1. Irradiation facilities for semiconductor detectors and electronics
at the INFN National Laboratory of Legnaro
Andrea Candelori
Istituto Nazionale di Fisica Nucleare and Dipartimento di Fisica, Padova

2. OUTLINE
• The SIRAD irradiation facility at the TANDEM accelerator:
- high energy protons and ions.
• The CN accelerator:
- protons and neutrons.
• Total dose tests:
- Tungsten (W) and Molybdenum (Mo) X-rays;
- 60Co -rays.

3. The SIRAD Irradiation Facility
The SIRAD irradiation facility is located at the Tandem accelerator of the INFN National Laboratory of Legnaro (Padova, Italy).
Tandem accelerator:
-Van de Graaff type; MV maximum voltage; two strippers;
-servicing 3 experimental halls for nuclear and interdisciplinary Physics;
Schematics of the 15 MV Tandem Van de Graaff accelerator and of the SIRAD irradiation facility at the +70º beam line (left). A photograph of the SIRAD irradiation facility is also shown for completeness (right).

4. Typical ion species available at SIRAD
• Ion species from 1H (22-30 MeV) up to 197Au (1.4 MeV/a.m.u.)
• LET from 0.02 MeVcm2/mg (1H) up to 81.7 MeVcm2/mg (197Au)
The energy values refer to the most probable q1 and q2 charge state, with two stripper stations, and the Tandem operating at 14 MV.
1st multi-source
2nd multi-source

5. Low flux (102-105 ions/cm2s) irradiation set-up on 22 cm2
The on-line beam monitoring system for defocused beams by the fixed and mobile diodes:
-left: side view of the experimental set-up;
-right: front view (transverse to the beam) of the fixed and mobile diode boards.
The mobile diodes are mounted on the sample holder with the DUT. The figure is not drawn to scale.

6. High flux (>108-109 ions/cm2s) irradiation set-up on 55 cm2
The on-line beam monitoring for rastered proton and ion beams by the 33 battery of Faraday cups positioned behind the DUT: side view of the experimental setup. The aperture of each Faraday cup is 0.60.6 cm2. The figure is not drawn to scale.

7. Example of validation for space mission
Validation of the ASIC for the GLAST Large Area Telescope
GLAST space telescope
International collaboration (NASA, ESA, ASI, INFN,...)
INFN Padova: radiation tests of tracker, DAQ electronics
ASICs validated for SEE at SIRAD
ASICs validated for TD at CNR-ISOF 60Co -ray source
COTS validated for SEE at SIRAD

8. Summary of the main research activities at SIRAD
SEE in ASICs for CMS, GLAST, AGILE, ALICE
SEE in FPGA
Charge loss in Flash E2PROM
SEB, SEGR in power MOSFETs
RILC and RSB (Ultra-thin gate oxide)
Silicon detectors
More than 61 papers published in the last 4 years.

9. Beam time allocation at SIRAD in 2004

10. Beam time allocation at SIRAD in 2001-2004

11. SIRAD Collaboration in Italy and abroad
1) Dip. di Fisica and INFN Padova
2) INFN Laboratori Nazionali di Legnaro
3) Dip. Ingegneria dell’Informazione, Padova
4) Tecnomare SpA (Venezia)
5) Center for Advance Space Optics (Trieste)
6) Dip. Fisica and INFN, Trieste
7) ITC-IRST (Trento)
8) Dip. Informatica e Telecomunicazioni, Trento
9) INAF, Sezione di Milano
10)ST Microelectronics (Agrate Brianza, Milano)
11) Dip. Elettronica, Pavia
12) Dip. Ingegneria Industriale, Bergamo
13) Dipartimento di Fisica Sperimentale, Torino
14) Dip. Automatica e Informatica,Politecnico di Torino
15) Dip Fisica and INFN, Bologna
16) Dip. Energetica and INFN, Firenze
17) Aurelia Microelettronica S.p.A. (Viareggio)
18) Dip.Ingegneria Elettronica, Università Roma 2
19) INAF, Sezione di Roma
20) DAEIMI e DSM, Università di Cassino
21) ST Microelectronics (Catania)
A) Institut für Experimentalphysik (Amburgo, Germania)
B) LETI (Grenoble, Francia)
C) Centro Nacional de Microelectronica (Barcellona, Spagna)
D) IMEC (Lovanio, Belgio)
E) Philips Semiconductor (Nijmegen, Olanda)
F) CERN (Ginevra, Svizzera)
G) Helsinki Institute of Physics (Finland)
H) Santa Cruz Institute for Particle Physica (California, U.S.A)
BERGAMO
PADOVA
PAVIA
VIAREGGIO
CASSINO

12. CN accelerator
Characteristics: Van de Graaff type, 7 MV maximum voltage;
Ion species: p (1H); d (2H); t (3H); 4He (single or double charge) and 15N (double charge)
Max energy: 7 MeV for single charged species;14 MeV for 4He++; 8 MeV for 15N++.
T(d,n)4He
9Be(d,n)10B
with moderator
D(d,n)3He
7Li(p,n)7Be
9Be(d,n)10B

13. CN accelerator: neutron beams

14. W and Mo X-rays: Seifert Rp-149 Irradiation Facility
• Tube with W ( keV L-lines) or Mo ( keV K-lines) anode.
• Maximum tube voltage 60 kV. Maximum tube current 50 mA.
• X,Y (motorized) and Z (manual) axis for accurate position setting of the tube.
• Radiation hardness qualification of the APV25 chip for the CMS silicon tracker.
X-ray tube
Semi-automatic
probestation
Laser pointer
Y axis motor X Y Z

15. W and Mo X-rays: radiation field dimensions20 40 60 80
100
120
140
-20
-15
-10 -5 5 10 15
Dose rate (rad(Si)/s)
D=10 cm
D=15 cm
D=20 cm
D=40 cm
13.9 mm
15.5 mm
16.1 mm
20.6 mm
X position (mm) 20 40 60 80
100
120
140
-20
-15
-10 -5 5 10 15
Dose rate (rad(Si)/s)
D=10 cm
D=15 cm
D=20 cm
D=40 cm
7.2 mm
9.2 mm
11.4 mm
19.4 mm
Y position (mm)

16. 60Co -ray source (CNR-ISOF)
• Irradiation Facility: Panoramic Gammabeam model 150 A
produced by Nordion Ltd (Canada)
• Photon energies: MeV and MeV
• Present activity: 2000 Ci ( 7.41013 Bq)
• Point source for D>10 cm (D= cm)
• Dose rate: ~5 rad(Si)/s at D=20 cm, ~1 rad(Si)/s at D=45 cm

17. • The SIRAD irradiation facility at the 15 MV TANDEM accelerator:
Conclusions
• The SIRAD irradiation facility at the 15 MV TANDEM accelerator:
- Ion species from 1H (23-30 MeV) up to 197Au (1.4 MeV/a.m.u.)
- LET from 0.02 MeVcm2/mg up to 81.7 MeVcm2/mg
- High (> ions/cm2s) and low ( ions/cm2s) flux set-up
- Ion Electron Emission Microscopy possibility
- New irradiation chamber and sample holder (ESA standards)
• The CN accelerator:
- Monochromatic spectra: D(d,n)3He, T(d,n)4He, 7Li(p,n)7Be
- Continuous spectra: 9Be(d,n)10B
- Thermal neutrons: 9Be(d,n)10B with moderator
• Total dose tests:
- X-rays: W (L-lines at 7-12 keV) and Mo (K-lines at keV) anode;
dose rate: 120 rad(Si)/s.
- -rays: 60Co with 1-5 rad(Si)/s dose rate (D=20-45 cm).

18. INFN Laboratori Nazionali di Legnaro More information on the web site
Scuola Nazionale
“Rivelatori ed elettronica per applicazioni spaziali, Astrofisica e Fisica delle Alte Energie”
INFN Laboratori Nazionali di Legnaro
4-8 Aprile 2005
More information on the web site

19. What is SIRAD?
SIRAD is the acronym for SIlicon and RADiation.
The SIRAD irradiation facility is dedicated:
"to investigate radiation effects on silicon detectors, electronic devices and systems in radiation hostile environments".
-Total dose effects as a result of ionization damage.
-Bulk effects as a result of displacement damage.
-Single event effects as a result of an energetic particle strike.
-High energy physics experiments.
-Space missions of scientific and commercial satellites.

20. SIRAD upgrade: the Ion Electron Emission Microscope (IEEM)
Purpose: Single Event Effect mapping, Ion Beam Induced Charge Collection studies.
Nuclear Microprobe: µ-focused beam
IEEM: defocused beam (Sandia)
Ion beam
2D electron
detector at
focal plane of
electron optics
Object slit
(Xhit,Yhit)
Nuclear Microprobe:
magnet optics for focusing (e.g. triplet)
and electron optics for scanning
secondary
electrons 
Ion beam
electron
optics
(Xbeam,Ybeam)
coating
rastering pattern
channeltron
hit confirmation by
secondary electrons
analysis of
signal
analysis of
signal
target
target
Resolution on target determined by beam optics
spot size and positioning.
Resolution on target: lateral size of field of view
divided by linear line pair resolution of sensor.

21. SIRAD upgrade: the Ion Electron Emission Microscope (IEEM)
UV lamp
(PEEM)
SIRAD
contrast diaphragm I I
lens
PSD
Image intensifier
The ion impact position on the target is determined by “imaging” the position from which secondary electrons are emitted: the intrinsic resolution is of the order of 0.6 m over a 250 m field of view.

22. IEEM images with UV lamp and ion beam
• Lattice step: 40 mm
• Structure width is about 6 mm.
• The lattice is made by copper.
UV lamp
223 MeV Br ion beam

23. W and Mo X-rays: emission spectra
1.0
W anode, 50kV, 0.1 mm Al filtration
Mo anode 30 kV, 0.1 mm Mo filtration
17.4 keV
19.6 keV
keV W Mo
0.8
0.6
Photons/(mAsmm2) at 750 mm
normalized to maximum
0.4
0.2
0.0 5 10 15 20 25 30 35 40 45 50
Photon energy (keV)