iPartner™ Support Offerings

iPartner™ Support Offerings
iPartner™ Support Offerings Partnering for reduced cost and higher uptime Slide remains as is. C O N F I D E N T I A L

iPartner KLA-Tencor, the premier company in yield management, introduces a breakthrough in semiconductor customer support Slide remains as is. C O N F I D E N T I A L

iPartner iPartner … . . . A unique relationship between customers and KLA-Tencor onsite and online resources. . . . A partnership that allows our customers to tailor their support level to match their specific manufacturing requirements. Remove the entire second line. C O N F I D E N T I A L

iPartner iPartner New service offerings from KLA-Tencor for your iSupport-compatible systems With KLA-Tencor as your support partner, you’ll cut your costs and improve tool uptime. Slide remains as is. C O N F I D E N T I A L

What’s in it for you? iPartner: Advantages Reduced cost, higher uptime
A choice of online/onsite support solutions Pick the one that matches your requirements Go online 7x24 for fast response and rapid resolution Get faster onsite resolution for more complex issues Realize immediate savings Eliminate the word “more” from the fifth bullet. C O N F I D E N T I A L

iPartner Support Offerings
Balances Cost and Performance Reduces Cost and Increases Uptime iPerformance Optimizes Tool Performance Applications Critical Less Tools/Critical Complex 7 x 24 Online Support i724 iValue iShare Saves More through Shared Responsibility Highest Performance Lowest Cost iPerformance wafer to highlight red color; i724 is yellow/gold; iValue is green and iShare is blue. Make sure the color hues don’t fight with the template. C O N F I D E N T I A L

iPartner: How it Works iPartner offerings are based on a unique partnership among KLA-Tencor Online Support Center (OSC) engineers, K-T’s customer support engineers and your engineers 7x24 round-the-clock online service Increased coverage, faster response Common issues are quickly resolved (e.g. lockups, alignment errors, calibrations, etc.), reducing the need for onsite dispatch Fast resolution, shared savings Slide remains as is. Complex issues are assisted via online diagnostics and parts ordering, reducing onsite MTTR Reduced downtime C O N F I D E N T I A L

Comparison to Conventional Support
i724 Reduces Costs, Provides More Coverage, and Resolves Problems Faster Feature Full i724 Onsite Support Coverage 5x8 5x8 Off-shift Support Coverage Uplift 7x24 Online < 2 hrs Online Response Time 4 covered hrs Onsite 4 covered hrs Onsite Online Parts Diagnosis & Ordering No 7x24 Lighten the burgundy color slightly so the dividing lines are more prominent. Cost Savings No Yes Remote Operation, Data Transfer, No Yes E-10 Reporting Standard Minus Saver Price Standard Awards C O N F I D E N T I A L

iPartner: Cost Saving Benefits
Using 24x7 online support reduces onsite costs We share the savings with you Savings depends upon the following Number of compatible tools OSC utilization Whether or not you have an iDM server Change first line to read “7x24”. Graphic change recommendation: Ghost back the entire photo and move the text to the center for consistency with other slides. Second bullet with its sub-bullets moves to the top under the header. “We share the savings with you” is the closer -- shown in burgundy italics to punch out the main message in this slide. This technique is consistent with slide 4 and slide 16. C O N F I D E N T I A L

iPartner Saver Awards For example, your fab with $XM service entitlement: KLA-Tencor will pay for installing, licensing and maintaining the iDM We will pay for the license fees of connected tools We will provide 7x24 online support We share savings after paying for the license and maintaining the server if you meet the online usage target Expected annual saving up to $XXXXX OSC Usage Savings Apply Toward iPartner Offering Targets iPartner Offerings Slide remains the same. 85 to 89% Neutral iPerformance i724 iValue 90 to 94% $YYYYY 95% or More $ZZZZZ C O N F I D E N T I A L

iPartner: Longer-term Benefits
No more “one-cost fits all” support solution iPartner support offerings are extremely flexible Support is scaled to match your specific requirements How complex are your KLA-Tencor tools? How critical are your applications? Where are you in the production cycle? What is your level of maintenance expertise? Over time, your requirements may change Transition to lower-cost iPartner offering Slide remains as is. C O N F I D E N T I A L

iPartner: Longer-term Benefits
Future features will further reduce downtime and improve productivity Tool health monitoring System optimization service Intra-fab remote tool operation Additional slide added because the above information made slide 11 too busy. This is simply a continuation of “Longer-term Benefits and punches out “future features”. C O N F I D E N T I A L

iPartner Support Offerings at a Glance
Support Element i724 iValue iShare Online Support Center Online Coverage 7x24 Online Response 2 hr. 4 hr. Parts Diagnosis & Ordering Case Tracking Onsite Support Coverage Period 5x8* Repair Labor 8 visits (includes 1 annual PM visit) Tool Down Response (avg.after working on-line) 4 covered hr 8 covered hr On-site Response -varies by Product 4 or 8 covered hr 16 or 24 covered hr 16 to 24 covered Preventive Maintenance By Customer Extended Onsite Coverage Optional Parts Repair Parts Consumables Stocking Locations Local * 7x8 at select hubs All programs and options may not be available for all locations. Please consult your local service manager. Jul-02  This slide remains the same. Note that the “copper” and “aluminum” background has shading, adding dimension so the chart doesn’t appear merely flat. C O N F I D E N T I A L

iPartner - Availability
iPartner™ Service Offerings Availability iPerformance i724 iValue iShare iDM Compatible tools 2350 l l l 213X NT l l l AIT2,3 l l l l ASET F5X l l l l Archer 10 l l l l SP1 l l l l Slide remains the same. 5XXX XP l l l l Available Q3’CY02 l l Available Q4’CY02 C O N F I D E N T I A L

iPartner: Current Customers
Beta tested at major semiconductor manufacturers in North America iSupport technology widely accepted … 20+ customer sites with iDM servers in US, Europe, Taiwan, Japan and Korea More than 200 tools connected to online support We are picking up the customer locations as shown on the brochure back cover map. They will appear as black pinpoints. The connectivity rays of light will start as diffused “hot-spots” from Asia (Japan/Korea/Taiwan), Singapore, Israel, Europe, US eastern seaboard, northern Midwest and Texas and arc over to CA (the brightest hot spot). By glowing or diffusing the designated hot-spot areas, we eliminate the need to show any short-distance local connections. They are implied. C O N F I D E N T I A L

Make KLA-Tencor your support partner
iPartner Make KLA-Tencor your support partner Cut your costs and improve tool uptime “It’s simply a better way of doing business” Slide remains the same. C O N F I D E N T I A L

Back up C O N F I D E N T I A L

Maintainability Metrics
iPartner: Beta Results Demonstrated MTTR Reduction From 10 to 6 hours Increased Uptime and Reduced Onsite Repair SP1_TBI Systems Maintainability Metrics 6.0 2 4 6 8 10 12 14 Jul-01 Sep-01 Nov-01 Jan-02 Mar-02 May-02 Hours MTTR Beta Engagement 97% Availability – Customer data Slide remains the same. C O N F I D E N T I A L

Price Comparison Example (US)
iValue Reduces Costs, Provides More Coverage, and Resolves Problems Faster Tool Type # of Tools Basic iValue 2139 10 $111 $111 AIT II with ADC 10 $105 $105 Slide remains the same. SP1-TBI 2 $36 $36 Archer 10 2 $42 $42 iPartner Saver Awards NA None -$40 Discount* Total Discounted Price 24 $1,985 $1,945 C O N F I D E N T I A L

iPartner Comprehensive Offerings
iPerformance (Q4CY02) Optimizes Tool Performance 7 x 8 onsite support 4 covered hour onsite response 7 x 24 online support Remote support Parts diagnosis & ordering 1 hour priority online response All parts and labor for PM and repair Priority escalation Hardware and software revisions Optional onsite off-shift support iPerformance “header” bar to be cast in red, but still maintain the metallic appearance. Bulleted statements are to be “bold” for consistency with other charts. C O N F I D E N T I A L

iPartner Comprehensive Offerings
Reduces Cost and Increases Uptime 5 x 8 onsite support (7 x 8 at select hubs) Onsite response (after working online) 4 covered hours on average for tool-down cases 4 or 8 covered hours for non-tool down cases 7 x 24 online support Remote support Parts diagnosis & ordering 2 hour online response All parts and labor for PM and repair Hardware and software revisions Optional onsite off-shift support available “Header” bar to pick up the yellow/gold metallic color of iValue (next slide). C O N F I D E N T I A L

iPartner Value Offerings
iValue Balances Cost and Performance 5 x 8 onsite coverage (7 x 8 at select hubs) Onsite response (after working online) 4 covered hours on average for tool-down cases 4 or 8 covered hours for non-tool down cases 7 x 24 online support Remote support Parts diagnosis & ordering 4 hour online response All parts and labor for PM and repair Hardware and software revisions Optional onsite off-shift support available iValue “header” bar to have a green metallic appearance. Bulleted statements are to be bold for consistency with other charts. C O N F I D E N T I A L

iPartner Value Offerings
iShare Saves More Through Shared Responsibility Your engineers perform PMs, calibrations and first level diagnostics 8 K-T onsite visits annually (including one PM visit) 5 x 8 onsite coverage (7 x 8 at select hubs) Onsite response (after working online) 4 or 4 covered hours on average for tool downcases 8 covered hours for non-tool down cases 7 x 24 online support Remote support Parts diagnosis & ordering 4 hour online response All parts for PM and repair; you order authorized parts through OSC On-going skill and PM verification Service bulletins & special purchasable tooling Hardware and software revisions Add blue to the metallic look of the “header” bar. C O N F I D E N T I A L

iPartner Saver Awards Example
For example, a fab with $2M service entitlement: KLA-Tencor will pay for installing, licensing and maintaining the iDM We will pay for the license fees of connected tools We will provide 7x24 online support We share savings after paying for the license and maintaining the server Expected annual saving up to $40,000 OSC Utilization Savings Apply Toward iPartner Offering Targets iPartner Offerings Slide remains the same. 85 to 89% Neutral iPerformance i724 iValue 90 to 94% $15,000 95% or More $40,000 C O N F I D E N T I A L

Utilization Metric - iPartner
Clarify Data Case History Summary Report Onsite CSE Date / Time minus Case Open Date / Time Percentage Cases Opened prior to CSE onsite plus remote resolution, over all cases Chart Product Family Performance. Chart Overall Performance Chart 3 month rolling average Targets 3 month rolling average over either: 85%, 90% or 95% Slide remains the same. C O N F I D E N T I A L

i724 Reduces Costs, Provides More Coverage, and Resolves Problems Faster Tool Type # of Tools Full i724 2139 10 $121 $121 AIT II with ADC 10 $116 $116 Slide remains the same. SP1-TBI 2 $39 $39 Archer 10 2 $47 $47 iPartner Saver Awards NA None -$40 Discount* Total Discounted Price 24 $2,177 $2,137 C O N F I D E N T I A L

iValue Reduces Costs, Provides More Coverage, and Resolves Problems Faster Tool Type # of Tools Basic iValue 2139 10 $111 $111 AIT II with ADC 10 $105 $105 Slide remains the same. SP1-TBI 2 $36 $36 Archer 10 2 $42 $42 iPartner Saver Awards NA None -$40 Discount* Total Discounted Price 24 $1,985 $1,945 C O N F I D E N T I A L

iPartner Roadmap V 2.0 (July ’02) V 2.7 (2H’02) V 3.0 (Q2CY03)
AIT III(V5.0.15SP4) SP1-TBI (V ) ADC (2.0.17NT)** 8X00 (4.0P2 NT) F5x (V2.6) Archer 10 (V1.1*4) 5xxxXP (V14.6) i724, iValue and iShare 7x24 Online Support 7x24 Parts Diagnosis & Ordering Worldwide VPN Service Request from iDM Browser Remote Operation, data transfer E-10 Reporting Supported Tools iPartner Offerings and Features iDM Previous Tools Plus Next Generation: 2370 SP1-DLS & Next Generation AIT XP Remote Support Only 2401/Viper eS20XP TeraStar ADC Manager iPerformance Tool Health Monitoring and Reporting System Optimization Service Multi-Language Translation Support Unix OS Support Intra-fab Remote Operation (on selected products) Data Table Viewer and export Previous Tools Plus: CRS 3000 Quantox Others TBD Expanded architecture to connect 75 tools Configurable reporting engine Simplified User Administration Improved Metric reporting with SPC VoIP Slide remains the same. ** = Remote Support Only C O N F I D E N T I A L

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