fittings, valves, and other devices, typically sense and control the pressure, flow rate and temperature of the transmitted fluid, and usually are included in the field of Piping Design (or Piping Engineering). Piping systems are documented in piping and instrumentation diagrams (P&IDs). If necessary, pipes can be cleaned by the tube cleaning process. Whats piping

36

37 Major classifications of steel

38

39 - EMT

40 PVC,,,, PVC,,, PVC,,, PVC.. ~E ~A or B.. (E).. ( )/... PVC

41 chemical

42 In chemistry, polytetrafluoroethylene (PTFE) is a synthetic fluoropolymer of tetrafluoroethylene that finds numerous applications. PTFE is most well known by the DuPont brand name Teflon. PTFE is a fluorocarbon solid, as it is a high-molecular-weight compound consisting wholly of carbon and fluorine. PTFE is hydrophobic: neither water nor water-containing substances wet PTFE, as fluorocarbons demonstrate mitigated London dispersion forces due to the high electronegativity of fluorine. PTFE has one of the lowest coefficients of friction against any solid. PTFE is used as a non-stick coating for pans and other cookware. It is very non-reactive, partly because of the strength of carbon– fluorine bonds, and so it is often used in containers and pipework for reactive and corrosive chemicals. Where used as a lubricant, PTFE reduces friction, wear, and energy consumption of machinery. Whats the PTFE (Teflon)

43 Properties general Upper service temperature 260 °C Chemical resistance excellent Specific gravity 2.15 Melting point 327 °C electrical Dielectric constant 2.1 Dielectric dissipation factor Dielectric strength > 1400 Volt / mil Mechanical Tensile strength 3500 psi Elongation 300 % Compressive strength 3500 psi Flexural Modulus psi Hardness D-60 Enviromental Water absorption < 0.01 % Water resistance excellent Oxygen index >95 % Material Poly Tetra Fluoro Ethylene (PTFE)

44 Datasheet PTFE Tubing PTFE is the most chemically resistant plastic known. Its mechanical properties are low compared to other engineered plastics, but it can be improved by adding fillers such as glass fiber, carbon, graphite and similar materials. PTFE has almost ideal dielectric properties. Its dielectric constant (2.1) and power-loss factor (0.0002) are low and remain so over a wide range of temperatures and frequencies. In certain applications, such as fuel hoses, some electrical conductivity is required to dissipate static charges. When exposed to flame, PTFE decomposes leaving just a little residue. PTFE is extremely inert and stable up to a temperature of 260 °C.PTFE is also virtually unaffected by oxygen, ozone and UV light.

45 Homework Please briefly describe retention mechanism of filter. Please briefly describe retention mechanism of filter. What is the definition of pore size distribution? What is the definition of pore size distribution? Please briefly describe valve classified and choice 3 types valve and describe its function. Please briefly describe valve classified and choice 3 types valve and describe its function. What is the PTFE tube and its character? What is the PTFE tube and its character?


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